(12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT)
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`UNH AA AATA
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`(10) International Publication Number
`WO 2022/100930 Al
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`= a
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`WIPOIPCT
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`(19) World Intellectual Property
`Organization
`International Bureau
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`(43) International Publication Date
`19 May 2022 (19.05.2022)
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`SD)
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`International Patent Classification:
`G03F 7/20 (2006.01)
`GOIM 11/702 (2006.01)
`GO1F 9/02 (2006.01)
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`(21)
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`International Application Number:
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`PCT/EP202 1/077390
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`DZ, EC, EE,EG,ES, FL, GB, GD, GE, GH, GM, GT, HN,
`HR, HU,ID, IL, IN,IR,IS, IT, JO, JP, KE, KG, KH, KN,
`KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD,
`ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO,
`NZ, OM,PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW,
`SA, SC, SD, SE, SG, SK, SL, ST. SV, SY, TH, TJ, TM, TN,
`TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW.
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`Designated States (unless otherwise indicated, for every
`kind of regional protection available): ARIPO (BW, GH,
`GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ,
`UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ,
`TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK,
`EE, ES, FI, FR, GB, GR, HR, HU,IE, IS, IT, LT, LU, LV,
`MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM,
`TR), OAPI (@®F, BJ, CF, CG, CI, CM, GA, GN, GQ, GW,
`KM, ML, MR,NE, SN, TD, TG).
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`Published:
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`with international search report (Art. 21(3))
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`(22)
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`InternationalFiling Date:
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`(25)
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`Filing Language:
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`Publication Language:
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`05 October 2021 (05.10.2021)
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`(84)
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`English
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`English
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`(26)
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`(30)
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`(71)
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`(72)
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`(74)
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`(81)
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`Priority Data:
`20207351.6
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`13 November 2020 (13.11.2020) EP
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`Applicant: ASML NETHERLANDS B.V.[NL/NL]; P.O.
`Box 324, 5500 AH Veldhoven (NL).
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`Inventors: WOESSNER, Achim; P.O. Box 324, 5500 AH
`Veldhoven (NL). PAGANO,Roberto; P.O. Box 324, 5500
`AH Veldhoven (NL). SPIJKMAN, Mark-Jan; P.O. Box
`324, 5500 AH Veldhoven (NL).
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`Agent: ASML NETHERLANDS B.V.; Corporate Intel-
`Icctual Property, P.O. Box 324, 5500 AH Veldhoven (NL).
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`Designated States (unless otherwise indicated, for every
`kind of national protection available): AE, AG, AL, AM,
`AO,AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ,
`CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO,
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`wo2022/100930A.lITNIMINIINUIUTIMIMTACHLAINA
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`luminate the sensor apparatus with radiation, the sensor apparatus comprising
`a patterned region arranged to receive a radiation beam andto formaplural-
`ity of diffraction beams, the diffraction beams being separated in a shearing
`direction; the sensor apparatus comprising a radiation detector (24); where-
`in the patterned region is arranged such that at least some of the diffraction
`beams form interference patterns on the radiation detector; wherein the sensor
`apparatus comprises a plurality of patterned regions (19a - 19c, 20a, 20b), and
`wherein pitches of the patterned regions are different in adjacent patterned re-
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`(4) Title: MEASUREMENT SYSTEM AND METHODOF USE
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`(57) Abstract: A measurement system (11), the measurement system com-
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`gions. prising: a sensor apparatus (22); an illumination system (IL1) arrangedto il-
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