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Inventors

HUA-SHUANG KONG THOMAS G. COLEMAN CALVIN H. CARTER, JR.

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CREE, INC.

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CREE RESEARCH, INC., Assignor

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APPARATUS FOR ELIMINATING RESIDUAL NITROGEN CONTAMINATION IN EPITAXIAL LAYERS OF SILICON CARBIDE AND RESULTING PRODUCT

07/558,196 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 24, 1990

Examiner KENNETH HORTON

Class 029

Art Group 1107

Patent No. 5,119,540

Case Type Utility - 029/025010

Status Patented Case

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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APPARATUS FOR ELIMINATING RESIDUAL NITROGEN CONTAMINATION IN EPITAXIAL LAYERS OF SILICON CARBIDE AND RESULTING PRODUCT

07/558,196 | U.S. Patent Application

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