`
`(19) EIIFIfiE’FFfiJP)
`
`(12) ’13 I35 31% E‘F {13: #5 (A)
`
`(48) £55 El
`
`(infiéflilfififififi6
`##552016—42575
`(PZO16—42575A)
`SFHEBEBH 31 B (2016.3. 31)
`
`F 1
`
`7"—?:— P (32%)
`
`(51) 1nt.C1.
`5/026
`1-1018
`H018 S/m (2115.01)
`6/12
`G02B
`6025 6/12
`(2115.01)
`6/182
`G023
`6028 6/132
`(2006.01)
`31/02
`1-10 1 L
`HO 1 L
`31/0232
`(3914.01)
`GOZF
`1mm
`annoy
`G02F
`1m%
`Efiéfifli 7% $381505): 15 0L flfifihfilfi
`(fi 26 E)
`fifififilfiicfi<
`
`
`618
`301
`
`(3
`
`fifi2015—159543 (P2015—159543)
`(21) Hififi-‘E%
`312m27$8fi 12El (2015. 8. 12)
`(22) HzHEEEI
`(31) 1&5HE$§§% 14180862. 6
`(82) @5133
`EFm26=E|58ElSEI (20148.13)
`(83) {ifififiifilfl
`5511111??? (EP)
`
`(71) Hiféfilk
`
`503433420
`fikfifififil‘E-fifil
`1-1 U AWE 1
`T E C H N 0 L0 G l E S
`CO.
`, LTD.
`5 1 8 1 2 9 FEEE‘F‘E
`FPEAEJEFDEI
`A+1VYFfifiEfi|Zifififl EkfifififlANV
`75.4%
`Huawei Administrati
`
`on Building, Bantia
`n, Longgang Distric
`t, Shenzhen, Guangd
`ong 518129,
`P. R.
`Ch
`ina
`
`100107766
`#Ej:
`('55? EB:
`fifigfiiififi
`
`(T4)’rk':¥§)k
`
`(54)
`
`1346010343831 )‘fififilfilflfi’rfli‘fifl‘éfiifi
`
`(57)
`
`[E341]
`
`(18H?)
`
`[fifi] 7?“?4’7‘56fl4’xafiv v7§ifififilfilflfia€
`E?%%$EE%E%E?5EEE%&?60
`
`[fifliElflfifiEm\v—lengfisl4m7
`
`b?x7§fifififi&%fifiéX?vfit.77?xfi
`
`Efiflfifi&fimmn%fifi%aamiof.v—XW
`
`In§fi®éfiéfim¢%x%vf&.v—zalng
`
`fiQfitflEhchBfiNCN-yV7§1flflfiifilfi5 3 1 x 5 3
`
`2x533%fim?%CEE$ofififi77?%7?
`
`I‘M’X 5 5 O&H§fil€‘§‘62?v7°k. 75?4 77—6184
`
`X75”:V—Xfil/\Em%lifififi‘%1?v7°t\ 7’73"
`
`47%N4X0Efififivv7gfifififi%fifiéa—
`’7‘“? 53195213157152); 51:1 7&7‘4 7‘7328/{XPEEY
`
`Officiéx?v7“7bfi‘o%fifiéh%o
`
`[Emfllfl5c
`
`503
`§5
`
`522 524
`
`522
`
`550
`
`513
`
`533 514
`
`531
`532
`
`
`
`(2)
`
`JP 2016742575 A 2016. 3.31
`
`[fifitfifisj‘WDfifilfil]
`
`[fifliffill
`
`7’7’f4’7*?2fi‘4’7ik2x“\yvj‘ifiififlfifilflfi}:fififi‘zfl'fifiififilflfiifigfififi‘zfl’flfif‘zfia
`TH
`
`V—Z'filhfiflillTfi?4’7‘igififlfiffiififgififififir3X5hyTEN
`@3377?!jgififififiifi%3§?flfiq&Cfl%i§§—Zgs:ELC$0T\
`"Fifi? V—ZfilhfiflifiD
`
`#gfléfiflfififiz?v7z\
`fifiéa‘J—Xflingfliflfiméhfcfififibcfi‘yV7§ififl§fiififéififiifiéu1f~y7°fiéb
`
`a'C\ fifiéflfi’fif‘q’7%?fiflfiffiific‘1fifiéaflv971%?B‘3Efifiifié:0)%€M$75‘Efi§fi7’¢7‘47
`
`731§4XIEfiZEEL-, WET/7714jiffl/l’ZiififiEE‘J—XWIAEHS—Hrifif'filfi‘éJEEPEE
`j‘%\
`iIEFH'd‘%Z‘7“y7°<‘:\
`
`WéET7?/r7‘53N/I’Xb‘l5fifififl‘l—XWIJ\%WEB$£?%X?‘y7°é:\
`WEET§?47§§N4’XUDEE75§3—’fv %E$Eiififfilfi‘¥ock5li\
`fififialfivv71§$§
`
`Efilfilfifi’i’fifi‘fiéfifififlfl—V‘V FEEDCFIYIEET??4 77:7"{X78Hflbf?fbf%2§"y7°kx
`Efifl'éfiiffo
`
`[EESEIEZJ
`
`EFFnEJ§$fi723FIJfiiLT\
`
`fifiéflfi—‘f‘v %%$fic:fifi§fl?fi?.+7%2fi4x223H20HH51—7r
`
`‘ijifi'g—Z)‘ Efifléifiléfiififififio
`
`[fiflUESJ
`
`figiflFHL/T‘ fifiéfl’fi—Jf‘y bfiffitlfifiéa7fif4’ 7"?‘fi/1’Xfiémlbfi‘b‘éX5-‘vj
`&E'9“%n fififilxcizfiflfiiODfiffic
`
`fififliffi/l]
`
`fifi?fl‘)-—XI§1nE$fifiC7§~T/rTigfiflfii‘fiifi7éfifiélfl'auth‘y75i‘ fififi ‘J—X'fil
`
`Afifiial I I—Vfififlfi%fi£§éfié§2?v7fiafifi\ Efiffilfillfifil’xwhh‘éfifiafi
`@fifiio
`
`[$312135]
`
`fifiéfl‘J—XWIAEWODfitHE’EfifCEfifiLCNvV7Em%$§fi%ififififié2f‘y7£i\
`
`fififiE‘J—XIbingfiimfimghfcfififitfifiéaI I T—VfifififlfiEfifi‘iE‘éfiéz—ZF-yj
`
`EAE‘U‘ E‘fiSRIEILEEEéEOJfiifiO
`[‘éfiifilfifil
`
`fifiifly—XWIAEWEI II Vfi’fififiEfififigfi%X7“y7fii‘ WEEVFXWIM
`
`gifiitaF—jgfiificaiflbflihfz£$§¥J¢EEE$EE¥é2‘7‘v7%fi‘$\
`
`fifiEE‘J—XWingfliflfitfléhfcgfifiEEfiEI I 1*Vfiffififififiifiéfi’ax5r‘y
`
`763‘ WEB‘JHXfilmi’ffiQfifié’hTzfiflfiibiJFFHTEfiSfiICEbflEfiEN-yv
`
`figéflfifi‘i7éxf‘y77’é'é‘ifi‘ fiiifi5fiafl®7§flio
`[fiififiT]
`
`fififiaé—fi‘“) figflibififi337¢f4 7‘?1§4X?2H20ij”éfifiii\ fifififlifififiéhhTfi
`f4fififfiflfifii’fi}:fivvjifi‘ifiiififiifibmifibaiéiEQZV/‘RéFEZEEEE’Q‘ZaX-Tfly
`
`TEELM fifiéflififiiéflché'5‘4’7§ififlfi+fifikfiv97‘§fi%%ifit®ififli\
`
`fifififl
`
`7§?J7‘7‘31§4X®Efi0)}ifi'€&%-‘
`[EEEEJEBJ
`
`fififilflfififlhfi‘#lfifiafi®fifio
`
`fifiéfléi‘fiODZIVé? I~EE3\ fifififlififii’Z‘fflgfifi’EfiIfiéflTéfx 75"“1‘24’10312fib:
`
`I‘Qj/TEHL/x fifiéfl???47?‘rfifixmifibi\ fifiéfl7’7f47‘fil‘Ifi/{XGDJEEODE3WL
`
`T35;é\ EfifiIfi7§E$E037§ifio
`[‘é‘fiflfil’fiQJ
`
`N‘797‘gi‘fifilfilflt‘
`
`7&5‘4’7“?)‘4’ZUDJEE75‘EJI’IEENVngifififililfibifilfij‘d'éJ:5Pix fifié‘EIfi-y‘V?‘
`
`fiffiflfilfilflfifi:fli0fifi6hé?7?# 7531\‘4’th
`
`@E?é%%$§@$§fi%of\
`
`WET/fifxffifl‘N/fxci‘ fififiéhfcl
`
`I Iivfifiififiéfii%7fif475§ififififi
`
`10
`
`20
`
`30
`
`40
`
`50
`
`
`
`E£\fififiéhfilIIiVEEEEE?%NVV7§fifififi£®%éfififiiéfi
`
`(3)
`
`JP 2016742575 A 2016. 3.31
`
`fifififlo
`
`fifififiilol
`
`fi$7§f47?Nfixwifiwmfiéhfififi®flyfifiFETEaT\WE???
