PATENT COOPERATION TREATY
`
`PCT
`
`INTERNATIONAL SEARCH REPORT
`
`(PCT Article 18 and Rules 43 and 44)
`
`Applicant's or agent's file reference
`2020P00230WO
`
`FOR FURTHER
`ACTION
`
`see Form PCT/ISA/220
`as well as, where applicable, item 5 below.
`
`International application No.
`
`Internationalfiling date (day/month/year)
`
`(Earliest) Priority Date (day/month/year)
`
`PCT/EP2021/078531
`
`14 October 2021 (14-10-2021)
`
`10 November 2020 (10-11-2020)
`
`Applicant
`
`ASML NETHERLANDS B.V.
`
`This international search report has been prepared by this International Searching Authority and is transmitted to the applicant
`according to Article 18. A copy is being transmitted to the International Bureau.
`
`sheets.
`3
`This international search report consists of a total of
`It is also accompanied by a copy of each prior art documentcited in this report.
`
`1. Basis of the report
`a. With regard to the language,the international search was carried out on the basis of:
`the international application in the languagein which it wasfiled
`, which is the language
`a translation of the international application into
`of a translation furnished for the purposesof international search (Rules 12.3(a) and 23.1(b))
`
`noneof the figures is to be published with the abstract
`
`LC]
`
`This international search report has been established taking into account the rectification of an obvious mistake
`authorized by or notified to this Authority under Rule 91 (Rule 43.66/s(a)).
`
`With regard to any nucleotide and/or amino acid sequence disclosed in the international application, see Box No. I.
`
`Certain claims were found unsearchable (See Box No. Il)
`
`[]
`
`Unity of invention is lacking (see Box NoIll)
`
`4. With regard to the title,
`
`the text is approved as submitted by the applicant
`] the text has been established by this Authority to read as follows:
`
`5. With regard to the abstract,
`the text is approved as submitted by the applicant
`the text has been established, according to Rule 38.2, by this Authority as it appears in Box No.IV. The applicant
`may, within one month from the date of mailing of this international search report, submit comments to this Authority
`
`L_}
`
`6. With regard to the drawings,
`a.
`the figure of the drawings to be published with the abstract is Figure No.
`[] as suggested by the applicant
`as selected by this Authority, because the applicant failed to suggest a figure
`as selected by this Authority, because this figure better characterizes the invention
`
`[]
`
`b. []
`
`Form PCT/ISA/210 (first sheet) (January 2015)
`
`

`

` INTERNATIONAL SEARCH REPORT
` International application No
`
`PCT/EP2021/078531
`
`A. CLASSIFICATION OF SUBJECT MATTER
`INV. GO3F7/20
`G02B7/18
`ADD.
`
`According to International Patent Classification (IPC) or to both national classification and IPC
`B. FIELDS SEARCHED
`Minimum documentation searched (classification system followed by classification symbols)
`GO3F G02B
`
`Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched
`
`
`Electronic data base consulted during the international search (name of data base and, where practicable, search terms used)
`
`EPO-Internal, WPI Data,
`
`INSPEC
`
`
`Cc. DOCUMENTS CONSIDERED TO BE RELEVANT
`
`Relevant to claim No.
`Category*|Citation of document, with indication, where appropriate, of the relevant passages
`
`(ASML NETHERLANDS BV
`WO 2017/153152 Al
`[NL]) 14 September 2017 (2017-09-14)
`cited in the application
`paragraphs [0025],
`[0034],
`
`[0035]
`
`(ASML NETHERLANDS BV
`DE 10 2013 111801 Al
`[NL]; ZEISS CARL SMT GMBH [DE])
`13 March 2014 (2014-03-13)
`paragraphs [0029]
`—-—
`[0040]
`
`(NIKON CORP [JP])
`EP 1 376 185 A2
`2 January 2004 (2004-01-02)
`paragraphs [0006]
`—-
`[0008]; figures 4, 5a
`
`
`
`
`
`Klaus
`
`03/02/2022
`25 January 2022
`
`Authorized officer
`Name and mailing address of the ISA/
`European Patent Office, P.B. 5818 Patentlaan 2
`NL - 2280 HV Rijswijk
`Tel. (+31-70) 340-2040,
`Fax: (431-70) 340-3016
`Form PGT/ASA/210 (second sheet) (April 2005)
`
`[| Further documents are listed in the continuation of Box C. [x|See patent family annex.
`
`* Special categories of cited documents:
`
`"A" document defining the general state of the art which is not considered
`to be of particular relevance
`"E" earlier application or patent but published onorafter the international
`filing date
`"L" document which may throw doubts on priority claim(s) or which is
`cited to establish the publication date of another citation or other
`special reason (as specified}
`"O" documentreferring to an oral disclosure, use, exhibition or other
`means
`"P" document published prior to the internationalfiling date but later than
`the priority date claimed
`
`"T" later document publishedafter the internationalfiling date or priority
`date and not in conflict with the application but cited to understand
`the principle or theory underlying the invention
`
`"X" documentof particular relevance;; the claimed invention cannot be
`considered novel or cannot be considered to involve an inventive
`step when the documentis taken alone
`"¥" documentof particular relevance;; the claimed invention cannot be
`considered to involve an inventive step when the documentis
`combined with one or more other such documents, such combination
`being obvious to a person skilled in the art
`
`" document member of the samepatent family
`
`Date of the actual completion of the international search
`
`Date of mailing of the international search report
`
`Eisner,
`
`

`

`INTERNATIONAL SEARCH REPORT
`Information on patent family members
`
`
`
`International application No
`PCT/EP2021/078531
`
`Patent family
`member(s
`
`20180122657 A
`2018389 A
`2019033499
`2017153152
`
`1376185
`2005004145
`2005099611
`
`Publication
`date
`
`13-11-2018
`12-09-2017
`31-01-2019
`14-09-2017
`
`02-01-2004
`06-01-2005
`
`
`Patent document
`
`cited in search report
`
`
`
`wo 2017153152
`Al
`
`12-05-2005
`
`Publication
`date
`
`14-09-2017
`
`Form PGTASA/210 (patent family annex) (April 2005)
`
`