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`Remarks
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`ASML Netherlands B.V.
`Application No. To Be Assigned
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`Uponentry of the foregoing amendment, claims 24-43 are pending in the application, with
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`claims 24 and 39 being the independent claims. Claims 1-23 are sought to be canceled without
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`prejudice to or disclaimer of the subject matter therein. New claims 24-43 are sought to be added.
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`These changesare believed to introduce no new matter, and their entry is respectfully requested.
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`Conclusion
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`Prompt and favorable consideration of this Preliminary Amendmentis respectfully
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`requested. Applicant believes the present application is in condition for allowance. If the Examiner
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`believes, for any reason, that personal communication will expedite prosecution of this application,
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`the Examineris invited to telephone the undersigned at the numberprovided.
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`Respectfully submitted,
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`STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.
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`/Donald J. Featherstone/
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`Donald J. Featherstone
`Attorney for Applicant
`Registration No. 33,876
`Date:__May 8, 2023
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`1100 New York Avenue, N.W.
`Washington, D.C. 20005-3934
`(202) 371-2600
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`20228214.1
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`Atty. Dkt. No. 3857.2990001
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