`
`Coy
`
`
`WAG
`aes
`CScCSS
`SS
`
`
`Espacenet
`
`TwW20 18412634 Liquid processing device and quid processing method
`
`Applicants: TOKYO ELECTRON LTB [UP]
`
`Inventors: IDE HIROYUKI [UPLSHITE HIDEO LIP]YOSHIHARA KOSUKE LP]
`
`Classifications:
`
`IPC
`
`CPC
`
`BOSCiMG; BOSOSGG; NOL244387;
`
`ROUDSS/O2 {KR}; BOSC11/02 (US); BOSC118 (US}; BOSC 11/10 (KR); BOSC 11/1002 (EP.US);
`BOSD1/28 (KR,US}: BOSD3/00 (KR); GOSFT/162 (KR); HO1L21/027 (KR,US}; HOIL21/67017 (EP);
`HOIL21/6715 (EP KR} BOSD1/005 (EP); HOIL21487253 (ER KR).
`
`Priorities: JP20 180566844 2018-03-23
`
`Application: TW1081092084- 2019-03-19
`
`Publication: TW201941263A-2019-10-16
`
`Published as: CN1M1 8888824; JPTIQ7TS62B2; JPWi0201918 203641; KR20200 1342594; TW20 18412634;
`UST 146s 168B2: US20210085S8SA1; WO20191SZ038A7
`
`Liquid processing device and liquid processing method
`
`Abstract
`
`The invention provides a quid processing device that suppresses the inflliraiion of foreign material into a process liquid
`supplied to a substrate. The device of the invention comprises: a nozzle which discharges onte a substrate a process liquid
`supplied from a process liquid supply source for the purpose of processing the substrate, a main flow channel that connects
`the process quid supply source to the nozzle, a Alter provicled in the main flow channel, a branch channel that branches
`from the main flow channel, @ pump provided at the end of the branch channel, and a control section which outputs contro!
`signals so as to repeat a cycle that includes a first step of the pump drawing in the process liquid supplied from the process
`liguid supply source such that the liquid flaws into the branch channel, and a second step of discharging an amount of the
`process liquid smaller than the capacity of the branch channel fram the pump foward the branch channel, thereby
`discharging the process fiquid from the nozzie.
`
`
`
`201941263
`“Te (I)? # RA FAMAA
`A VW
`(12)3834229ASBA (11)HE | TW201941263A
`
`Intellectual
`Property
`Office
`
`(43)288 >: - #BR.B 108 (2019) +10 8 1648
`
`(21) # 2) # HE: 108109208
`
`(22)¥" 248: RB 108 (2019) #03 A 19 a
`
`(51)Int. Cl.
`
`:
`
`HO1L21/027 (2006.01)
`
`BOSCII/10
`
`(2006.0)
`
`B05D3/00~—_(2006.01)
`(30) #2 ¢ 2018/03/23
`BA
`2018-056684
`(IPRA: BBR RMA PAAR APR 2 3] (8BA) TOKYO ELECTRON LIMITED_(JP)
`AA
`(72)480A A: $+ +464 IDE, HIROYUKI (JP)
`
`: & #38 SHITE, HIDEO (JP)
`
`: } R47
`
`YOSHIHARA, KOSUKE(JP)
`(4) ARPA ARS ARS
`PRPS: & PBURAREBAR 13m BAR: 12
`
`#388
`
`(54) 4 4%
`RIZE ET RIRRIBA IK
`
`(57)4% &
`
`AS AZ BOO RRsp h] BIAS EERRRR EB
`REE LIRR BR Lewy + EG + IRB. PIRI. RAI SID > BRIE IER
`RES RRS=Re Big AEB URh BER RIS MERIGRE REG RABEE | VUES
`oi
`SERSETASAPBEERDK BREADRIESSPE ISR AE BE ER
`
`XQ
`HRRA TOSS lA 2 RS BR 1 MAT VAZARMEKBRBREKSR
`RSX GRILRRABGRDIRIE GR LP RRSZRGREYRBATRBEZEEHEZBRE
`dank
`RR aL BAY 5) dRIRE ith HE BAOW BH AL RIB IR
`
`The invention provides a liquid processing device that suppresses the infiltration of forcign material
`into a process liquid supplied to a substrate.
`The device of the invention comprises: a nozzle which discharges onto a substrate a process liquid supplicd
`from a process liquid supply source for the purpose of processing the substrate, a main flow channel that
`connects the process liquid supply source to the nozzle, a filter provided in the main flow channel, a branch
`channelthat branches from the main flow channel, a pump provided at the end of the branch channel, and
`a control section which outputs control signals so as to repeat a cycle that includesa first step of the pump
`drawing in the process liquid supplied from the process liquid supply source suchthat the liquid flowsinto
`the branch channel, and a secondstep of discharging an amountofthe process liquid smaller than the capacity
`ofthe branch channel from the pump toward the branch channel, thereby discharging the process liquid from
`the nozzle.
`
`qa RARE:
`
`
`
`201941263
`
`TW 201941263 A
`
`ee
`#% Se AA
`
`
`
`
`
`23
`
`is] 1
`
`= 1 Hk
`[oe Cre ll) ++ BREESE
`
`ees 14
`+ FeeerR
`4 12+ +
`:
`-
`13 +
`+
`+ HeeHHe
`cavneentneeenneet
`14+ +
`+ de
`21+ +
`+ FURRES
`itt
`22 0
`
`Leo
`
`fate
`
`e
`
`2
`
`+
`
`0
`
`+ Seki iE th R
`
`e +
`%
`it ZAN 1h
`TBR, HR fo ed
`
`-22
`
`=
`
`10+ +
`
`+ 324) 28
`.
