`
`Equivalent of Form PTO/SB/08a (07-09)
`Complete if Known
`
`
`INFORMATION DISCLOSURE__|Filing Date Herewith
`STATEMENTBY APPLICANT
`(Use as many sheets as necessary)
`
`
`
`
`Art Unit
`To Be Assigned
`Examiner Name
`To Be Assigned
`Attorney Docket Number|3857.2990001
`
`
`
`
`known)
`
`U.S. PATENT DOCUMENTS
`
`Publication Date
`MM-DD-YYYY
`
`Nameof Patentee or
`Applicant of Cited Document
`
`Pages, Columns, Lines, Where
`Relevant Passages or Relevant Figures Appear
`
`Document Number
`-
`Number-Kind Code 2 af
`
`Examiner
`initials*
`
`|
`Cite
`No.!
`
`US3
`
`Us4
`
`USS
`
`US6
`
`Wischmeieretal.
`
`Neumann etal.
`
`De Grootetal.
`
`Tang et al
`
`FOREIGN PATENT DOCUMENTS
`
`Pages, Columns, Lines,
`Publication
`Cit
`Exami
`Name of Patentee or
`.
`Where Relevant Passages or
`Date
`-xamuner
`
`
`initials* No.l|Country Code3-Number*- MM-DD-YYYY Applicant of Cited Document Relevant Figures Appear
`
`
`sue
`pp
`Kind Code> (if known)
`DE 10258142 Al|06-24-2004|ZEISS CARL SMT AG Po
`WO 2019/149467 Al|08-08-2019|ASML NETHERLANDSB.V. Po
`
`Examiner Signature| ate Considered |
`
`*EXAMINER:Initial if reference considered, whether ornot citation is in conformance with MPEP 609. Draw line throughcitation if not in conformance and
`not considered. Include copy ofthis form with next communication to applicant. | Applicant’s unique citation designation number(optional). ? See Kinds
`Codes of USPTO Patent Documents at www.uspto.gov or MPEP 901.04. 3? Enter Office that issued the document, by the two-letter code (WIPO Standard
`ST.3). 4 For Japanese patent documents, the indication ofthe yearof the reign of the Emperor must precedethe serial number of the patent document. ° Kind
`of document by the appropriate symbols as indicated on the document under WIPO Standard ST.16 if possible. ° Applicantis to place a check mark here if
`English language Translationis attached.
`
`

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