- 2 -
`
`KUTVIAR et al.
`
`Application No. To Be Assigned
`
`Amendments to the Claims
`
`This listing of claims will replace all prior versions, and listings, of claims in the application.
`
`1. - 15. (Canceled)
`
`16.
`
`(New) A supercontinuum radiation source comprising:
`
`illumination optics arranged to receive a pulsed pump radiation beam having a power and to
`
`form a plurality of pulsed sub-beams, each pulsed sub-beam comprising a portion of the pulsed
`
`pump radiation beam;
`
`a plurality of waveguides each arranged to receive at least one of the plurality of pulsed sub-
`
`beams beam and to broaden a spectrum of that pulsed sub-beam so as to generate a supercontinuum
`
`sub-beam wherein the power of the pulsed pump radiation beam is spread over the plurality of
`
`waveguides; and
`
`collection optics arranged to receive the supercontinuum sub-beam from the plurality of
`
`waveguides and to combine them so as to form a supercontinuum radiation beam.
`
`17.
`
`(New) The supercontinuum radiation source of claim 16, wherein the plurality of
`
`waveguides comprise integrated optics.
`
`18.
`
`(New) The supercontinuum radiation source of claim 17, wherein the plurality of
`
`waveguides are formed from silicon nitride (Si3N4) and are surrounded by a cladding material or
`
`silicon or silicon dioxide (Si02).
`
`Atty. Dkt. No. 2857.7240001
`
`

`

`- 3 -
`
`KUTVIAR et al.
`
`Application No. To Be Assigned
`
`19.
`
`(New) The supercontinuum radiation source of claim 17, wherein the plurality of
`
`waveguides are formed on a common substrate.
`
`20.
`
`(New) The supercontinuum radiation source of claim 17, wherein the plurality of
`
`waveguides have a width of the order of 1 um or less and a height of the order of 500 nm or less.
`
`21.
`
`(New) The supercontinuum radiation source of claim 17, wherein each of the
`
`plurality of waveguides has a length of 10 mm or less.
`
`22.
`
`(New) The supercontinuum radiation source of claim 16, wherein the power of the
`
`pulsed pump radiation beam is spread over the plurality of waveguides.
`
`23.
`
`(New) The supercontinuum radiation source of claim 16, wherein the
`
`supercontinuum radiation beam has a spectrum which comprises radiation in the wavelength range
`
`of 400 to 2600 nm.
`
`24.
`
`(New) The supercontinuum radiation source of claim 16, comprising 100 or more
`
`waveguides.
`
`25.
`
`(New) The supercontinuum radiation source of claim 16, wherein the illumination
`
`optics and/or the collection optics comprises a plurality of groups of waveguides, the plurality of
`
`groups of waveguides being sequentially ordered and wherein the waveguides from each group of
`
`Atty. Dkt. No. 2857.7240001
`
`

`

`_ 4 _
`
`KUlVlAR et al.
`
`Application No. To Be Assigned
`
`waveguide optically couple to a plurality of waveguides in the next group of waveguides in the
`
`sequence.
`
`26.
`
`(New) The supercontinuum radiation source of claim 16, wherein the illumination
`
`optics and/or collection optics comprises a plurality of lensed fibers, each of the lensed fibers
`
`coupling to at least one of the plurality of waveguides.
`
`27.
`
`(New) The supercontinuum radiation source of claim 16, wherein:
`
`the illumination optics comprises a first optic and a focusing optic,
`
`the first optic is arranged to receive the radiation beam from the radiation source and to
`
`direct it onto the focusing optic, and
`
`the focusing optic is arranged to optically couple a different portion of the pump radiation
`
`beam to at least two of the plurality of waveguides.
`
`28.
`
`(New) An optical measurement system comprising:
`
`a supercontinuum radiation source comprising:
`
`illumination optics arranged to receive a pulsed pump radiation beam having a power
`
`and to form a plurality of pulsed sub-beams, each pulsed sub-beam comprising a portion of the
`
`pulsed pump radiation beam,
`
`a plurality of waveguides each arranged to receive at least one of the plurality of
`
`pulsed sub-beams beam and to broaden a spectrum of that pulsed sub-beam so as to generate a
`
`Atty. Dkt. No. 2857.7240001
`
`

`

`- 5 -
`
`KUlVlAR et al.
`
`Application No. To Be Assigned
`
`supercontinuum sub-beam wherein the power of the pulsed pump radiation beam is spread over the
`
`plurality of waveguides; and
`
`collection optics arranged to receive the supercontinuum sub-beam from the plurality
`
`of waveguides and to combine them so as to form a supercontinuum radiation beam.
`
`29.
`
`(New) An alignment mark measurement system comprising:
`
`a supercontinuum radiation source comprising:
`
`illumination optics arranged to receive a pulsed pump radiation beam having a power
`
`and to form a plurality of pulsed sub-beams; each pulsed sub-beam comprising a portion of the
`
`pulsed pump radiation beam;
`
`a plurality of waveguides each arranged to receive at least one of the plurality of
`
`pulsed sub-beams beam and to broaden a spectrum of that pulsed sub-beam so as to generate a
`
`supercontinuum sub-beam wherein the power of the pulsed pump radiation beam is spread over the
`
`plurality of waveguides; and
`
`collection optics arranged to receive the supercontinuum sub-beam from the plurality
`
`of waveguides and to combine them so as to form a supercontinuum radiation beam;
`
`an optical system operable to project the supercontinuum radiation beam onto an alignment
`
`mark on a substrate supported on a substrate table;
`
`a sensor operable to detect radiation diffracted/scattered by the alignment mark and to output
`
`a signal containing information related to a position of the alignment mark; and
`
`a processor configured to receive the signal from the sensor and to determine a position of
`
`the alignment mark relative to the substrate table in dependence thereon.
`
`Atty. Dkt. No. 2857.7240001
`
`

`

`- 6 -
`
`KUlVlAR et al.
`
`Application No. To Be Assigned
`
`30.
`
`(New) A lithographic apparatus comprising the alignment mark measurement system
`
`according to claim 29.
`
`Atty. Dkt. No. 2857.7240001
`
`

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