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`B41828: 9170152
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`1. An inkjet head comprising:
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`a nozzle plate including a plurality of nozzles;
`
`a vibration plate including a pressure chamber to store ink to be ejected from the nozzle;
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`a spacer plate containing a piezoelectric layer to apply pressure to the pressure chamber; and
`
`a flow path formation substrate between the vibration plate and the nozzle plate, the flow path formation
`
`substrate including a communication flow path that communicates with the nozzle and the pressure chamber,
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`the vibration plate including a vibration board provided between the pressure chamber and the piezoelectric
`
`layer to transmit deformation of the piezoelectric layer to the pressure chamber,
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`the nozzle plate including
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`an individual circulation flow path provided for each of the plurality of nozzles to discharge ink,
`
`and
`
`merge.
`
`and
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`a common circulation flow path into which a plurality of the individual circulation flow paths
`
`2. The inkjet head according to claim 1, wherein
`
`the nozzle plate includes
`
`a nozzle support layer located adjacent to the flow path formation substrate, and
`
`a nozzle layer located opposite to the flow path formation substrate across the nozzle support layer,
`
`the individual circulation flow path and the common circulation flow path are provided in the nozzle
`
`support layer.
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`3. The inkjet head according to claim 1 or 2, wherein the nozzle plate is an 801 substrate.
`
`4. The inkjet head according to any one of claims 1 to 3, wherein
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`the common circulation flow path is provided also in the flow path formation substrate.
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`5. The inkjet head according to any one of claims 1 to 4, wherein a columnar member is disposed in the
`
`common circulation flow path.
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`6. The inkjet head according to any one of claims 1 to 5, wherein a recess is provided at a part of an outer
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`surface of the nozzle plate over which the common circulation flow path is provided, the recess being recessed
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`toward the common circulation flow path.
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`7. The inkjet head according to any one of claims 1 to 6, wherein, in plan view, the common circulation
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`flow path includes a curved portion.
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`-10-
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