`
`47?H4X®ififififi?é%x7?fi42®&fi®fififihéfififiwzyafibfi
`&EL\
`
`fifififiQHVafibEu\WE7¢%¥7?N%Z®LEE$fi—Efiéfiy7&fi
`¢%\%fifi9$fiafififififio
`
`[$fifi11]
`
`fifi7bfxf?fi4lfifififivV7§fiflfifihfibfifi$hé$fifixf—fifi
`fi&fif%\fififi92@10Efi®%%fiE%n
`
`m
`
`[fiifilzl
`
`%%?—Nfifim\fifi75?47?N#Z®va7§fi%fifimfibffifiéhé
`
`\fififillafimfififififio
`[fiifilsl
`
`W%?—Nfififl\3D?—fi%fiéfii%\fififillfifilE§fi®fi$fiEfio
`
`[fififi14]
`
`fififivvjfifififififl\:7tfifi:7%tfi—fi%&§v?4V€a&fib\
`
`WEBSTODW’EEJ\ Elw’yv‘fivfizjybazfing ficcvu:1ya\ duh/€997
`
`XZVF52F%E\%ESiN‘SiON‘Ta205R3SiC®10&®IOT& m
`6xfififieflfilsflmfiéfififi®fifififlfio
`
`[fififilsl
`
`%fi%fifififiu\mT®?mfiz\fifibE‘EEfiM%‘$Eb—fiflfififi%y
`
`Jb—9019EE?%\$fiE9HEI4Mhfi9EEfl®%%%M%O
`
`[fifi0fifltfifl]
`
`[Hfifi%]
`
`W001]
`
`$fiim\fiwfivvj?—fi%flmbklII—Vfi?¢?47®A?U§—:7Z
`
`$EE$0T\77?47?fi42&@fivV7§fi§fi§§fifi§fi$fififi€$fifi
`
`w
`
`fifiEmfifi%oflfififimfim\%%fifl%\fihfifififlm$bflfiéht7j%z
`v?$fififit%fi%o
`
`[fifififi]
`[0002]
`
`c/U:l‘/7zi‘ }\:‘y7£i\ Effix ?—3}E%\ Jya—afi7bfifityvyfi‘bzfiw
`
`$$fififim®kb®mmwfifififfivb7fi—Labffifififififi%fifibfwé
`
`o%n@\fi$§fifiuxkty03ygmiu0Mos(mfififififlkfi$gw)z
`
`Vfi?7WfifiInZ&HWEfi®flfi%EDT7#F:vfififi%%fifiéit%flfi
`
`aaa‘z—sg Lh‘LZ’Ifi’qB‘ filiii’fifiifivvj‘vv:IVEiEZEfi?‘fi/fxoi‘ film/“h {fiffi/It’
`2‘
`(?-¥'Z‘~J[/’7EHX F~172EEFDEYEEH EUfilfififi‘flktafiaLTBEEH‘TE‘I‘EEEEfKfiéE
`
`40
`
`LT%?%DCflM‘SiOZ(4flW#K%)¢5v?4VV&Si(54$)fl7a
`@fiwfiwfifi$ny%fix%\##fifiSiEQEE\fifiVUUVQkéfififififl
`
`fifliéo
`
`{000M
`
`%m&J%N—Z®fivV7?fi42fi%hk%%&fifif%oO.1dB/cmET
`
`fl%EwE%fi\640nm®§é®SiNx(§m#4i)37%fi2t%fi%mam
`TREZ’LTED\ 173‘ 0. 1dB/111’E‘Flfill'éfiiififiifié‘éfié'i‘ 5011111®J§E0337
`
`%ffifii?¢i§?§fl§fil0b\ffi€fifh‘%o
`
`Erna Si
`
`(r1=3. 5))5’1ZFSiO2 (n=1
`
`45)Efi?éSiNx(n=2)&63102(n=1.45)®fi®fi¥fiwfifi
`
`$3V1~§21~¢i\ J:OIJw‘c‘Sttflitfi/rfffitf';Ofi%fi§%ifii}§&%fcéfi‘o Chfiix
`
`50
`
`
`
`(4)
`
`JP 2016742575 A 2016. 3.31
`
`Ewfi%®%fi&%fifi%fiwfit<\AWG(7D%%fififib—?4Vfi)\U
`
`fifi%fi5®fitifi3yfib%&%E%E%fifiéo$m&#$§fi%m\7??
`
`vvfly7jkzvéfvftbffififit<\“XéyF7U—y"tfivvjm
`
`V7
`
`(7
`7‘ 'y
`
`7ifigfifififivv7§fifigaLTQEfifi§éhT§fio%h8®jyfi&bfifi
`
`{fflhfixZhBQEfiflfiJXFE§E%K@EE%®$EEEDTEEWT&%Q
`Lbbfifi6\:flBQfifikaaEEEEfl§RMD—$E6%yab—7®flhfi
`
`fifigkéhéau—fiuvU3y7avb71—mewfflfififif\%k#4i7
`fivfi7t—Limufltflfififimo
`
`[000M
`
`zafifitcmfzofifififiééoInP/GaAs%E%mmfflfiéh%fi%®
`
`7&?47?N42m\fivv7§fifififiw7vv7%vjxflfifiéhénChm\
`
`filmié‘fit’l’waififié‘éhfc7‘3fi/fXh‘7’f7§w*7‘737’5/1’24V]~%%§é:fi‘25fcéb\
`
`"J-vv‘VDFE
`
`fiéEkg<fikéfiécE%Wfl‘H1Kfiéhé$5fifi§fi¥fifx100&fi%
`
`?%fi®\?97ifi7??#7?fi%2110%fifi?%k®mllI*Vfi7%w5
`11léflvngflfififllzowfififiéaaéfimfiéct%fi%éova7§
`
`fifififi120m\301(9U2y-ty-4y91v—9)fififi121W®n%7
`
`UvFgfiflfifil25EU?—N%—F:yfi—9123EE¢507b?47?fi4
`
`X110@\selfifillsmfifiéh\:Mm&%§115L®$Efimn;bhfi
`
`Héhéi¥fifil11%fiZkIII—VfififiiHF%fifiéo:mifimfifiéfl
`
`‘$1®¥H41®Mflfivlnxfi—wwibifiéhéhb\ibwfixflxbgfi
`wayfi~$y%fi%%$h%fififibbef\flfifié®i§T&%o%aT\%fi7
`
`7n—%u‘%v75%3fi%kfiawfiof\ifiifififimt%®mt%c
`[000m
`
`k$fi®flfu9—:72E%%Ehh7fi?47?H42?@\fifif—Nuyfifi
