2020P00230WO
`
`PCT REQUEST
`
`1/5
`
`(Original in Electronic Form)
`
`0
`
`0-1
`
`-
`
`0-3
`
`For receiving Office use only
`
`International Application No.
`
`Name of receiving Office and "PCT
`International Application"
`
`
`
`PCT/EP2021/078531
`
`——
`
`RO/EP
`
`
`
`0-4
`
`0-4-1
`
`Form PCT/RO/101 PCT Request
`
`Prepared Using
`
`0-5
`
`Petition
`
`PCT Online Filing
`Version 3.51.000.272e MT/FOP
`20141031/0.20.5.24
`
`The undersigned requests that the present international application be processed according to the Patent Cooperation
`
`Treaty
`0-6
`Receiving Office (specified by the
`European Patent Office (EPO)
`(RO/EP)
`
`applicant)
`Applicant's or agent's file reference
`
`2020P00230WO
`CONDITIONING APPARATUS AND METHOD
`
`0-7
`I
`ll
`Il-1
`I-2
`I-4
`I-S
`
`II-6
`ll-7
`II-8
`I-10
`Il-1
`III-1-1
`l-1-3
`Il-1-4
`Ill-1-5
`
`
`
`Applicant
`This person is
`
`Applicant only
`All designated States
`ASML Netherlands B.V.
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`NL
`NL
`+31 (0) 40 268 4911
`asml-cip@asml .com
`
`Applicant and/or inventor
`This person is
`{Inventor for
` |Name (LAST,First)
`|Address
`
`Inventor only
`All designated States
`VAN DER NET, Antonius, Johannus
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`
`Applicant and/or inventor
`-2
`This personis
`II-2-1
`[Inventorfor
`-2-3
`2-4 |Name (LAST, First)
`Ill-2-5
`|Address
`
`Inventor only
`All designated States
`VERHAGEN, Martinus, Cornelis, Maria
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`
`

`

`2020P00230WO
`
`PCT REQUEST
`
`2/5
`
`Applicant and/or inventor
`This personis
`
`Inventor for
`Name (LAST, First)
`Address
`
`Applicant and/or inventor
`This person is
`Inventor for
`Name(LAST,First)
`
`Address
`
`Applicant and/or inventor
`This person is
`Inventor for
`Name (LAST, First)
`Address
`
`Inventor only
`All designated States
`JACOBS, Johannes, Henricus, Wilhelmus
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`
`Inventor only
`All designated States
`VAN BOKHOVEN, Laurentius, Johannes,
`Adrianus
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`
`Inventor only
`All designated States
`VAN LIPZIG, Jeroen, Peterus, Johannes
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`
`Agent or common representative; or
`address for correspondence
`The person identified below is hereby/
`has been appointed to act on behalf of
`the applicant(s) before the competent
`International Authorities as:
`
`Agent
`
` (Original in Electronic Form)
`
`III-3
`IIl-3-1
`
`IIl-3-3
`
`IIl-3-4
`
`IIl-3-5
`
`IIl-4.
`Ill-4-1
`
`1-4-3
`
`1-4-4
`
`Il-4-5
`
`HI-5
`III-5-1
`
`III-5-3
`
`III-5-4
`
`III-5-5
`
`I\V-1-1
`
`IV-1-2
`
`IV-1-3
`
`IV-1-5
`
`IV-1-5(a
`
`IV-1-6
`
`v-1
`
`Name
`Address
`
`ASML Netherlands B.V.
`Corporate Intellectual Property
`P.O. Box 324
`5500 AH Veldhoven
`Netherlands
`+31 (0) 40 268 4911
`Telephone No.
`asml-cip@asml1 .com
`e-mail
`-
`.
`E-mail authorization
`:
`The receiving Office, the International exclusively in electronic form (no paper
`Searching Authority, the International
`~[MOtIfications will be sent)
`Bureau andthe International Preliminary
`Examining Authority are authorized to
`use this e-mail address, if the Office or
`Authority so wishes, to send notifications
`issued in respect of this international
`application:
`Agent's registration No.
`DESIGNATIONS
`
`790
`
`Thefiling of this request constitutes under Rule 4.9(a), the designation of all Contracting States bound by the PCT
`on the international filing date, for the grant of every kind of protection available and, where applicable, for the
`grant of both regional and national patents.
`
`

