DERWENT—
`ACC-NO:
`
`DERWENT—
`WEEK:
`
`1995-189164
`
`199525
`
`Copyright ©2017 Thomson Reuters
`
`TITLE:
`
`BSF type solar battery mfr. by forming poly:silicon@ layer on
`N=type silicon substrate by CVD and using silicon fluoride as
`etching gas
`
`INVENTOR: OKAYASU Y;
`
`SAGAWA Y
`
`PATENT-ASSIGNEE: TONEN CORP [TOFU]
`
`PRIORITY-DATA: 1993JP-243040 (September 29, 1993)
`
`PATENT—-FAMILY:
`
`PUB-NO
`
`PUB-DATE
`
`LANGUAGE
`
`JP 07106611 AApril 21, 1995 JA
`
`APPLICATION-—-DATA:
`
`PUB-NO
`
`APPL-—-DESCRIPTOR APPL-NO
`
`APPL-DATE
`
`JP O7106611AN/A
`
`1993JP-—243040 September 29,
`
`1993
`
`INT-CL-
`
`CURRENT :
`
`TYPE
`
`CIPP
`
`IPC DATE
`
`
`HOl L 32/04 20060101
`
`ABSTRACTED-—PUB-NO: JP 07106611 A
`
`BASIC-ABSTRACT:
`
`1/31/2017, EAST Version: 3.3.1.2
`
`

`

`The method involves forming a P type polysilicon layer (2) on the
`light incident side of a N type single crystal silicon substrate (1).
`Thus, a PN junction is formed. A N+ polysilicon layer (5)
`is set up
`at the opposite side of the silicon substrate and forms a HL
`junction. The N+ polysilicon layer is formed by CVD method which
`applies B2H6 or SiF4 or SiH4 gas onto the heated silicon substrate.
`When Sif4 is used as an etching agent, a halogen radical emitted near
`the heated silicon substrate.
`
`ADVANTAGE — The method prevents generation of floating foreign
`material in a room;
`reduces substrate temp. of BSF type solar
`battery; and enables mfr. of BSF type solar battery with high
`photoelectric conversion efficiency and high stability.
`
`CHOSEN-
`DRAWING :
`
`Dwg.1/10
`
`TITLE-TERMS:
`
`TYPE SOLAR BATTERY MANUFACTURE FORMING POLY SILICON@ LAYER
`N=TYPE SILICON SUBSTRATE CVD FLUORIDE ETCH GAS
`
`ADDL-INDEXING-— BACK SURFACE FIELD
`TERMS:
`
`DERWENT-CLASS: LO3 U12 X15
`
`CPI-CODES: L03-E05; LO0O4-C02; L0O4-C10B;
`
`EPI-CODES: U12-A02A3;
`
`SECONDARY-ACC-NO:
`
`CPI Secondary Accession Numbers:
`
`1995-087785
`
`
`
`Non-CPI Secondary Accession Numbers: 1995-148457
`
`1/31/2017, EAST Version: 3.3.1.2
`
`

`

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`3.3.1.2
`
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`9
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`3.3.1.2
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`

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`11
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`12
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`
`1/31/2017, EAST Version:
`
`3.3.1.2
`
`

`

`13
`
`14
`
`(8)
`
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`RELY 2fe: Ss cem~100sccem
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`
`1/31/2017,
`
`EAST Version:
`
`3.3.1.2
`
`

`

`(9)
`
`RPE 7—106611
`
`15
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`
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`
`1/31/2017, EAST Version: 3.3.1.2
`
`

`

`(10)
`
`PE 7—-106611
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`
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`(E16 ]
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`1/31/2017, EAST Version: 3.3.1.2
`
`