`
`xfivv7fifit77?(7?N4XE®ET%%EE?%®EWfi3h6OEQf—N
`
`M\7&?#7?N42EWflf%mflfl%éfl§fiDIE¢$V&WEEfim1%fié
`
`h%oE2@\III—Vfi7&?47?H4zmfifi%#Mtfiéfiflf—N200%
`%?33&fi?c%fifiH%TH\§—NEEH%EM%&EEH$&N9&VZ&%W
`
`10
`
`20
`
`bxWfifi?fl4xfi%fi9éfi%o$%D—Wfifi\ihBQ?—fiflfi%%flfi?%
`tbmfivfiyfiéhéfififi%éoLfibfifi6\cm%éxfikéht%fifllv%
`
`30
`
`Vfiéhkm¥®fi<%fih\Cflfi$0\$fowfifi%m93fi%o$EEylb
`
`H§Ffix?—fi%fifififi%%%fififififlfifitwo
`
`[000M
`
`Chififlméhkifi%%%?HKE$%£E&%%Q\F—EVfiK;%fifltE
`
`%\¥H4z$¥fivgyz®%MKG?—H%£yEyfifiéfififlfifiaoflfififi
`%fi\%fi%yab~3fiowf\F~7fiU77¥47fifitfi¢éo?NXX$%N
`
`Vfiyxwfimm\$§fi§fi$fib5%—N%fi&%fimtfififiécamiof‘%
`
`yapwam3m1%&fi%%fi\:077uw%flfifi%?aflfififiwofifiuwfi
`
`E3W%?—Nfifiyfiyfiiéfigfiu\fiflfifi%&flfl?ékbfi£écChflfi
`
`%B<.D—W®§fi%fi9$E%O%/U9vbllI—Vfigfifiifiwb7fi—A
`
`fim\fivv7&67&?47fififi‘7&?47§fi%%fiCMQW\§$E¥fififi
`
`fiF—EV5%E?%)&6va7§fi%$fi(MQWkflF—EV5%EEfim)%
`EmefikfifiazamxofWfiEMég
`
`[ooofl
`
`E3d\%/UDV&IIIivfifififi75vh7i—L077?47fifi301a
`Nv77fifi311&0E0fiflmfififi%fififlM3OOT%%o77fd7fifi30
`
`lGa’K #iEUDn-F—InPgfli31OLGCHX‘JHU’BIkan—InPUDTfiLESO?‘ LP
`
`FfiMQWJESOtSEctFp—Inpmimg3o 3%?fifzm Hwyfffiiflis 1 151‘ #E
`03n+—InP%?FJX_3lOLbCHE‘D‘fflLHBhTCJEF—7’InPODTfEEB17‘ wig}:
`
`twfihfifivvjmfim$fig3l5\kfifiF—jlnpmimfi313éfit&o
`
`40
`
`50
`
`
`
`(5)
`
`JP 2016742575 A 2016. 3.31
`
`moos]
`
`L#L\EEQA?nV—:72%fififiéflflbf\fififiéhklII—V
`
`fi?ln&fl%fi%itflfi%twochfi\111*VfiWEN\%fiME4OOEfi
`
`fifl4mfi3m5$5fiflH€vfivlh®“71Hzflvy”K$V?%Vfiéhék
`
`bfifiéofimIQIII—Vfiy4401fl.fiV?4V53thII—Vfi§¥4
`05%E?%801§fifi%fifi1%“7I—xfivy”fiy?4y54o4t;of\
`
`SOI71%:vbfififi4030ifiEWDHHEh%4020Illivfi§440
`1®“7l—X§fiy”fiy?4y€404H1€E%EE¢&C£K%§EntmOa
`
`®&%\%fiflfl0fibfl406\fifi?”¥l407fi§fiéfll®$fifi?§%ofl
`vv7IU7877;1j1078®E®4V¢71—XE3H5$E#EEEhfiny
`
`10
`
`—m\fififififlklll Vfivlm%flfibk\ffib5\“71—X§6V”fiy
`
`$¥yfi%fimbkfiy?xyfi®flm%%W%o
`Moog]
`
`fimfiv97§fi%%fi%fiflw®vinwm%nV—z7xmfiVF4VfiéhkI
`II—Vfi7§?47%NfX®fi®§fififififi%®fifi?—N%flfifiéCtwig
`
`1‘77?(7?N%X&fivV7§fi%@%t®fi®%&%é$%CEfiflfififiéo
`
`[%m®figl
`
`[001m
`
`$%m®%%@\77?+7?N#2tfivy?§fifi@fit®fi®fi%%fifi%kw
`
`@fifiéfififiacafi&%o
`[001M
`
`$fifiu‘mfifififi®%mmxofiméhéoE&%%fi%%u\mfifififi\am
`
`fifimfifiamefifi%%o
`
`[UUlH
`
`$%m%fiflwfimfi%k®WMT®m%\%%&6fi%#flméh%o
`
`CMOSIHWfifififlmE$EW
`
`3102::mma4i
`
`SiNx:$k&4$
`AWGC7D4§fi%7D—?477
`
`IIlivfiifi$®fififi®lIIfi®fiiRUVfi®fifibEéfiéhkllliv
`
`mamQW¥gw
`
`MQW1£$§¥fifi
`Rlzfififi
`SOI :f/ij'fl-V'4’yVJI/H5I
`
`Qi§¥#PE
`um:7/f?l374~7
`
`[0013]
`
`filflfifiti%t\$%mfl\7§?KT?N%X£fivV7§fi%E%E%Hf%
`
`%%EE%E%E?%E%T591\V—XWIAEWE77?47%E%%fi&fi%€
`
`51?v7t‘fifi77?x7§mfififiéfimwtfiffi%camgof\may—x
`
`Wingfi®é%&%mfi§2?v7a\m%v—xvihgfi®fifléht%fimfiv
`
`V7§fi%%fi%fimfi%X?v7fi%af\Wfi7fiijfifi%fifitfififivv7
`
`EmflfifikmfifiwfimfiTb%x7%N4X%%fib\mfi75f47?H4XMW
`
`Ev—xvlngfimfifi¢%fifi%fifi%\fim?%2?v7a‘mfi77iJ7?fi
`4Xfigmfiv—len%fi&%ffi%x%v7a\fi§77?47%N4X®EEfi
`
`¢—?vkgfimfifl¢%gam\fiEfivV7§fifiEfi%fii%fiE9—Evkgm
`
`E%$7b%47%fifizémbfiw52%v78%Efléfifiwfifi%o
`
`[001M
`
`v—xvlngfiofiméhk%fimfivngfifififiéfiflfiéaam$of\?
