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`CONCERNING A SUBMISSION UNDER 35 U.S.C. 371
`| To Be Assigned
`international Application No.
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`international Filing Date
`§ Priority Date Claimed
`POTIEP2021/078534
`14 October 2021 (14.10.2021)
`10 November 2020 (10.17.2020)
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`Applicant herewith submits to the United States Designated/Elected Office (DO/EO/UIS) the following items and other information.
`4. | This is an express request fo begin national examination procedures (35 U.S.C. 371). NOTE: The express request under
`35 U.S.C. 3747(1 wil not be effective uniess the requirements under 35 U.S.C. 374ici1}, (2), and (4) for payment of the basic
`national fee, copy of the International Application and Enolish transiation thereof (if required}, and the oath or declaration of the
`inventor(s) have been received.
`A copy of the Infernational Application (35 ULS.C. 3774(c}{2)) is attached hereto (not required if the International Application was
`previously communicated by the Internalional Bureau or was filed in the United States Receiving Office (RO/US)).
`An English language translation of the international Application (25 U.S.C. 271(0(2))
`fi is attached hereto.
`fi hes been previously submilled under 35 U.S.C. 154(d)(4).
`An cath or declaration of the inventor(s) (35 U.S.C. 371(o){4y
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`Pi was previously filed in the International phase under PCT Rule 4.7744.
`tems 5 to 8 below concern amendments made in the international shase.
`PCT Article 19 and 34 amendments
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`Amendments fo the claims under PCT Aricle 19 are atlached Hot required if communicated by the International Bureau}
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`P| English transtation of the PCT Article 19 amendment is attached (85 USC. 37 1(cH@).
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`English transtation of annexes (Article 19 and/or 34 amendrnents only) of the International Preliminary Examination Report is
`attached (35 U.S.C. 371(o(5)}.
`Cancellation of amendments made in the international
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`. 7 Do not enter the amendment made in the international phase under PCT Article 19.
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`Do not enter the amendment made in the international phase under PCT Article 34.
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`NOTE: A proper amendment made in English under Aricle 19 or 34 will be entered in the US. national phase application absent a clear
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`The following tems 9 to 17 concern a document{s) or information included.
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`10.
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`47.
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`An information Disclosure Statement under 37 CFR 1.97 and 1.98.
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`A preliminary amendment.
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`An Application Data Sheet under 37 CFR 1.76.
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`A substitule specification, NOTE: A substitute specification cannot include claims. See 37 CFR 1.125{b).
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`A power of atlomey and/or change of address letter.
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`A computer-readable form of the sequence listing in accordance with POT Rule 13fer.3 and 37 CFR 1.821-1.825 (not required if
`sequence listing In text format was indicated on the PCT Request as part of the International Appiication and the sequence listing
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`Assignment papers (cover sheet and document(s}. Name of Assignee: ASML Netherlands B.V.
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`37 GFR 3.73{c) Statement (when there is an Assignee).
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`FTO-1366 (10-20)
`Approved for use through 10/31/2022. OMB 0851-0021
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`US. APPLN. No. Gf known — see 37 CFR 1.5)
`INTERNATIONAL APPLICATION No.
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`ATTORNEY BOCKET No.
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`To Be Assigned
`17.
`[agi Other tems or information:
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`pPOTIEP2021/078531
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`|3857.2970001
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`Authorization to Treat a Reply as Incorporating an Extension of Time Under 37 C.F.R. § 1.136(a)(G)
`international Search Report
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`The following fees have been submitted.
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`CALCULATIONS
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`18. fa} Basic national fee (87 CFR 1.49208)occ ccc tect tees cteseee tesesevar senate snetaeenoneenes
`i Examination fee (37 CFR 7.492(c))
`2
`if the written opinion prepared by ISA/US orthe International preliminary examination report
`$8
`prepared by IPEA/US indicates all claims satisfy provisions of PCT Article 33(1)-(9...0000......
`All other SHUSHONS 00 cece cee eee etter tat cet titer tert tttitttititieeee $808
`earch fee (37 CFR 1.492(b))
`| 5540.00
`if the written opinion prepared by ISA/US or the international preliminary examination report
`prepared by IPEA/US indicates all claims satisfy provisions of PCTArticle S8()-(@.000000..|$8
`Search fee (7 CFR 1.445(a\(2)) has been paid on the international application fo the USPTO as
`an International Searching Authority 200000000 cece cee cee setae teres tertertetissreeceesers $449
`international Search Report prepared by an ISA other than the US and provided to the Office or
`previously communicated to the US by the IB.crete SE4G
`All other sHUa@HONS oo cence cesar ees eee ree
`ne tt teerttttttet tetera OFRG
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`$800.00
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`|
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`$ 320.00
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`TOTAL OF 48, 49, and 20 =§$4 660.00
`i Additional fee for specification and drawings filed in paper over 100 sheets (excluding sequencelisting |
`;
`in compliance with 37 CFR 1.821(c) or (e) in an electronic medium or computer program listing in an
`; § 8.00
`;
`electronic medium) (37 CFR 1.492@).
`;
`:
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`Fee for each additional 50 sheets of paperorfraction thereof octets G420
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`~ te
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`Number of each additional 50 orfraction
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`Total Sheets|Extra Sheets thereof (round up to a whole numben ; ;
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`furnishing any of the search fee, examination fee, or the oath or declaration after the date of
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`commencement of the national stage G7 CFR 1.492(R) teeter = $460 §
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`Processing fee for furnishing the English translation later than 30 months from the earliest claimed priority date
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`[| Applicant asserts small entity status. See 37 CFR 1.27. Fees above are 1
`Applicant must attach form PTO/SB/45<4or B or equivatent.
`[| Applicant certifies micro entity status. See 37 CFR 1.29. Fees above are
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`TOTAL NATIONAL FEE = | $4,060.06
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`appropriate cover sheet (37 CFR 3.28, 3.39)... occ cee cece ee
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`teers eeeeeeeseee $§8,00 per property
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`TOTAL FEES ENCLOSED =§$4 060.00
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`Approsved for use through[Oi2022. OMiB O85"0021
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`PTO-1390 (10-20)
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`NOTE: Where an appropriate time limunder 37 CFR 1.495 has not been met, a petition to revive (37 CFR 1.437(a} or (b}} must be
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`Statement under 37 CFR 1.55 ar 1.78 for AIA (First Inventor to File} Transition Applications
`rt This application (1) claims prianily to or the benefit of an application filed before March 16, 2073, and (2) also contains, or contained at
`! any time, a claim to a claimed invention that has an effective fling date on or after March 18, 2043.
`NOTE 4: By providing this statement under 37 CFR 1.55 or 1.78, this aplication, with a filling date on or after March 16, 2073, will be
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`NOTE 2: AU.S. national stage application may not claim priority to the infernational application of which if is the national phase. The fiting
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