`
`6
`
`+ og oe
`
`23+ +
`
`+ REE
`
`24+ +
`
`* Figs
`
`25° +
`
`+ tHe
`
`26° +
`
`+ ibs BS
`
`27+ +
`
`+ $6tote
`
`3l-+ +
`
`+ Be
`
`32+ +
`
`+ Be
`
`41+ +
`
`+ (R5GS az
`
`es
`
`AIA +
`
`+
`
`+ Sake
`
`AIB+ +
`
`+ (REEREIE
`
`FS EE
`
`42+ + +R
`
`43+ +
`
`+ HiRaee
`
`44+ +
`
`+ Hi Bet
`
`46+ +
`
`+ HERE
`
`Sls +
`
`+ HRERRE
`
`S2+ +
`
`+ 1 3BHL
`
`+ 9 2 RRL
`
`a S
`
`3+ +
`
`BB
`
`Ple + +48
`
`Vis +
`
`+ Beeege Hl hl
`
`V2* *
`
`+ BS
`
`V3 eo ie
`
`a
`y
`24
`21
`Vi
`
`
`
`:
`
`10
`
`:
`
`
`
`201941263
`
`TW 201941263 A
`
`V4+-
`
`V5< «¢
`
`V6°«:5
`
`«
`
`-
`
`ih
`
`> A
`
`> Fi
`
`
`
`201941263
`
`( seo aA]
`
`CPSca ont) eMRM
`
`
`
`[ SeHA -4 fh]
`
`~LIQUID PROCESSING DEVICE AND LIQUID PROCESSING
`
`METHOD
`
`Cieplek
`
`[0001 ]
`
`
`ASF 7TaA TGS—FtaBBHGSE TTT EETeBHTT
`
`CocaNiSfg
`
`[0002 ]
`
`
`4|SBR > ETTAN BI" ea ae (DAPaaie DBRS
`
`
`Vr BT<7aaE> EAReeBEBeSeHeEE SE TZakcFH
`
`aE ° ETTCeReRo FRa DS faBE
`
`HLAFRCS |
`
`>
`
`
`ADS SENET © FSBSRASCAsJEGAaBe”—Pl]
`
`[0003 ]
`
`
`FHS SR dey SETTeaFRZR | RIE TTaBees SRS |aeePETTA
`
`
`KZA> BCACELLAR RLF ey BeekA SEaBRHo ICE AIS
`
`RA ARBOA ECR REZK © FAT > BECKDSRNAAPeea
`
`Uf BPSSES i A)featPasER
`
`[SoATSCA
`
`[SEASCRA]
`
`
`
`
`
`
`
`
`
`
`BE 1A > 319 A SeAABR AAS)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`[0004]
`
`
`[SEASCRAL] A ASEFIZ Ge] ZS48201 4-140001 $5
`
`
`
`CHAN S]
`
`
`[SER AAAZ ae]
`
`
`[0005]
`
`ASFe7s(Pe LEMEatMPF > FE BYHESeH riAiceAREak
`
`FE RAYTZAIT °
`
`[RA Tay el7PS]
`
`[0006 ]
`
`Atta TRaFEESBeAnes > SEU ~ WEDas > OPISTE » FeRPE Hil
`
`
`vy
`BaD>SORTERDPSTF(xPonBEPCERSUEesfeeFESFeBES:SK ETE
`
`Pe HEPea aBERRRa+ a WEscSe EES + RITIBTEEE
`
`+ ae PEBND regTEEslfs SocHt pk
`TIES7D WSCaT SS + BK RTI7DBEMita
`S
`
`HETTER LEGER2bBin > BR LERHETTiFITSEeaEAEE
`
`ika
`ATTSAATERAA SE TERE > KGLPEHEFRegYK FTERE
`FJ
`>
`
`\
`
`SEA Be 7ak PenPR: aK TTBCETEM feSIaAR °
`
`[Se ER]
`
`
`[0007]
`
`
`PRASF> AYU Hil FRPELAEIFea
`
`C lel SUREH ]
`
`
`
`
`qc
`
`
`
`
`
`
`5B 2 FL
`>
`tk
`19 (SeaA SS
`
`—
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`[0008 ]
`
`lel | RAFag2—BaRRiESSell
`
`lel(tPALEEHeBeRea ll
`
`
`lit]3 (RATSITERHieS. ITY BAASRRAt
`
`
`LlRATSITLLCaHAE.R BH BATARSBeit tA
`
`
`lS (RRNEADLEieZ AB Be BARRReeae WA
`
`
`
`
`[lO(ARATLLREHieZAY BBARSSi tA
`
`
`
`i
`
`Ee]
`
`Ee
`
`a
`
`°
`
`lel7 (a)~(d)(AREA DURESSPLBRAREZaitel
`
`
`
`
`
`
`
`fie] 8 (a) ~(d)(ATEASTRETABZit le]
`
`
`lelRTATUREHSBRIARZa A lal
`
`
`
`10(a)~(dABALEiSERAREZait AA
`
`
`il
`
`fed 11 (ARAN PUREHiBEZoaSasDat lil
`
`
`la 2(ABURPEiEZSoeneaeal
`
`
`°
`
`
`
`(Sie
`
`[AIDAEeieH 2FR
`
`
`[0009 ]
`
`LTa,EEee7EHRRi > —Tiel > Ta
`
`
`
`PUB28iS ALA eeEEBRZR? BSAesO11 + Pek
`
`HRSSE © TETHERB 11STeBS LD» ene+ RePAE © Tretiuke
`
`a 12(afm EW2E> ef EB]WZ BePRRRA © Treeetpetre 13
`
`
`
`FE FARE12(55 a IE]Wee © PRE 14GLI CRFeR 12 aH IBIW > MBGLE
`
`
`
`
`
`
`
`
`
`
`3 SE
`19 Aaa)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`Wet(iS (ELTAiE a IWR ©
`
`[0010]
`
`RES > WHERRASete2(Fat ° TieseeAeShc S
`
`
`
`21 > HERRRADBRRSSBc2PA22 > oyANREPLBRReeBc
`
`21.2EMAARGS 23 ° VE22HaheS _Eaia EWZU° WHA 23
`
`faiPADS ° HESS TEN > (ERSRHA23 A OBR EHRAS23 AN 2Pleat
`
`1S SPURLASBC21RERUEARSS °
`
`[0011]
`
`
`BSRRASC’ 2 124 firPRSVL ittt24» FERA25 »
`
`
`
`HE kc26 > FA)V2 > SS TH 27 ° B25MEDAN BN itet24RATEEDLBESS
`
`
`
`BIC21 RA iBTQ4 ABLHZY SiBSaasEeNEG Hl
`
`HD LO ° FSFHERNE2SKeHe ise526 EEAac A) V3 ~ V44EHPBe31 + 328—
`
`
`ihm ° ACE LZ5iniAc EB32.2 PER V4SeSoihll > BC32.2hi
`
`
`PETSLKZEEEERAS) ° HEMOSTASIS25 KeHeia26THER
`
`RADE ° SeeN27 (ARRZeRS23— |) ERKLEZ
`
`GESaIi °
`
`[0012]
`
`FEETURPRCe 21> 4A 2Bt eseHS25Pit 247 PAi
`