`
`—N%fimfifi%i%fi®fifit%%§%(7U—$¥U7fifl‘MQW&W)%$D%
`
`20
`
`30
`
`40
`
`50
`
`
`
`(6)
`
`JP 2016742575 A 2016. 3.31
`
`<Cafifi%%kb\fi§E<T%%fi%%?—fié£kBifivv7mfififiwf?—
`
`N$fiéfififi§tb\fififififififififlfifi£éofil®fifit$éfifiéflflf§
`
`atm‘3D%—N%E&E\fififif—NUVfikfi3574®flfififlfinf%oa
`
`hu\?HfififiwgwfuMQWfifififiyfiyfiflfifitwtb\va7§fi%m
`GTfitXfiLEflflfififivo$1®fifitiéfifiéflmf5Z&H\fififéfifl
`fi%fifiwtb~$4V?v723yP52P§fifit%fi%E%—fivVfi?ék&®
`
`Efi®?—NUVfi$%E;ofx%Em?—Nzflfimfiéo
`[001m
`
`$1®fififl$éfi$®fil®fl%fi%fififififi\§fifi%fl\$%%fi&flmbf
`
`xWE§—€vbfififififi7fifx7?fl4X%WOHH6X?v7%Efiéo
`[001m
`
`EPFafiEfliEfiUfiib'Cfi—fivv kfifliba7é?{7’7‘31§4x%fikbfibflr%i awagof‘
`7Uv7%v7$%fifififi%éa7&%47%N#2®§fifififiéhé%§fit<\
`
`7§?47?N42®$figfififi(fiy7)%fi$%£flfiiéaafififiéo
`[001M
`
`$1Qfifixmfil@fifi0fi1mimfifit;%fi%®%2®flfiaifi%%?H\
`
`fifififimxfifiiflmbf\Wig—Evbfifimfii7fi?¢7?NKZ%WOHH
`
`éX‘F“y7°PZEFE*§‘%o
`
`[001M
`
`fiEEflWLT?—€vFEWE77?(7?fi4XEWDHH%Catiof‘7U
`v7%v7%%#fififi%6c77?47?N4Z®Efifififiéh%fi£fifi<\77
`
`$¥7$NKZ®$E#EEE(Ny7)Eflfimhflfifi%iafififiéo
`[001m
`
`$1@fifixwfil@fifimifim%fififimwhfiw;éfi%®%3®W%fi%fi%
`
`fififixWfiV—Xfilhgfifi77ff7%Wfififi%fimfi5X?97fixWEV—
`
`zvlngfimlll VEfiE%fiEEfi%X?v7&§UD
`
`[002m
`
`V—XWIAEEKITI—Vfififi%fi§éfi%itfl\77?47?N42ENV
`
`v7§fi%m%amfififi%%fiéfi%tbwkfififimfifimfi£%o
`m021]
`
`m1@fifimfis@ififififi$%fifl®fi4®flfiflfifififififi‘WEv—Xfil
`
`M§fi®fifléflk%fiflfivV7$fifi%fi%fifii%x?vTaxfiflVHXWlA
`
`EEflfiflEhk$fiEfiElIlivfififi%fififiéfi%va7&%fio
`
`[002m
`
`Efifimxfifiahkb—fiwfiw%fi%®flwflafiuva—fi®fii&m%mfi
`%o:h6fi\$0EfififififlfiUfivVN~93V®%%%EL\Emkb\lba
`
`fia?n4x%%fiéfiaca&§<o
`[002m
`
`$1@fifiwfi4@ifififiugéfifi®%5aflfifififi%fifiu\fiEv—xvl
`
`MEWMII1—Vfififi%fi§éfiéX?wfa.fifiv—xamngmtmp_7g
`
`fifififibflihkgfifi¥fifig&%§¢%X?v7&§$\WEV—XWIAEWQ
`
`fiméhkfififififillI—Vfififi%fifl§éfiéva7fl\WEV—Xfilhg
`
`W®fifléht$fiiwfiF—Tgfifitfi®flihhflvv7E&EE¢%X?v7E
`
`awe:mgmfibflagm‘fi$fi®%m%%fi%fififi%o
`[002M
`
`m1@fifilmml@fifiQiEQifififi0flflbwg%fim®fi6@flfifiififi
`
`fifiuxfifififiwxM$¢—Rvhgfiu%£?7%47%m%x%mbfiwéfiu\
`
`fififiméhk7é?4igfifi%fitfivvigfifififiamtfitfifimzyabb
`
`EéME?&X?v7EfiL\fififiméht7b?47§fifififiafivv7§fififi
`
`fitQififi‘mfi7fiij?fifxmfifi®fififi%§o
`
`10
`
`20
`
`30
`
`40
`
`50
`
`
`
`(7)
`
`JP 2016742575 A 2016. 3.31
`
`[002M
`
`7¢?¥7&Ufivngfifififiifififi03V79FE%EE?§CEH\9*?
`
`vkgfiam7&?47?m42®fiflfimfimflmfifi&ochu¥fi&fi%mfi%o
`
`[002m
`
`$1@fififliS@ifififitiéfifi®%7®fl%fi¥fififififixWfifififijy
`
`§?FEM\flEifi%$fiétfi%fi%77?47?fi%Z®LfiEfiV7%EL\m
`
`%7&?47?N410:fid\WET¢?47?fiKX®Efi®EfiT%éG
`[002H
`
`fi—fvh%fifl®7§?47¥fi4zmgflfl\Y&?¢7?Nfzwifififly7
`®tb$fi#fi5é%éfiéiwfififikflflfifiitfififiéo
`roozm
`
`10
`
`$2®fifim$%t\$%m@\vaffififififia‘T7?47%N42®Efifi
`fififivyjfififififimfififié;5w\fi$fivy7§fi%E%EWDHHEhéT
`
`fif47?fl%2t%fi?%%$fifififi%91\WE7&?47?fi4XH\fifiéh
`k1II—Vfififi%fii§7fi?47gfifififi£‘EfifiéhklII—Vfififié
`
`E?%NvV7§fifififit®$éfiéfif%%$%@%wfii%o
`
`[002m
`
`mififi%mfivy7wau$wa—N$fi%Wfifi%hbfiflfififlmfi§a&u
`
`x?Hfi$fifi%fiék$fi®fifififi%§5(7UH$?U7%W\MQW%W)%W
`b%<zafifié%kb‘k§5<?%%fifi%%—KE%Z%Ofifififififl‘3D?
`~N%fi&8\%%fi?~NUVfiFfi§574%%fiT%%O:hfi\?~fififififl
`
`20
`
`MQWfifififiyfiyfiflfifitwkb\N997117Vfigfififl®7fitxfibfi
`uflfiftwofifififififi\fifiiéfiflfi%fifiwtb\$$V¥vfi137b52
`
`fi§fi%wfifimuf—HUyfiiéhbmfifiw%—NUyfiafim$offififiwf
`—K%W%E?%ofififid.$ééhtb—Wfi3fi6fifi®fi@flaflvvVD—fi
`
`@fifiéflfiiiécCh5@\$OE%K%KflR6N99N—93y®%%&fib\
`
`C®k®\$Dflfim?fi%2%%fiéfiézt%§<o
`[003m
`
`$2®%%E;%%$fimfiwfil®W%fi%fi%%fimi%%%m%fiififi77f
`
`(7?N42®:fifififiéhkfifi®fiyfibFgfifiafxfifi7bf47?fifx
`
`@ififififi???47?N4X®Efiwfifififi%\fifi®flyfiéhg&fib\fifi
`
`#fi®:y&b%E@\%$7b?47%fixxwim%$flgufiémy7%fifiéo
`
`m031]
`
`%$fififlfix7§?%7?N4Kmifififiy7®kb$fléfi%%%éfié2‘fi
`
`fiwflfimfifi5%g
`[003m
`
`$2®§%Xm%2®fifi®fi1®fifififiuxéfifififlfiwfizmflfitfifififi
`
`?@\fla7bfx7?N42fifiifivvigmfififimmbfiwgh%flfifi\fH
`
`N%EEE¢%G
`
`[003M
`
`f—Nfifiu‘7&?{7?N%X@BfivV7§fifififitfiEfifiéfié®mkE
`
`flfimfi%%u
`[003M
`
`$2@fifiwfiz@ififififii%%$fiflfi®%3QW$£$E$$FH~WE?—
`
`N%EM\%%7&%47%N42mfivvjfimfififimfiwffifiéhéo
`
`[003m
`
`7&?47%Nfzwfivv7gfifififiK?—NfifiéfififiéE\7&?47?N
`
`(XWENVV7Efififififififikfifi$flfififiéhéo
`
`[003m
`
`$2®fifimfi2Rfi$3®$fififikififiififi%®fi4®Hfifi$fififififi\
`
`30
`
`40
`
`50
`
`
`
`(8)
`
`JP 2016742575 A 2016. 3.31
