WO 2022/100930
`
`4/15
`
`PCT/EP2021/077390
`
`
`
`FIG. 1
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`O15
`
`PCT/EP2021/077390
`
`10
`
`
`
`
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`3/15
`
`PCT/EP2021/077390
`
`FIG. 3A
`
`
`
`FIG. 3B
`
`SUBSTITUTE SHEET (RULE 26)
`
`
`
`
`

`

`WO 2022/100930
`
`30 ~
`
`AIS
`
`PCT/EP2021/077390
`
`yy
`
`FIG. 4
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`5/15
`
`PCT/EP2021/077390
`
`
`
`
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`6/15
`
`PCT/EP2021/077390
`
`
`
`34d[oeteat ettena, "tareneame,
`
`||
`
`BAD. tot
`
`
`
`FIG. 5C
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`PCT/EP2021/077390
`
`7/15
`
`grating difraction field strength
`
`direction)
`Diffractionorder(non-shearing
`
`
`
`8|
`
`tera
`
`eens
`
`mes
`
`Diffraction order
`(shearing direction)
`
`FIG. 6A
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`PCT/EP2021/077390
`
`8/15
`
`grating difraction field strength
`
`
`
`Diffractionorder(non-shearingdirection)
`
`
`
`
`
`42%
`|
`| 3.496 |
`pop
`1%)
`3.7% |
`
`B4% |
`11.396 |
`Lf |
`13.7%
`
`6
`
`2
`
`31%
`
`; ba fal<I
`Iam rlee | one
`pms cal >it nalem r I
`
`
`| 1.0%
`|135% P rac leis |
`| 1.2%
`me] lao] fas -
`
`
`
`
`
` «|r|
`[as
`
`
`
`Diffraction order
`(shearing direction)
`
`FIG. 6B
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`PCT/EP2021/077390
`
`9/15
`
`Interference strength
`
`FIG. 6C
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`10/15
`
`PCT/EP2021/077390
`
`FIG. 7A
`
`FIG. 7B
`
`FIG. 7C
`
`FIG. 8A
`
`FIG. 8B
`
`FIG. 8C
`
`FIG. 9A
`
`FIG. 9B
`
`FIG. 9C
`
`FIG. 10A
`
`FIG. 10B
`
`FIG. 10C
`
`SUBSTITUTE SHEET (RULE 26)
`
`
`
`
`
`

`

`WO 2022/100930
`
`11/15
`
`PCT/EP2021/077390
`
`FIG. 11A
`
`FIG. 11B
`
`SUBSTITUTE SHEET (RULE 26)
`
`
`

`

`WO 2022/100930
`
`42/15
`
`PCT/EP2021/077390
`
` 48a25a 26a 17b lost 26b‘25c
`
`FIG. 12
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`413/15
`
`PCT/EP2021/077390
`
`
`
`TO |
`
`
`15a’
`15a]
`16a
`
`
`\ 15b’ 15b”
`16a" 16b° 16b”
`
`y ~|
`|
`
`‘
`z
`
`nv
`ms
`
`Z
`£oU
`
`>
`x
`
`a
`
`FIG. 13A
`
` fh
`
`|
`
`oe
`
`y
`
`| .Be>
`
`
`z
`
`x
`
`FIG. 13B
`
`SUBSTITUTE SHEET (RULE 26)
`
`

`

`WO 2022/100930
`
`14/15
`
`PCT/EP2021/077390
`
`
`
`
`
`
`
`aseyg'9090pO20020PO0-90°80°I
`
`oO
`
`Co
`oo
`o sF
`
`D> &
`«>
`
`002WA
`
` 00s}8080002<%éOp
`
`000}00;=.
`
`
`SUBSTITUTE SHEET (RULE 26)
`
`GbOld
`——- gud0Vid@poineeoy~~5guoyisoduin9ag
`
`
`tfMOHISCCLUODD7}mn
`(id)
`
`
`
`

`

`WO 2022/100930
`
`45/15
`
`PCT/EP2021/077390
`
`
`
`
`
`0.5
`
`0.45
`
`0.47
`
`0.357
`
`0.37
`
`0.257
`
`0.27
`
`0.15
`
`0.17
`
`0.05
`
`
`
`Repro(nm)
`
`
`
`é enews cn -0.2
`
`400
`
`600
`
`800
`
`-200
`0
`200
`Misalignment (nm)
`
`FIG. 16
`
`-600
`
`-400
`
`0-
`
`800
`
`Expected position dependence
`
`oc
`
`o ©an
`
`-0.1
`
`-800
`
`-600
`
`-400
`
`-200
`0
`200
`Misalignment (nm)
`
`400
`
`600
`
`800
`
`FIG. 17
`
`SUBSTITUTE SHEET (RULE 26)
`
`
`
`Expected-Alignedposition(nm)
`
`
`
`
`
`

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