`SZ © WEEP4 12riaD SEEPSBSA DASETSNRRARR
`
`MRE 1 o SO BC EAS HZBM eyEBC4 SSIS > BC43 7hiHed VS HE
`
`
`
`BS SV2218 (E27 ZA(Eo BCEARERRSBic2 Lit
`
`
`
`BAUS > ZiaAaeBL© AU4S RHI DLAeeeA
`
`
`
`
`
`
`
`
`
`SB 4 FL
`>
`te
`19 FSA)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`Al 2FenRUR IEAe27 ZAC> 2tearlelAce43 °
`
`[0013]
`
`SO Fait > FAEEREASHC > CDRAS21hoy +RFA
`
`BC41 2 Bboy » (EDA E437RTBZeRES |e Fe > PeleeSfic
`
`212PATREERESTES 1B LLoDBT RETABK 22.2BEEES
`
`
`52° Mo PraiaBC21FTPREELERPES 1PR7 IA)
`
`BER LinBR Te] Zo2AIiEES23 ZR TEPERS3 ° DARK PEERS
`
`FES 1 > OBL ERETUERS2KeS32HERETR 3 PBBBREE oo MH) A Bc
`
`P41 2 SERAQAI ED ALETBRR 2Hee 7 (el aEaERRES 1B fi
`
`BfA SI AY583 (ieaBZTIE > ZeTTeR > SRR EBL IRS
`
`
`ALA > ELA BBE AteEisIZoTBE ° Fe > FRFSC41
`
`PERCTeEREAES |ZABAL AeBRSIBS LB
`
`[0014]
`
`FEEMISBEES AZ Pe oS LiHI Bits44> AFTIEERK
`
`BCSABSit BT442 A ILAiYPeESBf CHE Hil
`
`BLO ° Doiiteat44aay J FUEEERADIL 2PARS i ise >2RPT
`
`fate > FERSfae4QUESP)Ca4PBeeERSZ4 IB >
`
`RAP44MO EAS TUAA oc LASTet > Tita4SR427 OeHM
`
`
`DAYAR° O ZA ats OPS > AIM > aS PeRec 43 fie SER 42
`
`CLE °
`
`[0015]
`
`
`o> TREADASAETE R422REPRO > aKRO ReAe
`
`
`
`
`
`
`
`
`
`SBS > te
`19 (Sear)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`DNBU EAS46-2—hin ° E462SoiBRSLZEV SRE 46
`
`PRSATRIVO ° 3642STFPOAErBlRT: 1 > BESO(IA
`
`
`JNBN > BURLER~FasBREERePA4 + BEE462eI
`
`[0016]
`
`RecsHctPEESBE > RELA42BeEE
`
`FAC4a427 Fee> ETTELARPR GBC2 I SeeeBi42
`
`
`BHA S LADAT S LAZR TBR ARPE2 SE22BAIS ALIS
`
`FER42 > JK? > — TePAA ° ICR42RARFR > DNAYeyER
`
`
`
`
`(tubephragm pump)==50ftHEAFR ° FETBI2F > RANFR42-7AS > P33RHA >
`
`
`lial P34{7Ae FA33-2BT (LAFeeo FP V7 + VStaralliPM R42
`
`ORE > RO ZR ° NBN > ZEEEBI > aitBe) PSC4+ RS
`
`
`
`
`4677lS FA] V7 + V8 REPSAR BE34 © (CHENCTEHAD 102Perit PEAT V7
`
`
`
` 0
`
`V8.2 BHARAR 33.2Bley > ET(ew R422SRIIE ©
`
`
`[0017]
`
`FERREEL A AaI]WE > FR42 HETCREEERReaEZISE ° Alii >
`
`EE RaeELE BU ae EB]WES > SzPETAEBCR ARESTBFSZL
`
`Fy > ECR427ETBFeS4 TB)FE467BRE
`
`
`FAME PE ° SC > SAPIECC42feSS4dheEg22ft
`
`ri <<DeeBE PEST: 8)ELD Sie43BLSe272 [A
`
`METSE © BEEPTEVAAS EeBy(Ed | xA(EZBE fet ©
`
`[0018]
`
`SHE LARITE > FRA2ETEA4 WRPeStAI mL »
`
`
`
`
`
`
`
`
`
`5B 6 FL
`>
`tk
`19 FSA)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`FR > <> TE faowFE) (Ft FR AS, ee)C4BR
`
`A2mL > 2 (EHFTXAGEBTE freFR420: 8Ee462 PBAY A3mL > >
`
`AT: (EY 3K A OER THe 8) (/F Gr SR 42 SB4RY By ALF?EK
`
`AlmL=A2mL+A3mL+A4mL¢ fiQA2>A4>A3 > EBSBy PIQUA 1=1.55 ¥ A2=1.2 »
`
`
`A3=0.05 > A4=0.3 «
`
`[0019]
`
`MO FE CAAIGT Ara> PARSEEDN BU Se 42EAEET > OA BR
`
`
`
`FR427fiehiiweABAPANEME ° ik > CELDTBIRRiS | PeCR
`
`ADU | Ve fiA FeBRBK FR 42S8 le) FCLR AR BH op BR
`
`ALA > FitASeEERPASZCS4 1B Re (ee 43° SREeSAae4 ee |
`
`RAC 43 AILSAAPLAR > AA42PBBRSBh EILILS | SEP
`
`BeESABC2 |Zek 9 SPU FatficePl > Py BERETA 432CH SER42
`
`CALE ° > RREETSR42(TeaSTSFR427 FLEAESZED ©
`
`[0020]
`
`Alii > AGSDASTIE4AEBRRTES) >» OtEwe | 8Ee
`
`
`FR42 2Bleyal PE Be SEDBRASAc eS 21 2BAV7 2A BIAS > AS
`
`
`Bl mL>)gFH FAMEB/E7hA2m+[2PSEsAL > $8ES
`
`
`sate WRRASARIAL FREMERISLRASeBRRA?ae4 1B Re [ec
`
`243 > FAAULIRPo ABIAeLaiePl Sep422See iL SP IA
`
`Hob 2meshAse ° AM > haseEMIV7> AyeILEP | SBBAD AK BNA A 33
`
`
`TERIA ©
`
`[0021]
`
`
`
`
`
`
`
`
`
`
`BE 7 A> SE
`19 SSAA BR AAS)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`> SB1-(A2+A4)=omLiF > Pho BeA + HY SETAESgak A RR 42
`
`BRBA SB BER I?ae4 1B [et 43° HELLS > PilelomL As
`
`
`1OmLEAF ° Fg > MEd > AefEBImL>A2mL+A4mL » IRE41A2RELI
`
`Aieey > Bila imLL_F ° WES > tehel2-F > eS) FIC4 I PaehyeRAE2|
`
`
`<RELEAAT PaP2 ©
`
`[0022]