`
`fifi?€5’*—N1§i§ci\
`
`3D?~—N%ififia’:fi'§‘%o
`
`[003M
`
`EDT—Nfifim\7&?¥7?N%ngflvv7§fi%fi%hfififiéf%®mk
`
`Efi$mfifi%o
`
`[003M
`$2@fifixfifiz@fifi®ifi®$fi%%®flmbw$%%$EEE®%503%R
`
`$fi$fifi@\%fiflvV7gfififi%u‘37Efifi:7&bfi—fié7§v$4>§
`&%Eb\fi$37®%Eu‘E¢y?v&2:yb5X%%E\fimyU:yt\$¥
`
`V?V§ZSVE§XFWE\%K81N\SiON\TaZOSE3$iC®IO£m
`19'65Zm
`[0039]
`
`10
`
`EX‘i¢4V?‘V¢XJ‘/}‘§XF¢%E%fum§—%E\ 7477”"4'7773‘A‘4X7b‘5fi‘y‘y
`ffififimfififi$flmfififlfifEéo
`
`[004m
`E2@fifiygfiz@fifiwifimfifififimfimflw;é%$%@%®%6@Wfifi
`
`$fififi?@\%%%EEE%M\MT®¥fi4X\Tabg‘fififim%\$%D—W
`
`&U%fi%va—a®10&fif%o
`
`MO41]
`
`fiofx%$fififiuxfi&flfl?é§fi®@%%fi$mm%fiflfifi%éo
`
`[004m
`fiswiéficcazzoa‘ ZF'éLEHHci‘ A?UV~:7XLC§§$§E&Z;I I I—Vfifi???4’
`
`7?NJZE¢RflEJV?V¢XHVF§Xkgfifikflfi®fififififi%of\fifi
`mfilu7fififififiy?xy5fiMI11—VMé—fiyLfi7éf4ffififiwv7
`
`Em%fifi&mifiémwflméh\$%Mfi‘%w\24?47%mfi%£5h%$fi
`
`flffiacgfi<$y?(yfi‘fi‘$lJfiiéh. %hb\5., I327w7h‘1“7:fi—7\§9V”X
`
`01E$fi3flfih‘$5ii\ 163$9fi‘5I—7“? kgffitfiafiéhéo
`
`[004m
`
`fismfifimiéfiéfifimfilmm%&%fi%%fi@\fiy%4yfldfififi$éo
`
`[004M
`
`$3@fififiiéfiéfifi®%2®mfit$fififififl\Efy?vafiyh51b
`
`WEvaflyfi%%o
`
`[004m
`
`$3@fifit;%%%fifi®%3®fl%t$fifi%fifl\¢4V?v&X%EH\Si
`
`N\SiON\Ta205\SiCR@1.9~2.4®fi@®fifi$%fifiéfl®%fi
`
`UDIDT‘EZDO
`
`[004m
`
`$3@fififiiafiéfifi®fi4®flfitfifififififi\fi§t3h%f—N$fiu\
`
`WflfigEféfiiEL‘
`
`I
`
`I I—VH‘£7’§'*?47*?‘H/{2605r-«71fi9/9yzféflfié‘éfizfltfib
`
`\fiy97III—Vfigfifi%fifififi%lII—Vfikflv97fifigfififiwfifi
`
`fififihéo
`
`[004M
`
`$3©fifim;é%éfifi®%5®fl%t%fifififim‘va7%—Nm$tfififi
`
`rfijbzfit—zfiuyfi‘fihr‘éc
`
`{004m
`
`$3@fifimxéfiéfifimfismmfitifififififl\fififim\fiy?4yfimm
`
`fifi®flbflafluva—fififi%fifii%®mmfléh%oEfibklnpiu7d
`
`\fififi&M:$€\$Nxzmfi®%%%fififl%o
`
`[004M
`
`$%%®%fifl\%EOIML«®III—Vfi7&?¥7®«?n§—:7xfiln
`
`fiy?fiyafififi%o$29Ihfi\NV?7%EE%%LT%$VOIIIiVfi?
`
`20
`
`30
`
`40
`
`50
`
`
`
`(9)
`
`JP 2016742575 A 2016. 3.31
`
`yim fiflfifififimflfiflfiéhffiiw C®E% EERHEQEEEEEEW
`
`\ XE§fl$fifitzi~~ni£fififi7facobaifiljfii‘éh’cgdzm
`
`[005m
`
`M/J7WEK%PTTHM%\%Wfl?%®kfififi%flfl?é EE\?HN%fi
`
`MEHEKEEDEE.fiEEEfi<7U—$¢UT Em MQWEWJNEEWETEE
`k®\fiEE<¢§ZEWTEEEEET—MEEEEEOififitfifiéhéifififi
`
`E&6?N41Eflmféikfi‘3D%—N%EKE\%%fif—NUVfibfififi7
`
`xfiflfifihE:kEflEmfi&ochE\z®$5&f—fiEEEEmTMQWEEfi
`fiyfiyfimEfiawkb\fivv71II—VEEEEAm77tXELFHWEFH
`
`wefifififififiéhé;fififiEEEEfiKXEWEEEZtfi\EEEEWWEEE
`
`fimkbx$(VEVEZSVF52fiEEEKEEWEE—NUV?E%REQEE®
`
`:RV-T‘¥V fiéhfcv
`?—1<')VVEQIEDCJ:EfiEEI/‘i‘—I\°EEIEELC’9*E>O EJ552552]: \
`—WKEHEEE®EEEEEUva—WQEEEHEEEEO Chafl\$bflfifi
`
`flflflfifiNvV&—Vay®fifi%fib\C®kb\$UE%K?N4X%%fiéfi%
`ctEE<o
`
`[EEQEEEEE]
`
`[005M
`
`EEEQEEEEEWEMTmflfiufiLTEEéhéo
`
`[E1]E1u~III—VE7%»L111%Nv97EEEEE120EEEEEC
`
`awiofbexf¥H4X110EEv7KEEEhéEEEEEIOOEEE7U
`V?E%fi?o
`
`[EZJEZE‘III*Vfi7fi?(7?NKZEEH%#W&&é%fi?—N2OO
`EEEEEEEEO
`
`[1213] Esaix w‘E/UV‘yé'I I I—VEEEE75-y 1~7w—1~®7’7%¢7‘Efifi3
`OlafivVfiEESI1t®E®EEEtEEEEfiEEH300EEEO
`
`[.411240:
`
`I
`
`I
`
`I Vfifimgi’a— ’7“? k'filnb: “71—X£2“‘?V” Efibcakb
`
`$§ EEKE®ELME4OOETEEEIETE
`
`[IS—(I 5 a] [5715 a be}: fiffikfiéwiétfifi? _v77&§élfifi‘%fi?£®§éia}<7y'fS O1
`Emio
`
`[ESbJESbM\EEEEEEEEEEEV7&flETéfiE0EEX?v7502
`Efifc
`
`[E5clfl5cH\EEEEK$%%%E%VTEEEEEHEQEEXEV75O3
`
`Efific
`
`[@5d]@5dfi~EEEEEEEEEEEV7%EE?%£E®EEX?W7504
`
`Efifio
`[ESeJESeM\EEEEEEEEEEEV7%EE?%EE®EEZ?V7505
`
`Efifio
`
`[ESfJESfE\EEEEE;&EEEEy7E %£?%fifi®%£2?y7506
`
`Efiio
`
`[ESgJESgE.EEEEEEEEEEEVfEEEEEEEmEEXEVis07
`EEO
`
`[E6]E6H\EEEEE;5$EEE6IMEEELtaqu—:7Zblnfiy
`
`$4V§QEE®EEGOO®EEZEv7601,603,BOSQEEEERED
`
`[I217] BEHWL Ei’fiififiufillifilix}~<?X§'!V7F%3F|mefc'7li\zfiV—?¥rVfi‘ODf‘c
`
`EQEE700®EEX%v7701,703®EEHEEEO
`[l8] IE8 aJEECFB b£i\ EEEELCEELEI (E8 a) LiU‘ffiIJmiIZl
`
`(I218 b) Lars
`
`UéVUSVEEflKfifiEhENvV7f—NéflfiLkfifi?—fl%fiflflfifl%fi
`
`6‘0
`
`[I29] IEQaEEU‘Sbci EffifififififizcfiésiNEE‘ODEPIfV—r‘beHV 1~7XF§
`
`EEEEEEEEEEfifimr—néfifénvij—AEEELKEET—n0WE
`
`10
`
`20
`
`30
`
`40
`
`50
`
`
`
`(10)
`
`JP 2016742575 A 2016. 3.31
`
`H&%¢fl%fl%fib\H9afl$lfifi900aéfib\E9bflWfi?—H®%2fi
`
`£900b%fi?0
`
`[HIOJEIOafiUIObfl\$EEEE$%7&T47?—K(E10a)lfifi
`
`997?HN(E10b)@flhfi%flflbfi?HM%%(EA%§JDH9#E9U3
`
`y)®flfi&fiifl%fléfifio
`[II 11.1 102k ;‘—)<7?J§;E‘V;Lb—30rC®iC$IJFHEh%fié®7—’7§L4’jlgic
`
`fiwffifi§t<fiméhaai‘%—N?4v7&fi¢é%fi¥fi4211oo&fifi
`fl%@%fi¢o
`
`[a121g12u\?—Nfi%vib—amkbuflméhéfi#®77%47lEE
`:Fo’b‘ffifiifit:<fffififiéh€>t%.
