View Details < Patent < SEARCH - KIPRIS(Korea Intellectual Property Rights Info... 12] 114] 0] Al
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`C23C 16/44(2006.01.01) C23C 18/12(2006.01.01) Co3C 17/22
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`C23C 16/4404(2013.01) G23C 18/1216(2013.01) C236 18/127(2013.01)
`CO3C 17/22(2013.01) CO3C 221 7/286(2013.01) CO3C 2218/111
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`PCT/US201 7/0681 78(2017,.12.22)
`WO2018085866(201 8.05.11)
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`http://engpat.kipris.or.kr/engpat/biblioa.do
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`2022-06-28
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