`
`Sled PAS > SUR ARE i EE LaSSBFEaL 10 ° SPErab LOZ Ae
`
`faa EWSBAO CieR > HR + MOGRIGER) > aul» DVDSeacereheZPETK ° ATE
`
`Be ABIUSEA ST aS (Ba) > TT ADEE ll (ST SS esETTEBLS
`
`Bb > feECRITE > HEAT(eeeHE ° ELAS IT ee > TeeHetESE 13 PT{TZ An FE]WA
`
`
`SSF + AC 2SV I~VORYBARABITE > RAR42 2SBABELMEER ° SC >
`
`
`
`
`
`far iill Gb LOSAAy A atilesSiae coZeES > TMTSREt Bi24
`
`
`
`
`44H 2peaie > Mfaee °Fee AyBPESeNES ©
`
`[0023]
`
`
`RS WRi ae)WAee> SAfe] 3 ~ le OARRAK © FE lel3~
`
`
`
`felOCP > REDVRORES HEBCSSeEBATLZTBA > INBARE
`
`
`AEBRAE7 esBUREN ° FERS > BCRP,FR Te] tele > Chel te
`
`(decal «
`
`[0024]
`
`
`EG > rie ray DER]WakFSeBBR 2° PEE > PEI V1~Vorel rl iA REGAL
`
`
`
`
`
`Fa]VIE > (ERATTR42ZIT > SRRFitHE27OEA Bc
`
`
`AIZES42(fE]3 -HES) © LEYS > RAPARE V2 > IRS >IE42UREE © RE
`
`
`
`
`
`
`
`
`
`
`
`
`8A:
`FE
`19 AeAHAS)
`
`
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
` &? FRBVI > TeR42BB esPe4° DNB > ECT_Fwt 42
`
`
`FeoEEEF el4 + 27S2) ° FRIAR 7PB REETBRASH eS 21
`
`HALES Ee eeeReAa4 2fiPAiZT2H
`
`Fee > EMER22 AF ae BA IL ERS HSTe AR I 2TeZeEW
`
`Bb > HECTIEREEih > MSA EIWHBLA
`
`[0025]
`
`EAEBaS22PUBARER4228Re) FAC4 LE es > ARRIE
`
`B24 » 4426057fa it > PEGS Ope Aoo all tee alseBT24 + 447 BALTIC
`
`QATARZi° RES > HRS ieRee FE eTEe
`
`
`
`GOS AataiBly ° Aig > BW AaTRUS > FTEyerePMeg220
`
`
`LIBREARAISE > RFR ° ALPIIIARG > AU FIEyRS
`
`<> ARETZH
`
`[0026]
`
`
`
`RAPAVI > [SRR > BAERS VO > ese42FeRAELPRAYHEee)
`Ache
`
`
`
`
`
`
`
`
`Et >
`
`FAB4 1 PARE 46 > TT RRR EAN4OBE° JNBU > HETTFaIGR ARASS
`
`
`
`Sy VE(EIS + 2>BES3) ° 27(& > RAPAREVO > [SJE > GARLRE VS >R427Pee
`
`
`
`
`
`
`
`
`
`He RA FASBeAACS4 > TIRE TT7° PNB > METEFatlel ax
`
`FUMEBE (lil > 27BES4) ° 2 fe > DAP ARTS 2SRS > RORee7 AW
`
`AYREBA i ER]WTishBSeR 2 ° PE > EPH MES 1~S428pk
`
`
`WEA > SEYIEE aEWHCR © RNESTTY LEWSpe2.
`
`HSE > (EEStteaiteT HETPE
`
`[0027]
`
`
`
`
`
`qc
`
`
`
`
`
`
`5B 9 FL
`>
`te
`19 FSAA SS
`
`—
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`FaSh > AREAICDBS4 > BEATER [El =eISa26-2EAA(RAD
`
`(ETN 27 ° FEOLERIG] > FR427 ORREAeeA LaHEBK >
`
`Eds262FRAeK ° FEL > CPAPAeReDePEeS 201K >
`
`eta A28262ROA Be LER ° BL > BIPGIEDTae 2Ee
`
`
`
`SQ > FASEEL 5reeT SH i26-2SR) > UEE22YZ
`
`7a ee26 > MCA feeaXeae 26.PLaSe)HRA ©
`
`[0028 ]
`
`
`SC > fal37EeBAS 12FRAAURBITE BIHLERZAARE ° FR > FEI
`
`fal34P > AARRR42REM > ficReleEe)A fic
`
`
`41 ZhePayFeZeRIOA > AceCa4 ozey
`
`DUSTER ° ZEEETRE> Od > RRA22E> PERTH
`
`Ce) FBC4 Lzop4 LAP42eB > EER TIAAReRAD > AGT]
`
`
`
`PURRe leg fedRae > BLZS(HET > MA? ElWEeB
`
`
`
`Eo FWPERS3ZERITElam SGLEEHB I ETT
`
`[0029]
`
`WULAGRAM > PAWS es AB4 2AA A BUERAQ0Z
`
`FUERiitPeeEZ4 LB > CANIS ATS > REIREITE > HEELRAS
`
`BC’212 fiBP2kASEA41eR BE 3 F442 © PAI > RHETT
`
`EAEOBESE > 71 EE P422SA) Pic4LeAK
`
`559) FS Ac47° TAI > BE feeS ieet> (EtatA
`
`
`22 AB) FSC4WAR2eSes> (ES SER422HLM
`
`
`ABBR? ° (Ait > APGLEEat7pBS ARADEZY ©
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`10 > FE 19 ESebA aA SS)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`[0030]
`
`DAR > eeSttl sthieshe OE Bz Pe te 7Eid7SCZY © [el 7(a)
`
`
`
`BETEE a0> SBNCL ° NEO 2RES LARTEa
`
`SUBTYPEARS > SEA BR422PB> PRBALISA RE
`
`462PLPOASes lialeeARI o SC > STERSABc2 1 ficP2
`
`
`BY ERR2PRBREENASR2 ° SC > SPUBRRRI > RADAYb 2ee
`
`
`BC41 Xe lalate 43 2PeRENAR > 2feePLERRR» R3
`
`EI] © TEYb > FEMSHAATTee P > LBIARR2 » RAP YA BIR42
`
`aeETBX
`
`RI °
`
`[0031]
`
`(ELI7 (a)PATS ZARHETPES22eeBSE PUT 1ER)
`
`FAC41° Maal > ETERS [ELA43SP ME BLE
`
`ISVS 1A ° Pee > FETCUBRAR I
`
`> RFS FBC4ZRARSE Say
`
`CRSGBU 21 ZzfireP2BY PiieAE7(b)) ° AR > BEITS353 Ba)ZR
`
