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`(54) Title: INK JET HEAD
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`(57) Abstract: The ink jet head is provided With: a nozzle plate (10) including a plurality of nozzles (N); a pressure
`chamber plate (20:) including a pressure chamber (21) in Which ink ejected from the nozzles (N) is stored; a spacer plate
`(40) that accommodates a piezoelectric layer (60‘) that applies pressure to the pressure chamber (20); a Vibration plate (30)
`that is provided between the pressure chamber (20) and the piezoelectric layer (60) and transmits a displacement of the
`piezoelectric layer (60) to the pressure chamber; and an intermediate substrate (100) including a communication flow path
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`wo2018/020910A1|||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
`
`

`

`WO 2018/020910 A1 |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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`through Which the nozzles m) and the pressure chamber (20) communicate With each other between the pressure chamber
`plate (20) and the nozzle plate (10). The nozzle plate (10) has separate circulation flow paths (111) that are respectively
`provided corresponding to the plurality of nozzles (N) to eject ink, and a common circulation flow path (113) through
`Which the plurality of separate circulation flow paths (1 11) converge.
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`

`

`WO 2018/020910
`
`1
`
`PCT/JP2017/022682
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`

`

`WO 2018/020910
`
`2
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`PCT/JP2017/022682
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`
`

`

`WO 2018/020910
`
`3
`
`PCT/JP2017/022682
`
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`
`

`

`WO 2018/020910
`
`4
`
`PCT/JP2017/022682
`
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`

`

`WO 2018/020910
`
`5
`
`PCT/JP2017/022682
`
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`

`

`WO 2018/020910
`
`6
`
`PCT/JP2017/022682
`
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`

`

`WO 2018/020910
`
`7
`
`PCT/JP2017/022682
`
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`

`

`WO 2018/020910
`
`8
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`PCT/JP2017/022682
`
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`

`

`WO 2018/020910
`
`9
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`PCT/JP2017/022682
`
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`

`

`WO 2018/020910
`
`1Q)
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`PCT/JPZOl7/022682
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`

`

`WO 2018/020910
`
`1 1
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`PCT/JPZOl7/022682
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`

`

`WO 2018/020910
`
`12
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`PCT/JPZOl7/022682
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`

`

`WO 2018/020910
`
`13
`
`PCT/JPZOl7/022682
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`

`WO 2018/020910
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`14
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`PCT/JPZOl7/022682
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`WO 2018/020910
`
`1 5
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`

`WO 2018/020910
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`16
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`PCT/JPZOl7/022682
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`

`

`WO 2018/020910
`
`PCT/JPZOl7/022682
`
`1/6
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`
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`S)
`
`FIG.2
`
`11
`
`111
`
`11a
`
`60
`
`63 62 61 56
`
`57 52
`
`f—Afi
`92
`91
`
`58
`
`
`
`
`

`

`WO 2018/020910
`
`PCT/JPZOl7/022682
`
`2/6
`
`[I3]
`
`FIG'3
`
`P
`
`60
`63 62 61 56
`
`51
`
`90
`
`57 52
`
`92
`
`91
`
`58
`
`1A
`/
`
`““““‘“’////\<
`
`
`
`L110
`
`
`
`[IE4]
`
`FIG-4
`
`11
`
`/ 1
`
`113p
`
`111
`
`11a
`
`13
`
`113P
`
`111
`
`11a
`
`

`

`WO 2018/020910
`
`PCT/JP2017/022682
`
`3/6
`
`[.5]
`
`FIG.5
`
`60
`P
`
`51 63626156
`
`90
`
`1 C
`
`57 52
`
`92
`
`91
`
`
`58
`
`
`
`*110
`
`
`<‘1n 10
`
`/
`
`
`
`
`$___I
`
`7'.=—__
`
`B1
`
`113
`
`21
`
`121‘ 81111 N11a10112a
`
`E
`
`l
`
`

`

`WO 2018/020910
`
`PCT/JPZOl7/022682
`
`4/6
`
`[I6]
`
`FIG.6
`
`11
`
`1130
`
`111
`
`110
`
`1D
`/
`
`113W
`
`111
`
`110
`
`

`

`WO 2018/020910
`
`PCT/JPZOl7/022682
`
`5/6
`
`[l7]
`
`FIG-7
`
`60
`90
`P
`
`51 63626156
`57 52
`92
`91
`58
`
`1x
`/
`
`
`
`
`
`
`>110
`
`
`
`:: RI; >3;
`J/z
`i
`\
`’4 Z
`42
`41 ”ago 7 //////////m /J
`
`llllll'rllllllllllllll’ll'll‘
`l...a.,,....,-(.-,",l,,
`
`
`
`----n- u----
`§
`>20
`22 S
`)
`
`A_
`
`3-1;
`
`?
`A
`
`113
`
`21
`
`$1111 N11a 71101
`
`I
`
`
`
`

`

`WO 2018/020910
`
`PCT/JP2017/022682
`
`6/6
`
`300
`
`
`
`
`
`Eifififi
`
`450
`
`