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`Trademark Office
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`\KER FUR PATENTS
`mia 22313-1450
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`c) CLAIMS 37] (8) DATE U] r FE: FEE RECD ATTYDOCKETYNO TOT CLAIM
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`01/16/2019 '
`2500
`28577320001
`2o
`15/318,303
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`CGNFERMATEGN no case
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`28111
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`sreehe, nessran, COLDSTEEN a FOX ELLIS.
`11011 N EW roar: Avatar-z, aw.
`WASHiNGTON, DC 20005
`UNETED STATES OF AMERECA
`
`FiLiNG RECEEPT
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`1
`1
`11
`1
`11
`1
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`
`Date Matted: GEE/212019
`
`Receipt is aoknowietiged of this non~orovisionai utiiity patent appiication. The aopiicatioh Witt be taken up for
`examination in due course. Aopiicant wiii he notitied as to the resuits oi the examination. Any correspondence
`concerning the aooiioation must inciude the toiiowing identification information: the US. APPLEGATTON NUMBER,
`FiLiNG DATE, NAME OF FTRST iNVENTOR, and TiTLE OF iNVENTiON. Fees transmitted by check or drait are
`subject to coiiection.
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`Please verity the accuracy of the data crosentert on this receipt. if an error is noted on this Fiiing Receipt, otease
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`with strike—through tor deietions and underiining ior additions. it you received a "Notice to Fiie Missing Parts" or
`other Notice requiring a response for this anotication, oiease submit any request for correction to this Fiiing Receipt
`with your repiy to the Notice When the USPTO processes the reoty to the Notice, the USPTO wiii generate another
`Fiiing Receipt incorporating the requested corrections provided that the request is grahtahie.
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`
`inventorts)
`it/iihei RTEPEN, Vetdhoyen, NETHERLANDS;
`.:.
`eter Anna Antonius
`
`a BROti/‘t, Eindhoven, NETHERLANDS;
`Ronaid Johannes i-iULTt-ERMANS, Waaire. NETi—it—ERLANDS;
`
`Appticantts)
`
`ASML Nethertahds B.V., Vetdhoyen, NETi—iERLANDS;
`Assignment For Published Patent Appiication
`ASiViL Netheriands BY, Veidhoven, NETT—it—ERLANDS
`
`Power of Attorney: The patent practitioners associated with Customer Number 261' 11
`
`Domestic Priority data as ciaimed hy apoticant
`This apoiioation is a 371 ct PCT/EPQOfl/GSSAOQ 06/22/2017
`
`Foreign Appiications (You may be eiigioie to benefit from the Patent Prosecution Highway program at the
`NSPTO. Piease see htiesigma/yeasotoigoy for more information.)
`EUROPEAN PATENT OFFiCE (EEO) 181810668 07/25/2016
`
`Permission to Access Aopitcatton via Priority hocument Exchange: Yes
`
`Permission to Access Search Recruits: Yes
`
`page ’i of 3
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`
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`Appiicant may provide or rescind an authorization for access using Form PTOi’SB/SQ or Form PTO/$8,169 as
`appropriate.
`
`it Required, Foreign Fiiing License Granted: 05/19/2019
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`The country code and number of your priority appiication, to be used tor titing abroad under the Paris Convention,
`is US t§l318,383
`Protected Puhiication Eats: 08/29/20t9
`Non—Puhiication Request: No
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`Eariy Puhiioation Request: No
`Titie
`
`Debris Mitigation System, Radiation Source and Lithographic Apparatus
`
`Preiiminary Ciass
`
`Statement under 3'? CFR 1.55 or 1.78 tor AiA (First inventor to Fife) Transition Appiications: No
`
`PRQTECTiNG YQUFR ENVENTEQN QUTSEDE THE tiNETEiI} STATES
`
`Since the rights granted by a US. patent extend ohty throughout the territory oi the United States and have no
`etiect in a foreign country, an inventor who wishes patent protection in another country must appiy tor a patent
`in a specific country or in regionai patent offices. Appiicants may wish to consider the iiting of an internationai
`appiication under the Patent Cooperation Treaty (PCT). An internationai (PCT) appiication generaity has the same
`effect as a reguiar nationai patent appiication in each PCTmemher country. The PCT process simptifies the iiiing
`of patent appiications on the same invention in member countries, but does not resuit in a grant ot ”an internationai
`patent" and does not etiminate the need oi appiicants to fife additionai documents and fees in countries where patent
`protection is desired.
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`Aimost every country has its own patent iaw, and a person desiring a patent in a particuiar country must make an
`appiication for patent in that country in accordance with its particuiar iaws. Since the taws of many countries differ
`in various respects from the patent iavv of the United States, appiicants are advised to seek guidance from specific
`foreign countries to ensure that patent rights are not test prematureiy.
`
`Appiioants aiso are advised that in the case of inventions made in the United States, the Director ot the USPTO must
`issue a iicense hetore appiicahts can appiy tor a patent in a foreign country. The tiiing ot a us. patent appiioation
`serves as a request tor a toreign titing iicense. The apptioation's tiiing receipt contains further information and
`guidance as to the status of appiicant‘s ticense for foreign fiiing.
`
`Appiicants may wish to consuit the USPTO hoottiet, "Generai information Concerning Patents" (specificatiy, the
`section entitied "Treaties and Foreign Patents") for more intormation on timetrames and deadiines tor tiiing foreign
`patent appiications. The guide is avaiiabie either by contacting the USPTO Contact Center at 800788-9199, or it
`can be viewed on the USPTO website at http://wwwuspto.gov/web/ottices/pac/doc/generai/index.htmi.
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`For information on preventing theft of your inteiiectuai property (patents, trademarks and copyrights), you may wish
`to consuit the US. Government website, httpz/r’www.stopfakes.gov. Part of a Department of Commerce initiative,
`this website inciudes seit-heip "tcoiidts" giving innovators guidance on how to protect intetiectuai property in specific
`countries such as China, Korea and Mexico. For questions regarding patent entorcernent issues, appiicants may
`cati the US. Government hotiine at 1-886-999-i-iALT (1-886-999-4258).
`
`page 2 of 3
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`LEGENSE FDR FQREEGN HUNG LENDER
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`Titie 35, United States Code Section tart
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`Titie 32% Code at Federai Reguia‘tiens, 5.11 8r 5.15
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`GRANTED
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`it the phrase "it: REQUfRED. FOREfGN FiLiNG
`The appiicant has been granted a ficense under 35 USE. 184,
`LiCENS‘E GRANTED" fcifowed by a date appears on this term. Such iicenses are issued in aii appiications where
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`This iicense is to be retained by the iicensee and may be used at any time on or after the effective date thereof unfess
`it is revoked. This ticense is autornaticaiiy transferred to any reiated apoiications(s) tired under 37' CPR t.53(d). This
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`NOT GRANTED
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`No iioense under 35 USC. 184 has been granted at this time. if the phrase ”iF REQUERED, FOREtGN FiLiNG
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`SelectUSA
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`The United States represents the iargest, most dynamic marketpiace in the wcrid and is an unparaiieied iocation tor
`business investment, innovation. and commerciafization of new techncicgies. The US. otters tremendous resources
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`page 3 of 3
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