`IE BTE > PEFRAQEE PLEARR I (ll7(c)) ° Zt > HETTEES4(28427Bi) Z [aAS
`
`GBIF > RALRRR 1 EEee4 > feeCEleFB4 od
`
`4 LAHALRR3 HER eltlic’ 43 ° AOA alt > BU EHETIAPBaS4 > PLBWRI (5
`
`
`AN EGE NLEBP 1 > AERAET4 1 Ail 7(d)) °
`
`[0032]
`
`
`PEE WUTSEN+ 1S° DNB > HECTARES | ORRBITE > FRAQURA
`
`FARCE4 1 ZPTBRRRI + R3 >LERBRASBC21R25 | A2Re FB
`
`24 1 (lEI8(a)) © Pee > HEFTS2 2 eeELFo PLR RRIR SOIR
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`3811 A> FE 19 eee SS)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`
`ALA > FSI> RES LA SeBeABC4 2 BR2AECBRaBc
`
`2 212A PQAPeel) ° Ate > RIALPPMYRR3 fg 22
`
`FEE HH (]8(b)) ° FASIELAFBRS 2 2SR42 AUEIEL BBLABRS 1 RAQAeS > CIEE
`
`ME SGA > FCACERitAAeSFBC4|RR
`
`[0033]
`
`IL(& > ETABES3BER ELBE» PEFRAQPEL LBA 1 (I8(c)) ° 248 °
`
`HETABES47 [el aPTF > FERALTR 1ERAIC4 > FER
`
`R3 AESC43 ° BAS HZ PARASBS4a Beh > CECH7PRS > Pet
`
`WER AAREEficBP | (le]8(d)) ©
`
`[0034]
`
`RES > RATSRN+227HA ° INE > HETADES | ZURRTE > FRAQUARG)
`
`FAAS4 1 ZLBRRI~R3 > pTSSAc2 1 ZLBR25 Aeh Fic
`
`24 1(1I9) ° 2RES 1 BAYAHEASeFC4ZR eKHe
`
`
`41428) 2 SRR2Ee ©
`
`[0035 ]
`
`FHSESOC7SS > PLBRTRR2Ee)FSC4eS42i
`
`BMABak42 > BCG) AB4 LAN2IER3 FARKR2 © REZ >
`
`PSOERTATAR2ACRRARSEeRA4 AN > peAc4
`
`
`2 BLA43.2 PERIMARKR2 © Tel 10a)RAMELRe FAa4 Re [ee
`
`432DUBRAPR2AUARSBo > HE(TSEN+MHa2ES LAIAARE ° Lah > M
`
`{AIRF°
`
`[0036]
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`B12 > Ft 19 SARA)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`
`Fees > HEFTBe S2.2eaAB/E > RACER 1Sele8)A4 (Ee
`
`10(b)) ° At > HETAPEES3 2HERFSBF (le O(c) > FETRS4[A
`
`METHBF (el 10(d)) ° ACIELAPBa S4enERE > BEEayBe S4 [eALEERR |
`
`(ERATESTISIA © 2feSee ETT> CER> LR» R272be Ala
`
`10(a)~[i] LOC) PAISARE °
`
`[ 0037]
`
`PULDURR REftBe > TSrEEN22BAA23 2eI
`
`
`FEPATES |pZZ TBCLAT AFRA2 © Fa > FERAQI4AZeBR
`
`
`LAB) > SERBARESES1BRSic Ee 2ABAS) EeE22 3
`
`
`{THEI ZR >
`
`(REFRA2SpIBA AZI: BA2<DSTI4 ABZERAB
`
`Bl ° FeJCHESSHS > (EMEA 23 CESS1 2eses26.ZEAAABROS
`
`MESDyag22 © FAVA > PYrepSeeBZPeeHaePT(reI2ILSLFeAYTl)
`
`vy
`Fae|\ © SO>BRETas 2617 > RE VIALSZeb ° AlN > FT
`
`
`
`Fl llSRA DURZhA © SAS > AY HN il](re ch LEB] WSe ee “FAAXo
`
`PREY BEAES. «
`
`[ 0038 ]
`
`FS > PRR PLBne > FERABWBRTaAR
`
`FRA2 > TEELBRReeeCeRE> BS
`
`Day ecZeKR ° SER > BRC IEEeC Pd 2Pk
`
`{EK
`
`[0039]
`
`Fadh > ARG ITABERL > ATERT24 + 44 > ETTBOZHI >
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`B13 > tt 19 Sea)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`JNU]emit Bet24 > 444—(BSRETTBe as ZRH ° NB > INURE aT24Bt
`
`
`ment44eM 2iSAT> LNSZES? ZEIEL > 40
`
`1faFSEP > CESAONE2REC4
`
`
`4 1A ° TA> Yiteeat24 » 44 Pier yteat44iy > AA BIEN ieIitt 44
`
`
`
`EAPER > DNATARAE =e a IE)WZf°
`
`[0040]
`
`[altBES 2BEARFS SILB/E DAE(TPeFE > DDRHETT ¢ REPTERRE
`
`OES THByEAS > SBS |ZRA 1 =FBES22R42AY: BA24BES47FR42S
`
`HBA4 © HEFTHERFASTBERR > Oba > ROeSASHA2401AB +
`
`TEetA4 > AOReA Lng SA2+BSA4 > TRA LAEPB:AQ
`
`A4_YSARS DA EANset ° FS > LAPSES3 2HEREBEERET AK >
`
`DN AYEPSsHIET IK
`
`[0041]
`
`SM MONE LL PAAR > DNGYeRea8HSBSASLE it43A ET
`
`ltBS4[eyFSTHEfF ° EGER > JR SBERyA4 ZS FEI HE
`
`43_fialtmeaeFEFSS:EE > HEROU: 7LRABBRSAC S21
`
`BY o NBN > Hepaee HRBieae)FS4esCBSSeeB)FC4 ER42fiePS
`
`BS fel2WYASse 29B2H > 27RS27FRAQABA2477BES3 7 FRAQABAB <AE
`
`SB2 ° FR > WLR ETTBES4A > RTEPMBES 1 2RQA=
`
`BE S2<7FEAD AUSA2437BES3 27FE420HAB ©
`
`[0042]
`
`eS] Fe43 1 HETABe S4= [eal obAEST:FRG > PSSAPTetA LST:
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`B14 > St 19 SARA)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`SeAQ+TBTH: eeA3+t eeA4 > EAReA 1 STI:BeA2+A © TAIT > UR
`