`fir—fiCDI‘JPiaisbi%f—2<%Efi’6$$fiififizrz
`1200€fi¢flfi®ififn
`
`10
`
`[E131E13M\ifififim$%?—Nfifivv7%EE$wf%fiéh5E%\g
`
`fifififi?—N%4v7&fif6$fi$fi421300%fififlfifléfifio
`
`[EI4JH14M\£fififiw;%?—fififivv7wgfifiwfflfiéh%k%\f
`
`—fl@1yHmfiwégfi%%E%fifi%%%%m4z1400%fififlwfl%fifio
`
`[E15]!15a&615b@\hfifl(fl15a)&@WE@CE15bDE$H%
`
`fifififim;%¢xy%vfizuybaxb§mfiaIII—Vt®fi®%§%flfiufi
`
`atbfivvii—flmfiHéfififimmf—N%flfit%%fi?fixx1500%fii
`
`w%@%fiio
`
`[E161E16M\H15Kfiéhé$fi¥fixx1500®t&®lh%fifitfi€
`aTE1%~Pa:fi®flh§fifitfi¢éTE0%~Ft®fi®%fifi$fi%fi¢flw
`
`@Efifio
`
`[fim&$mfi&tbwfifil
`
`[005u
`
`MT®%HE%W?M.%®—$%fiflbx$fififi$fléhfiéfifimfifififlfim
`
`ibfiéméfififlfifiafién%o@mfifififlméhf%$<\fififlxmmflWE
`
`Efifififi®fiflbaflwfi%cta<fimaéatfiflfiénéofiof\mfimfim
`fififimxmfifififi%fifii5héfi%fifi<\$fifi®fififi%fibt%fifimib
`
`fii€m%o
`moss]
`
`CCMfifiEh%?NJXRfiEflH\7&?47?N¥X&3fiv97fifififimg
`
`fl<£®fifiof%$wofifiéhéfiflwflfibffibhéflxybflfififi&%%fi
`
`¢%;5fifiéh%fifl¢%?fi422uv2%Lmomf£itflbfifi5%gwffi
`
`0‘Efi%®fifi%£05%omzflx%E®EEX?v7fifiwéh%%é\%%1:
`
`vbfiflfifififimwfifixmflfiéhfmfi<f%‘flmfié?fifzfi‘%%5ha
`fiffiX?v7°7£%T-T§‘6fcb®1:~yEFEELTECMDO FEEL?“ catcfifiiflfi‘éhzugffl
`
`tfi6§fififi®%fifi‘%fl®fibfifiw%fi\Ewnfifiébfiflfifi£éiafifl
`flénéo
`
`[005M
`
`icmfiwéh%fifififl?fidxfiafififi?v7&%fifiétb$fiéhf%iw
`
`o fifififiémé?fi‘%xflfi~‘/X?AH‘ ‘17}917ili‘ykBiU‘A—F‘WITJT—vb
`
`éfibffiiwofiméhé?fifxfifivX%bfl\$EE%&G/Rflfivvjéfi
`
`LT$$<\%Efimwfiofflfiéhf%imgflifi\Efifl\fifififififi\7f
`
`U5$fifl%\3fl%%$fifl%\fifl%\%%UE%&U/XQ$ENVV7ELT%
`
`Eéfvttibu
`
`[005m
`
`MT®%M%%%FH\III—V&%E&flmbkfiflfifi?fl4zfifiméh%o
`
`III—VHE%%¥§%H\WZH\AI\Ga\Intgmlllfifiik\mifl
`
`\N\P\As\sbaawvfifiit%fififi%atu$ofmfiéhfggwoan
`
`m\ifimflfimfifiiuszWI2M®fifififi$ébfi%%t5b‘fi$§£t£
`
`20
`
`30
`
`40
`
`50
`
`
`
`(11)
`
`JP 2016742575 A 2016. 3.31
`
`03633 155%5<GaAs\ InP\ GaPEECFGaN'E‘BEEJo fifiEhEJi-‘WWJ'FQ‘
`
`I
`
`nPfiIII—Vfi%§®#flt&6fiyfi—EbfflfiéhéoInPQflfiflifié
`
`—WT&D‘WZfl\GaAs\GaPRfiGaNfiE\IIIEEiEVfiEikQfl
`
`mflnb®m$fib&fiikflmmfifi%éo
`
`[005M
`
`UT®%%TQ\IE?$V¥W(epi)%®fi§/fifl§fi6fi%éflmbkfifi
`Rfi?fixxfififiéhéo§fiu\f/X—fiQfiflfiBfi74finfl—a®fi@®g
`EQWEQET&%Ofifimfifi%fi$fézauit\fififiétfifihéogfild
`
`mfiwfifiéhhgmiufifiwg&fifiiéh®®Mhmfim%%fifigawwhéo
`“fim”tfifififififlfifi§§fiwfiflfifififififififi+f/fi—fi®fifimfigm
`
`10
`
`EEEflW?%nIE3$V¥W€fix%%EWR®%%fi—ND¥¥®EE&E?nf
`
`—Nb4%fiik\169$9%w(epi)fixm:6§$9%»%aWfihéom<
`ofimmfifiu\fifiéhkflfimgfififififiwfifiélomwfitfi%&fifiéfifi
`
`fi—Nb4%%%fli%ctfifi%éflf%$woI59$9%wfifi‘fififlflfifii
`Ufi—fiflgfififlufififiéflf%iwogfiflfifl£bffifiiékw‘fifiéhk
`
`fiafifi%%w%¢éluk®%fifimwfliénfaiwc
`
`[005H
`
`HF®fi%T@\AWGEflmLtfiEKfi?N%Xfififiéhéo7D4§fi%§b
`
`H?xyfifixfiEfi%§ECWDM)yz?bfi8®%$%mfiwéfivw%7uéfi
`
`RH?VW%7b7fitLfflméhfiéfififi%fifiéoAWGH\§&®EE%$#
`0%774NE§EH%T&D\:hfi&0\fiivFU~7®EEfiEéfiMEfi%o
`
`chm\vu:ygmimF—7&G#F—vatEEfifiiécauxcfflfié
`h5&$fi%fifififi%of%imo
`
`[005M
`
`MT®fiWTfiwMQW%flmfi%fifi&6?N%XfififiéhéoMQWH\ibg
`WNVF$%97WE®29®NU7fifi®fififiihk\WZfi\%10nm®fiE&
`
`E®k§fiWNW¢¥§WWE®E%fi?éfiET%60Cflflxfi¥kfi$—w®fl%
`
`E%@L\E%I%W¥—%E¥mbxfiflmfi1%W¥—Efiwfbbfibhfiwo
`
`{005m
`
`E5a)~5g)@\$fififim;57b?47?N42&Uflv97§fifififi&fi
`fi%%$fi@%%%fifi%fifl®flflx%v75o1.502.503.504.505
`
`,506,507&fi30
`
`[006M
`
`E5a~5gfi§bquK5PT$Ofifififiméhé$5fi\£fifiEflgfififl
`T&%Uov—xvlngm514t70?47§fi%%fi510,511,512%fi
`
`$L501\7??47§fifi%%510,511,512Efifimm%£?ézati
`
`3T\V—XUINEWS14®d$522§fiflb502‘V—Xfiln%fi514®
`
`fifléhfi$fi522mfivv7§fifififi531,532,533%fifib503\7
`
`fi?¥7$fi%%fi510,511,512&Nv97§fi%%fi531,532,53
`
`3k®$fififi7b¥47¥fi42550éfifib.7b?4i?fi42550fiv—2
`
`Wingfi514mfififi%fifi&fib\7&?47?fi%2550#6v—Xfiihg
`
`fi514%@£L505\7&%47?N{25somfimfia—Evbgmsszmfi
`
`fiiéififixfivV7gfi%Efi%fifiéé—?vFfifi562E7??47?N¥X
`
`550%WDHU%5060$EEfi612fi\9—5VFEW562E77fJ7?H
`4X550imbwwa®mflm6003hf%;moE5722fi\a—Evhgfis
`
`6 2c:77?47‘-?1\‘4X5 50IEHE'OHH%®LC$UJ%$$IT£$L\O v—Xvingfli
`
`514K?b?47gfiflfifi510,511,512&fifi?5:£501fl\V—X
`blngfi514w1II—VfififlEflEéfi§ca%%hfi%gwov—XWIAE
`
`20
`
`30
`
`40
`
`W514®§mémt%fi522ufivv7§fifififi531,532,533Efi%€
`%Ct503fi\V—Xfiihgfi5l4QEméhkfifi522EIIIiVfififi%
`
`50
`
`
`
`(12)
`
`JP 2016742575 A 2016. 3.31
`
`fiflfiéfif£$woV—Xfilhfifi514tll1*VfififiEflE5fi%Cafix
`
`V—Xrblngfli514ih: F—iEfiifibcifibflihfcgii¥fllfilgééfifi1/1653:
`
`<\V—X?ln§fi514®fifléht$fi522tlII*Vflfifi&fifl§éfié
`
`cau\VH271n§fi514®§$éhtfifi(522)imfiFHTEfiEmflb
`
`flihfcfivi/ffiiifiEEL/Té)ibm fiéfifiifcix fi—fiw bEtfiE‘1’77’r47-F‘I‘x‘4’
`7R3~3HJ£DHU§§ML fififiéhf‘c777‘475gfiflfifiifiafivV7§3§E§$fiifia®ifiic
`
`#iEODHV517}‘E54 1, 543EHEE504LT£$<‘ fififiéhfc7bf47i$fl§
`
`fififiafivvffimfififitmififl\7&f47?fi%X®Efi®EfiT%éefifi
`
`may§7hE541,543@\LE2$fi#E?277f47%N42550®ifi
`
`EfiV7543%Ebw7??(7?fi4x®ififiw77?47?fi4X®Efi®EW
`TEE/Em
`
`10
`
`mosll
`
`E53M\V—Xfilhgfi514K77?47§fi%fi%510,511,512E
`
`fim¢%%1fl@2?v7501%fi?07&f47%m%%fi%fififiéaam\flz
`@\V—Xfilhgfi514wlII—Vfififiéfifiéfiéitfliof‘fififififi
`
`ELC$QT\ T7?47%?§Efi%ififéfififiéfi%calziofifiéhfinkmo 777-?
