CONDITIONING APPARATUS AND METHOD, 18/251,261, No. M4VIMIPJWFYGX56 (U.S. Pat. App. Dec. 23, 2024)

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CONDITIONING APPARATUS AND METHOD, 18/251,261, No. M4VIMIPJWFYGX56 (U.S. Pat. App. Dec. 23, 2024)

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Riddle, Christina A.
`
`From:
`Sent:
`To:
`Subject:
`
`Don Featherstone <DONF@sternekessler.com >
`Saturday, December 14, 2024 4:47 PM
`Riddle, Christina A.
`interview re Appl. No. 18/251,261
`
` V CAUTION: This email has originated ':
`
`3. PLEASE CONSIDER THE SOURCE before responding,clicking on
`&
`‘ links, or opening attachments.
`
`Confidential
`
`Interview scheduled for Tues., Dec. 17th @ 2pm
`
`Participants:
`For PTO: Examiner Christina Riddle
`For Applicant: Don Featherstone (Reg. # 33,876)
`Re:
`Appl. No. 18/251,261
`Atty Ref: 3857.2970001
`
`Dear ExaminerRiddle,
`
`Thank you for agreeing to an interview.
`
`1.
`
`In particular, proposed amendments:
`Applicant wishes to discuss the objection and §112 rejections.
`29: “...wherein the first and second conditioning fluid reservoirs are in fluid connection with one another via a
`valve that is operable to control the level of conditioning fluid in the first conditioning fluid reservoir that is in
`fluid communication with the optical element.”
`
`32: “The conditioning system of claim 29, wherein the conditioning system is configured to operate at between
`around 0.02 and 0.9 bara or around 0.3 bara.”
`
`35: “A [[use of a]] sub-atmospheric pressure conditioning method system in a lithographic apparatus,
`comprising:...”
`
`37: “The methodof claim 36, wherein the system or sub-system comprises an optical element, a reflector, or a
`mirror.”
`
`Add 39: (New — from 32) The conditioning system of claim 29, wherein the conditioning system is configured to
`operate around 0.3 bara.”
`
`2.
`
`Applicant wishes to discuss the §103 rejections.
`
`Novak is directed to cooling linear motor coils, but does not disclose conditioning optical elements. Mainly
`concerned with leakage of the cooling fluid.
`
`Re claim 24, NomotoFIG. 3 has valve 9 and pump 1 after heat exhausting member 11 and flow restrictor (valve 4
`and sensor 5) before heat exhausting member 11.
`
`

`Recognizing that Internet communications are not secure, | hereby authorize the USPTO to communicate with the
`undersigned and practitioners in accordance with 37 CFR 1.33 and 37 CFR 1.34 concerning any subject matter of this
`Icma
`il.
`| understand that a copy of these
`tant messaging, or electron
`application by video conferenc
`ing, ins
`Ions W
`communica
`t
`ica
`tion file.
`ill be made of record in the appl
`
`Please contact me you have any questions or comments.
`
`Regards, Don.
`
`tom,&&uit#16ae
`
`MaZe
`
`
`
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`

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