`ALTERIIA2 > AB SERIBLA FAVS o EEYh > PLAERS47BIREL
`
`HE(TISK > INA)ALPCHETT 12K ©
`
`[0043]
`
`SQ > MOIL2 PAS > DN AY-+R EIEIRBC43 HEC4 | oo> EREll
`
`ISEB4 1 ft2FRAZERTT ° DISBI >ARBRETES LP DAEwes Mir
`
`BER2firsl)7BOAeS yasEEieeis20 R42 © EAR > MACS LE AN
`
`ZS > FEFAQUATSHAas208—BIZ> IEEE TNZe
`
`TT BZA> eRe FABUSCe41 eit4RET ° HRS
`
`HE(TFateeBaS4zRFR > GASR422Pee> HEBbaitBG
`
`HEIL:PFE a) 2 ACeecre °
`
`
`IINBW > DEGRASSIRY
`
`oe Me FLA)fa ESR422PSesBs ce eS ° FEEee
`
`BA fed Se 7reHed 2 7aeaE > ON a)PReR4A ENBBsBE
`
`PUBLREAABE °
`
`[0044]
`
`>(Rens 26.2WOEeieZACACl > SheEMie
`
`
`SETIR422GoDBeSebBTic2 1a) V7Ae > IS
`
`
`
`Al 7A C2 ° X > [al Pett > SEA 43 2A C3 > Shebat2SeSe
`
`ens26.2% LOVEE 2A C4 © Teh > Ful 2526.2ADO eyes
`
`ct 20PECeZ ERE FAL ©
`
`[0045 ]
`
`(ERA820-2 HO 258 itAL BARKCI<AL ° Ey > SLBADAE
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`51S A> $e 19 SRB
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
` FBSATE 9 REG > ASHEie1 ARRAILA EES LIL
`
`a(ER42 2 BCS > CaeeABEec 2EReK A
`
`SAME22(fl °
`
`[0046]
`
`
`SQ? BClaxRA2<C2<F42 0]HI2Ae (ZeCp) ° LEICACplats
`
`HY DAF422RITES LAZEN BD TTZA ° AA2<C2 > CPR IIPSpila
`
`tetit, > FARABRANT 2 bes > FERATESRAQA 2PBR LABPRasBic
`
`
`
`f2 21> BURGLEEAeeEEL ° FIC2<Cp > RRBR42ZRRE
`
`Fy PAErtBe ic 21 ER42ot4 LINBR > BS ERAQWL >
`
`
`
`ZSHFPSC4 1A 2 a5 [REE2AELZJBM ° SC > EEC3<Cphy > (WSPaz
`
`[ea 5FESTHstEeHC43 ABT2EIS Bese > > GHC2+A2<Cp
`
`F2C3+A2<Cplkf > FARSHETTanBLSfe >Ca4 [ei 43 NZ
`
`BHR > BCE o
`
`[0047]
`
`(6EMIS2{1Ee=eHc26-2A CBBaBiC4<A4 ° FAURE > [eyoANE
`
`
`Pas > FASSth(EraHS ie26TESSANL
`
`[0048 ]
`
`40 Fal > CEI 2ANZ BP > SABESCHPS 2 Bi > [ee PABF
`
`
`PLRieZBUESFI] > eeRE SEeBFUTET
`
`[0049]
`
`TESA > HEes 26NE-#K RassAMe> DNERSPSOE tc 43 ° DNB >
`
`DNA)EDA TL E43 eZPEERES MEPAREER > ETTLatBS 1~S4.2
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`3316 A> FE 19 (ea SS)
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`WA> (EDat =e
`
`
`pallW ° SC > IPA PRAEGERESTESLise Hana26 > 7
`
`ay SEB
`
`LEPPGS2B
`BPEERSSA
`
`[0050]
`
`reaRE-B PRLITR >
`
`INSBY y DAR ASeEe
`TB PUBLLY
`
`PreBELOYFP SZLEIZQF> SERAZakc FS BA
`
`
`
`~ FeRe RESFi
`
`FEALZEAoP) o ECfaHR]SRSBTE
`
`em Le)Wt fe ea TEL
`
`CRTd AMERSeeB] Lb > uaeEEASB)
`
`iFSsAS
`
`
`Cyaitat AA
`
`
`[0051]
`
`1
`
`2
`
`10
`
`11
`
`PUREfitet
`
`PLBEAStS
`
`farsi
`
`piaEla
`
`12 FeO
`
`13 EPS
`
`14
`
`21
`
`22
`
`23
`
`24
`
`fhe
`
`SuaHeabce
`
`NEOs
`
`HAAS
`
`Uinta
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`5 17>FR 19 (SRA)
`
`25
`
`Taos
`
`108109208
`
`AHSte AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`26
`
`27
`
`31
`
`32
`
`33
`
`34
`
`Al
`
`Se(HN
`
`Ave
`
`Ave
`
`HA
`
`TR
`
`VRE FCS
`
`ALA
`
`TTAS
`
`41B
`
`TEERESEHIS
`
`42
`
`43
`
`44
`
`46
`
`51
`
`52
`
`53
`
`Al
`
`A2
`
`A3
`
`A4
`
`Bl
`
`FerreTE
`
`OF LERCES
`
`BERETS
`
`PUBSe (RS)
`
`SUBS7 eeOI)
`
`PUB2ee ORI:SS)
`
`PUSHY2se ORTH)
`
`B=
`
`asa
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`S18 A> dt 19 (SHAH)
`
`108109208
`
`XeTR AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`Ll
`
`Pl
`
`P2
`
`RI
`
`R2
`
`R3
`
`Vi
`
`V2
`
`V3
`
`V4
`
`V5
`
`V6
`
`V7
`
`V8
`
`
`
`Pua
`
`Pua
`
`PUR
`
`CRSaitil id
`
`
`
`tI pu
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`B19 > Fk 19 SRA SAAS)
`
`108109208
`
`SERA AO2Z02
`
`1083198545-0
`
`
`
`20194
`
`#8: 108109208WL
`201941263
`
`( 80955E]
`
`CP SCaeHAA) iiStceBK
`
`
`
`[ SeHA -4 fh]
`
`~LIQUID PROCESSING DEVICE AND LIQUID PROCESSING
`
`METHOD
`
`Cesc]
`
`
`
`ASSAA Z Be (ateEHil]YeABEIaERY 7akEo
`
`
`HR ASREAA ZeeBA> LS» SEQhUES > WERaS > OTIS » RPDS >
`
`
`wae SRHSftenHLRSSPRetHEA PeFR: SEK| TUR
`
`.