`
`¥7§fififififixn—InPtEflEfifiéhfifilRflTfiESl2‘79?%7§
`
`EE?W#EEELT%&E%§%22M$EESI1\&3p*InP&EbBfifié
`h%%32@ifi§510%fi8%®?%or%;mo:hEmE512,511,51
`oci‘ In Paabeifififiéhav—xvlngm514:2H20Hbi5héo UU—XE
`
`20
`
`513fixV~Xfilfl§fi514E77?47§fifififi510,511,512%W
`
`DHHéGEflmEhT£$wo
`
`[006m
`
`E5b@\7&247%Wfififi2fimfiwfifiiéatm$of\v—lengm
`
`@#$Efifl?%$2flfll?v7502%fiio@ffixHSatfibffiwEhki
`
`5%fi1E512\%2E511&3fi3E510%3877?47§fl%fifi®lv%
`
`Vfix5347?¥V§Rfi9:yfitfiéitfifiééoESbQWTfl\fifiHUU
`
`—ZE5|3%§Efiwofl®WTfi\%ffiUU—ZE513E§8%®T$¢T%J
`
`wofimma%£MEX?97502®%\77i¢7§w%%fi510,511,51
`275R $11U7’5 2 2‘ 1732391?“ V—X'fil}\§$fi5 1 4®§méhfcfiflifibéffiéi
`
`30
`
`Eh\v—xwlngfi5140%21U7524b9fififiéham0ESbfiu\fi
`
`13:1)7’5 2 263%2107’5 2 AHEEIEL‘ Chuck'm vazfilAEWS 1 4037’
`
`fifxffififiwgmmmwxkfixfxfifiyF%%fi¢%°LbbfifiB\WZfl\
`
`V—Xfilngfi514i®7§?¥7§fi%fi%510,511,512®Efi®$é
`
`taxb‘fi/I’TRGiH‘VFfifimiiflODthdefifiEfifilfififiéééo
`[006m
`
`ESCM‘v—Zvlngm514®fifléhk%fis22mfivv7fififififiéfi
`
`fifi%%3mfiva7503%fifioNv§7§fifififi%fififi%cafl\mifi\
`
`v—zvlngfi514®Efl§hk$fi522iulII—Vfififi%fififif%ca
`
`Exofwfifififififigwgbfiv??§&fififi%fifi§éfiéitfiiofifié
`h'flbdflna
`
`[006M
`
`fi937gfiflfififl\Wifl\InPCfiF—7)®Bfifiéh%%12fiTflE5
`
`33‘”vv7(fli)Ettffifiéfl%%2Xfl$fiE532~EUWRfi\In?
`
`(JEN—7°) fiwgfififiéhéEBXflJflfiES 3 1&‘3‘35’2503'6fi—9'CPEszo C1150)
`
`@533.532.531M\VFXWIMEWS14®§fl3flk$fi522fl$0fi
`
`théoUU—2E513@\v—leAgm514quvfigfi%fifi53&
`
`532,531EW0HH50EflW3hTfiiWQ
`[006m
`
`7&247fififififi510.511,512%ifi?§$fi524®?fi®fiméh
`
`40
`
`50
`
`
`
`(13)
`
`JP 2016742575 A 2016. 3.31
`
`£77 522EM7/7€fi%%3533
`
`532.531Efifi?%CEE$OT\7
`
`77¢77n4x550€fim757 77(7gmfififiafivv7gfifififitwfié
`
`fifififléh%0777477m%xssom\v—xfiingm514mfim7%gfi
`
`&\Efi®fifi®ifia%fi?5o
`
`[006M
`
`ISdGL 7774’77‘2fl‘4’2550EC753E03Jfl§ODEJ77I~E541 543F53H32
`
`ONE)“ F—EV7‘E8¢:$oTJi\iE®Lfi®:y77HES41, 54303177117543
`
`Eflbflfl74mflx7v750377fofifl®ifi®fly777E54l,543%
`
`WUHU%C&fi\fifififififififly77FEENV7E%K?%HEE$OT\77
`
`7(77fi4K550fifififiy77%E%fi%?éiafiiof%fiéhf%iboL
`
`fi®:y77FE®%fibflafifiS4lfi\#F—7InGaAs/1nPgfigfifl
`
`fihf$$woifi®fly77¥g®fibflafifi543fi‘F—TInGaAs/In
`
`PEbwgfiéfiiéhf%¢kmo :y77bE03’fiEifii5 416$ zfi‘yv7‘ifififlfifrfifi503iffilé
`
`SSIEEUWEbgfifiéflT%$v C®$57MEM \ fifi®flV77bE541
`
`,543073777Eé$03fi560“Ewifiwjy77bg541,543mm
`DHH%\777¥77NKX550fithB®Eéfifiéc
`
`[006H
`
`E5e@\mifl\InP7—7yEfi—7yfifivU—Xféfifimguf\777
`
`(7‘77“;{4’25501w67-«2r71ngm514%5777675mfl27v7505227
`
`70%7%£u\777477N%z55087—x71n%fisl4awfikmbflw
`621ch U~XE5 1 3&Kérififi‘zéaabcazo'67fiéhffid:<\ Enicdzrx 777
`
`(77N4x550kfiv—271Agm514®fiy7477EUU—X7éo
`woes]
`
`[215fcén7—7/77175bzc‘“’774771\42550?&f§§hb 7’774’77‘
`Jfixrxssoawififfiér— 77%31‘7562iifirfilfl'fiifi i:\7-— 7y1~§é$lisszcc
`
`777477fi‘47‘55OEHEDHU§$6M£¥X7975063377:, 7—7‘vkgfli
`
`562m\777477fi¥255ommofiwamédéfivv7%fi%fi%%fibf
`
`$$bu17§fifitnfiiy7zry7E5 6 163‘ 7.774772%:{25 SOfiHEDHHEh???
