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`JP,2015-036202,A
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`3/4
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`“PAJ‘ Deta ;fim
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`(11)Publication number
`(43)Date of publication of application
`(51)Int.cl.
`
`2015-036202
`23.02.2015
`54].!
`2/135 m 0])
`54].!
`2/16 M 0])
`
`(21)Application number
`(22)Date of filing
`(71)Applicant
`(72)Inventor
`
`2013-167445
`12.08.2013
`FUJIFILM CORP
`TAKAHASHI HIDE'JI
`
`
`(54)MEI'HOD OF MANUFACTURING INK JEI' HEAD
`
`(57)Abstract
`PROBLEM TO BE SOLVED: To provide a method of manufacturing an ink jet head which can
`prevent generation of a residue on a nozzle surface.
`SOLUTION: In a first thermal oxidation film forming process, a first thermal oxidation film is
`formed on a first silicon substrate before forming a nozzle. In a first junction process, a second
`silicon substrate is joined to a surface of the first silicon substrate with the first thermal
`oxidation film formed. In a nozzle forming process, a nozzle is formed by etching a nozzle
`forming position of the first silicon substrate to the first thermal oxidation film from an opposite
`surface side opposite to the junction surface which is joined to the second silicon substmte. In a
`second junction process, a flow channel substrate having a flow channel of ink including a
`pressure chamber communicating with the nozzle is joined to an opposite surface side of the
`first silicon substmte. In a substrate removing process, the second silicon substmte is removed
`from the first silicon substrate. In a thermal oxidation film removing process, the first thermal
`oxidation film is removed from the first silicon substrate.
`
`
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` rm m, ”3133:: u
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`

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`JP 2015-36202 A 2015.2.23
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`JP 2015-36202 A 2015.2.23
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`JP 2015-36202 A 2015.2.23
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`JP 2015-36202 A 2015.2.23
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`(10)
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`(13)
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`JP 2015-36202 A 2015.2.23
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`(14)
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`JP 2015-36202 A 2015.2.23
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`JP 2015-36202 A 2015.2.23
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