`Flea PeeEHRinaey} RHEasc aK EER + BR oTBRTEeeEs
`
`TTBS + RFRATTERa ae PET) AS PZal)(SSBag CHHETLS
`
`BLEERE75BaLE) > BRR LETR FRTT NEfrPeHRRS
`
`SieaBASEK FTEE > PRR 22DBPEER RIGTTBBEZ
`
`SYeePh PaBEPRI SBBPCEKITTreIBeEL
`
`C2250]
`
`The invention provides a liquid processing device that suppressesthe infiltration of
`
`foreign material into a process liquid supplied to a substrate.
`
`The device of the invention comprises: a nozzle which discharges onto a substrate a
`
`process liquid supplied from a process liquid supply source for the purpose of
`
`processing the substrate, a main flow channel that connects the processliquid supply
`
`source to the nozzle, a filter provided in the main flow channel, a branch channel that
`
`
`ake
`
`
`
`w 4 (SHH fee)
`
`
`NHL
`AA
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`branches from the main flow channel, a pump provided at the end of the branch
`
`channel, and a control section which outputs control signals so as to repeat a cycle that
`
`includes a first step of the pump drawing in the process liquid supplied from the
`
`process liquid supply source suchthat the liquid flows into the branch channel, and a
`
`second step of discharging an amountofthe process liquid smaller than the capacity of
`
`the branch channel from the pump toward the branch channel, thereby discharging the
`
`process liquid from the nozzle.
`
`(faerie
`
`fe] 1
`
`CATEihaA
`
`
`PBR 28(ihee
`
`TUBERRARTRS
`
`Feria
`
`nr ElaEa
`
`JeBK
`
`Trent
`
`AS
`
`PeleesBc eS
`
`10
`
`11
`
`12
`
`14
`
`21
`
`22
`
`23
`
`24
`
`25
`
`26
`
`
`
`
`
`
`
`
`
`2 > k3 A CSPRA TE)
`
`108109208
`
`SERA AO2Z02
`
`1083198545-0
`
`
`
`201941263
`
`27
`
`31
`
`32
`
`41
`
`oe fe
`
`Bice
`
`BCE
`
`PeBee)FS
`
`41A
`
`ay RS
`
`41B
`
`fBERER(EAZRAS
`
`42
`
`43
`
`44
`
`46
`
`S51
`
`ae
`
`el ein eS
`
`onsat
`
`DEES
`
`feERPAE
`
`52 5 ROT
`
`FBERE
`
`fires
`
`
`CESSP25 will]
`
`
`
`53
`
`Pl
`
`vi
`
`v2
`
`V3
`
`v4
`
`V5
`
`v6
`
`
`
`
`
`Fe)
`
`Fe]
`
`és]
`
`a
`
`i]
`
`Crebeert ]
`
`
`
`
`
`
`
`
`3A 3 AA)
`
`108109208
`
`FHS A202
`
`1083198545-0
`
`
`
`201941263
`
`(SUA)
`
`— FEaBBSES
`
`( 355 FA ge SeFl]ec eel
`
`EROS > HE(iEbeatPRSESbkEPFDEUS:8 BKOH
`
`
`FEHR > REE BecUYFRSAa
`
`Haas > asclySa Ees |
`
`Ty BATE > HEX FERRERTR 5
`
`FR BEATREEme +
`
`Fae tel> BETH PErll(eSte LA ETTSB LAERELSS O27BR > TAK SS LSRETARRN
`
`
`TFTd AEEGeesaK DaEEEEEATN GRASa oeBEA SB OFRK»SBOE > BES
`
`HEABK SFEEE AeR,BhRE
`
`TES IH2% faER ©
`
`[8215]
`
`3c) FA es FeoHe] SS VReS> SH >
`
`PX ETERSALS * TEPERTE > SR RES > (ERA TEERESEB MicitRE
`
`
`
`ABS > ROB 2EERETLUIER > TETERA TEEREAE PFeeEIKB
`
`ARE]2S TS > ifRETaTA
`
`PC HEDISCUTSMEERTS
`
`PTTEREAELEa TEP(EP Ee 7 [elSB 1eKBHF 2S
`
`3BATI °
`
`(26318)
`
`3c EA as Seat [Bl OB LTaeee p>
`
`
`
`
`
`
`
`
`
`
`
`SE $4 AGS rp ae PA)
`
`
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`aX EaLS * FSEREATE > SRP> TREK TSERERTESB ILS 7 SM PE
`
`
`mies > RB IEPATES > PETERA TEERES SE A eePT ISa SB AS
`
`7B fa] 20SB 2417SSIBS > EEREeeFTRS
`
`A WE NeasKPA oDmSEee TEEREAE FDASS | iSB2llZe
`
`Jak °
`
`[6450]
`
`
`30 FH Bs Stts | 8QTBSSSTA7eeHe>
`
`AGARPeOYBK TySeEE ES:BaeREA>
`
`BFEal) PETS Ha A FEhallfsih A ETEeABeSE RSI: PB EEREZSBR >
`
`BAB LAERZRBO OTERASSZENS
`
`aaAse LA FAY ©
`
`[6538]
`
`
`300 FA Bs Stot A] 52BSSSA 7eeSe>
`
`ee FEal) Pals ey HFrl (iSDA ETTSB420BR > BK SB4bEE(Aen Seee
`
`
`BA WERETAB eeEhRARA]
`
`
`BA ITERCRRA POVRRABATZitSZ
`
`
`aaAse LAA ©
`
`[ Born]
`
`300 FA Bs SSFilla | S83STeeSS> SE >
`
`Be Faeal) PaHg FeallfsSe CA HETBK SB3 EREK SBARp >
`
`BASS LAER ZARAa ~~IPPZR BS Aen SS
`
`HE Te]
`
`»
`
`
`
`
`
`
`
`
`
`
`
`
`5B 20> Sh 4 CAAA oe Sy Pllc)
`
`
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`C6758]
`
`30 A aesSeb Ee] SBT SeS830 7ee> Ep
`
`
`BSB oTISEAAARAKTE PeeRiBL
`WitSeheSAG ,
`
`ek El SSRDASE itateape2ite > FTEASR T°
`
`(58/5)
`
`30 Aas S84ee Ee] SS75eH> SE
`
`BkLit Be feHascaK 7 BBE PZ ETaEESEZAE SETFR
`
`BYLES °
`
`[95H]
`
`301 A aes SSFebEe) SB7See> EC
`
`
`Wow EUSAFS aealeET BY FaeRRiaeRD
`
`ek Perla (He ot A DAE oR Lite eeRkBeae 2ite > FFE
`
`VANES
`ARIAT°
`
`(231055 ]
`
`3c EA cs Seta [al OBIaeaee > p>
`
`REWA Was EK OB | fi PT se BCa RAR ETBLRAR
`
`i=
`
`g [
`
`1108]
`
`S01 FA es SSFl SSSIeeSS > Trp
`
`CAA UERSBRZRHASARERRIARZAS °
`
`(51258)
`
`3c EA as Seit[el OBST7ea> Ep >
`
`
`
`
`
`
`
`
`
`
`
`M3 Hh 4 GSP ae PA)
`
`
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`
`cae 7ral) FATS iy Ferl esait EA ET4 Ek BR RAD Ba(re FR IL:faaER DAS
`
`Eee (SRGfanBECE Seai<2RA
`
`(REBKB 2(LESSEee FEas PTZBYAREKEEaRA
`
`Et
`Bg.