`

`
`
`
`
`Vil-1
`
`Vil-2
`
`2020P00230WO
`
`PCT REQUEST
`
`3/5
`
`(Original in Electronic Form)
`
`EP Priority document request
`
`Vi-1
`
`VI-1-1
`
`VI-1-2
`
`VI-1-3
`
`Vi-2
`
`VI-3
`
`Priority claim of earlier regional
`application
`Filing date
`Number
`
`Regional Office
`
`The International Bureau is requested to
`obtain from a digital library a certified
`copy of the earlier application(s)
`identified above as item(s), using, where
`applicable, the access code(s) indicated:
`Incorporation by reference-
`
`10 November 2020 (10.11.2020)
`20206671.8
`
`VI-1 Access code: DE57
`
`where an element of the international application referred to in Article 11 (1) (iii)(d) or (e) or a part of the description, claims
`or drawings referred to in Rule 20.5(a), or an element or part of the description, claims or drawings referred to in Rule
`20.5bis(a) is not otherwise containedin this international application but is completely contained in an earlier application
`whose priority is claimed on the date on which one or more elements referred to in Article 11(1)(iii) were first received by
`the receiving Office, that element or part is, subject to confirmation under Rule 20.6, incorporated by reference in this
`international application for the purposes of Rule 20.6.
`
`iatemationalSearchingAuthority—[European Patent Office (EPO) (ISA/EP)
`
`
`application
`
`Vil-2-1
`
`VII-2-2
`
`VII-2-3
`
`VII-2-5
`
`vill
`Vill-1
`
`Vill-2
`
`VIll-3
`
`VIII-4
`
`VIll-5
`
`10 November 2020 (10.11.2020)
`20206671.8
`EP
`
`A copy of the results of the earlier
`search
`
`Numberof declarations
`
`Request to use results of earlier
`search; reference to that search
`Filing date
`Application Number
`
`Country (or regional Office)
`Documentsare available to the ISA in a
`form and a manneracceptableto it, and
`therefore do not need to be submitted by
`the applicant to the receiving Office, or
`to the ISA (Rules 12bis1.(c) and (d) and
`12bis.2(b)):
`Declarations
`
`Declaration as to the identity of the
`inventor
`Declaration as to the applicant's
`entitlement, as at the internationalfiling
`date, to apply for and be granted a
`patent
`Declaration as to the applicant's
`entitlement, as at the international filing
`date, to claim the priority of the earlier
`
`Declaration of inventorship (only for the
`purposesof the designation of the
`United States of America)
`Declaration as to non-prejudicial
`disclosures or exceptions to lack of
`novelty
`
`

`

`2020P00230WO
`
`PCT REQUEST
`
`4/5
`
`(Original in Electronic Form)
`
`Numberof sheets
`
`Electronic file(s) attached
`
`Y v Z
`
`Checklist
`Request (including declaration sheets)
`
`Z
`-_
`
`Sequencelisting part of the description
`(also to be used for the purposes of
`international search)
`TOTAL
`26
`Accompanying Items
`Paper document(s) attached
`Electronic file(s) attached
`Fee calculation sheet PO v
`Other
`Pre-conversion
`v
`archive Statement
`(Section 706): This
`is a complete and
`accurate copy of
`the international
`application prior
`to its conversion
`into the electronic
`document format in
`which it is filed.
`
`
`
`IX-1
`
`IX-2
`
`IX-3
`
`X-4
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`IX-5
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`IX-6a
`
`IX-7
`
`IX-8
`
`IX-19
`
`IX-20
`
`IX-21
`
`X-1
`
`X-1-1
`ASML Netherlands B.V.
`Name
`X-1-2
`Petrus Johannes Waltherus Slenders
`Name ofsignatory
`X-1-3
`Capacity (if such capacity is not obvious|(Representative)
`
`Figure of the drawings which should
`accompanythe abstract
`Languageoffiling of the international Engli sh
`application
`Signature of applicant, agent or
`commonrepresentative
`
`|2
`
`/Petrus Johannes Waltherus Slenders/
`
`from reading the request)
`
`

`

`2020P00230WO
`
`PCT REQUEST
`
`5/5
`
`(Original in Electronic Form)
`
`FOR RECEIVING OFFICE USE ONLY
`
`14 OCT 2021 (1 4.1 0.2021)
`
`10-1
`
`10-2
`10-2-1
`10-2-2
`
`10-3
`
`10-4
`
`10-5
`10-6
`
`Date of actual receipt of the
`purported international application
`
`
`
`Corrected date of actual receipt due
`to later but timely received papers or
`drawings completing the purported
`international application
`Date of timely receipt of the required
`corrections under PCT Article 11(2)
`International Searching Authority
`Transmittal of search copy delayed
`until search fee is paid
`
`I SA/E P
`
`FOR INTERNATIONAL BUREAU USE ONLY
`
`11-1
`
`Date of receipt of the record copy by
`the International Bureau
`
`