`
`(251358)
`
`FERRETA Ae:
`
`
`HefFaEEA FakBLT(reSBEICREP
`
`iePackEELAREENitEeMyFe» NE Se PeeEB“AiesEi
`
`EGAITEFP
`
`(SEaeETieSEEa ETooHZa BSiARZ TPRES
`
`ETTHAIR ZUR > MSHER eBRaRSSkeABREZS
`
`Herr > Be
`
`
`Ree RDS TEE2AY BeeeRBBAEAE > Me
`
`sieTipsESITPiHR EAP
`
`
`
`
`
`
`
`
`
`
`
`
`5B 4 > Sh 4 Raa oe Sy Pllc)
`
`
`108109208
`
`HAT AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`( #58 felct fel
`
`108109208
`
`SERAR AO2ZO2
`
`1083198545-0
`
`6 iA
`
`> Je LDGaia)
`
`
`
`201941263
`
`108109208
`
`SERAR AO2ZO2
`
`1083198545-0
`
`SU > seUR)
`
`
`
`201941263
`
`c2
`
`Lg
`
`
`
`
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`
`
`201941263
`
`y=
`
`ov
`
`on
`
`
`
`Lv
`
`PhosKS
`
`
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`BB 4> 3k LZ Geis)
`
`
`
`201941263
`
`
`
`¢gl
`
`TT} on
`
`OF
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`BSH Jia isis
`
`
`
`201941263
`
`
`
`9eI )ov
`
`9-H][]
`
`a
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`5B OK > 3k LZ Geis)
`
`
`
`201941263
`
`(@)
`
`(q)
`
`CP)
`
`(9)
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`BH 3k ZA Geis)
`
`
`
`201941263
`
`424242
`
`=|3
`
`
`d
`
`Sore|BeseeSete|EeS2hcbe'Se
`i7:odPRASASKO
`
`Re21R3R221R221RS
`
`(a)(b)(c)(d)
`
`108109208
`
`SERAR AO2ZO2
`
`1083198545-0
`
`oS Od
`
`> Je LDGaia)
`
`
`
`
`
`
`
`
`201941263
`
`=| 9
`
`108109208
`
`SERAR AO2ZO2
`
`1083198545-0
`
`BIR
`
`> 3k 12Beat)
`
`
`
`
`~~
`
`ootl
`
`i,
`
`eS
`
`“~ PARoo
`
`
`
`
`nt
`
`Pa
`
`tS
`~
`
`oe
`
`201941263
`
`4
`©
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`38 1G > 3k IDAHB)
`
`
`
`201941263
`
`i
`
`~
`
`IT
`
`
`
`is
`
`_
`
`u
`
`Me
`
`<x
`OF
`
`| rooe
`
`ro
`-_i nuh
`
`a FS Ms
`
`S||
`
`108109208
`
`HAE AOZO2
`
`1083198545-0
`
`BB iiBL > Sk iDeed)
`
`
`
`x=
`
`201941263
`
`
`
`
`
`
`con
`EYx:
`eR
`=
`Seeerrrrnny,
`x
`ms
`8
`x
`¥
`8
`SREENEARANET gee s
`—
`§
`dog
`3
`PRY Sewn
`=
`Rs
`
`
`ar
`*
`nes=s=
`
`
`
`= RSSRE NS
`
`
`TWF GL oo
`tant SEPP
`
`SAEZ S SRaeatin St
`gordon
`we
`Bannanensninnininigainnnn
`
`= Jagat”
`:
`Ret
`S
`anxk,
`
`,
`
`as
`
`ae
`
`:
`iw
`
`eH
`
`i
`}
`NO
`
`‘<
`
`oe
`.
`=
`SS
`ts
`3
`a
`&
`
`ot
`=
`Eyed
`«
`geshacengy
`=
`8
`bd SSeen ee
`<
`SS
`E aarti Set
`a
`=
`NE psy.
`sagan EE .
`<
`<
`
`g=
`
`Seehs*
`
`SERENE
`SS
`3
`$
`x
`s
`_—~
`>
`S
`hy
`ie
`z
`:$
`x<<
`»
`
`
`
`&
`
`
`
`ae
`aS
`
`.
`=
`
`
`
`poeetieree,
`
`YRILELEIPEESLIBELDED
`
`
`ss=:
`a
`
`rR, anyg oak:
`
`Rye
`
`*
`
`
`
`
`sia
`StSSiS
`=
`
`
`¥ L
`
`Y
`& Rese
`
`108109208
`
`eHSete AOZO2
`
`1083198545-0
`
`
`
`
Accessing this document will incur an additional charge of $.
After purchase, you can access this document again without charge.
Accept $ Charge
Still Working On It
This document is taking longer than usual to download. This can happen if we need to contact the court directly to obtain the document and their servers are running slowly.
Give it another minute or two to complete, and then try the refresh button.
A few More Minutes ... Still Working
It can take up to 5 minutes for us to download a document if the court servers are running slowly.
Thank you for your continued patience.
This document could not be displayed.
We could not find this document within its docket. Please go back to the docket page and check the link. If that does not work, go back to the docket and refresh it to pull the newest information.
Your account does not support viewing this document.
You need a Paid Account to view this document. Click here to change your account type.
Your account does not support viewing this document.
Set your membership
status to view this document.
With a Docket Alarm membership, you'll
get a whole lot more, including:
- Up-to-date information for this case.
- Email alerts whenever there is an update.
- Full text search for other cases.
- Get email alerts whenever a new case matches your search.
One Moment Please
The filing “” is large (MB) and is being downloaded.
Please refresh this page in a few minutes to see if the filing has been downloaded. The filing will also be emailed to you when the download completes.
Your document is on its way!
If you do not receive the document in five minutes, contact support at support@docketalarm.com.
Sealed Document
We are unable to display this document, it may be under a court ordered seal.
If you have proper credentials to access the file, you may proceed directly to the court's system using your government issued username and password.
Access Government Site