`
`$$V7¥V7E561®7—77FEW562EW0HUBh%O
`[0069]
`
`7—7“v1~§1fi562b:7 774772<¥X5507f§§37%cabi‘ ISiCEEL/‘C’ffi
`
`ifl‘éhéififiLl—‘Fa'flfilflfi7lh7éflfifibfz'7lnfiy 4V7: 00 RfliITECBEI/E‘
`fifl3h%$5filaxFVX§VT%flfiLkWI:fi‘T /77 00%8Qflfi%
`Mflfififiiofifiéhf%$wo
`
`[007m
`
`Eng\777477N7X550&67~7VFEW562%7767fiXZ7fi
`@77677mflz7975077770E533,532,541@\7—N%£&%
`77%;573y73hffigm0
`
`MO71]
`
`IBCi-, fiffifiif‘flifili5$F§I§flfl7lnfigflfiqLTCA7Uy—l72‘7mhfli‘y7fl‘zfT/
`
`7®k@®fiE600®%EX7v7601.603,605®fl%E&770
`
`[007m
`
`Elflflxfizv'ffi O 1 Tfiix 7774’77‘H‘4’X6 1 BEfifiév—XfilAEWG
`
`10fi\Wifi\V—XWIMEWB10Efifibfib77?¥7¥fi%1®%l@fifi
`¢fi7fi612Kfibfifi6hé$5E—%MK£V74V7E618&flmfiétEE
`
`$OT‘$EEfi612K-%WE$V?¥VV€fl%O%flbB~fiEflflX7776
`
`ozmfiwf i®7lnwgfi itbg v—lengmalofi Iv7y7\
`
`774/7(y 778E;91/:/73h% fisflflx7y76031uifizmfi
`
`10
`
`20
`
`30
`
`40
`
`7’3‘7— X712x§$fi510f3\E‘/£V731’Lfc%l®fi&lifi®7 774771‘i/{203%:
`
`207%7— 77FEW614EmUHHEh\7EEW6127UU—Xéhéia
`
`50
`
`
`
`(14)
`
`JP 2016742575 A 2016. 3.31
`
`\77?47¥N4X616&E?%$%%W612#9—?vbgfifil4Efi7?#
`
`yfi‘éhéo :037713—fbi‘ IBLCfiEhéififiATDV—LJ Zfififiliflfiflfif
`
`fifi%éoC®%fi\7&?47?N%X®%1Qfifififi2®fififilflflva76
`
`O1b9$3flfl2fv760SEUHHZEhéfigfifiw$5K\IE?$V#»E
`
`$HfifiéhfiwofiflfafifiE/v?622flxWlhfiy?4V§®WE%EU§
`fifc’zlflo
`
`[007M
`
`fiof\C®fi$fi\fiv?7§fifi%fiflflfié@IAEA?U§—:71Efi7?
`
`{yfiéhéllI—Vfi7§%47?N#Z®%®%®%%éwflfléhéfiflf—N
`E$H%fi99f§fi%®flm%mfitifioh4fi7z—VV279—Vfix#fiWfi
`WIMfiV?‘4‘/fi‘bcflfifiéa‘lf%;wn {”a‘wi‘ TEEPXJD—j’v FiC$03F$sz47
`
`10
`
`EWE$€EIII—Vfi7—fiy%@fl?%kb®fi%600%%H?5CE%W%E
`
`Téod?D§—:7X$%Kfiméhét\fiE600fi\$fiflflfiln§fi&flfi
`
`LTII*V%%EE?%E%®#W%%m?%O
`[007M
`
`FFFHEJMEWIM%$IJJEHLT:’\§*uV—:7’Kr7lnflf‘/-?4V7°®fcw®MI$X-?97
`
`601,603,605fi\E5fmfibrifléhfigatv—xfilngm514b
`afi—Evkgfis62m7&%47?n%x550%%%fi§®mflméhf%;mo
`
`[007m
`
`I7ci‘ ilfifiéifibzszaI-EXbvxfinyflFHL/fcfilnfli‘yfflrVfi‘ODiztisbt’Dfi
`
`20
`
`$700®%EX?v7701,703®mME%fi?o
`
`{007m
`
`filflflX?97701fifi\V—Xfilngfi7IOEfiWLfiVTfi?47?H¥
`
`X7160%10Efi192FVZfiy7722KWDHHBHé$5E\I9X}?X
`
`9y7722fi\7b?x7?fi42716%fifiév—xa1ngm71om#fiWt
`
`mbfiwem%a77%x7?fi42716&v—X6Ingfi71OMfiy?4yV?
`
`@fifig718fi\1v%y5t2m;anU—Xéhéo§3$1Mfiz%v770
`1®%%E bfx 7&?47fi“‘2§4’27 I 693‘ 152b7X5ly7°7 2 2L:#B%FE4JLCH\Z
`
`DHHEm\$2Mflzfv77ozm$wfa—Evbgm7lzwgfi7osflfifi
`£Dxfififim\liXfi723y7722fiUU—Zéhéo:077u—%fl\fl7
`
`30
`
`tcfiEhZééziEA?uV—:7X$f§wflfifififfi&fiz}a%o amigér‘ ‘J—lengfli
`
`7lomfiwbfiw7b%47%fixz7lamfilwfimfilmflzfv7701bé
`
`$2flfl2?977OZEEEKH%%§W&DE&\IE?$V¥WW$HEEEHK
`
`wofiofxfifiE/v%720uxvlnfiy?4yfi®fi%%$Ué@fimo
`
`[007M
`fiEo'Cx CODEficin 1<~yv7i§ffiflfi%fifififxé@I2\LCA?U§~:7ZECIRV7‘3
`
`¥VfiéflélII*Vfi77?¥7?N%Z®E®%®%fiéhflfiéh%fifif—N
`baiscj'ézfiyyj‘iéifiEfiODfiJHWEEIfiEbafiéo zvr’fij'er—«z/X—zywyb‘k :7an
`
`Egfiflméflffiiwo%hE\%V1w—79FE$O$EEIII—Vfi§—£V
`&#id?xfi§fifi%fififlfi§fi6ca%fl%tfiéoA?uy—:7X%%Efim
`
`40
`
`Eh§t%\fiE700d\¢E“flfi"tL115Z%?X§V7722&fl%LTI
`
`II—Vfi%fifl?%fifl®ém%fififiéo
`[007M
`
`Wlnfiy¥¢yfi®kbmlfixb72§y7%flm?%m?nV—:729Infi
`
`V?4V3®tb®flfl2?v7701,702fl‘fl5fmfibfifléht;5t\
`v—Xlfilnfiifi514h‘Bfl—E‘vkfifii562%;???»{77‘Vfi425507a'fiflfi‘
`
`Féojczfflfij’éh'tfiiwo
`
`[007M
`
`E8afi§8bfl\$fifififi$éififl(H8a)RGWfiH(H8b)EEWTV
`
`U37§fi%tfiééh6flvy7%—N%flmbt%fi%—N800%fitflfig&fi
`
`50
`
`
`
`(15)
`
`JP 2016742575 A 2016. 3.31
`
`We
`
`[008m
`
`I5 a~5 gbzfifibfifléhé;5t\ zfi‘yi/‘j‘fiifiE’é‘iS‘fiIn (5—3"; LEW
`562)E1II—V%?N{X(7??¥7?N{15503%$V?%V5L\fH
`
`H&Wfi?%kb®u%®flfl®%afififififiaH83R38btflfifififiéhé$
`5&3733'Cz632b‘0
`
`m081]
`
`WrfiflT—fiSOOCL 7?“?4’71'17’80 IEU‘NV‘VTIUTSO 3%71‘511‘550 7’
`
`7f¥7l07801H\n—InPfiEWBfifiEh%%3E8IUQLEEEEEh
`
`k§§§¥fifigfig®EZE81sfiifitmfiéh.p—InPtEbEfifiéh6
`filEB 1 ZEELT‘BJUDO szffi’fiflfict ISiCEfiL/‘Cifl‘éhfc77fi‘wr7‘fififiis
`
`Olwfiffibafiflfibfgazwo
`m082]
`
`ff—Nci‘ $1$§f8033fl10¢$2§fi3fi803b%fibf%d:bw<vi/7IU780
`
`3fififiéh%ova7IU7803®%l%fi803afl‘i—InPfiEfiEfifi
`
`EhéfilESBOfififilg810®kfi®¥2g822éfibf%$<\$2E82
`
`zcillfilfizfivi/jfié:LTfiZEfiéhT£$tflo ChEUDEfiDfiEEfli\
`
`IStCBE‘L/Tiifljé
`
`hfcfi‘yi/jfififiiii 1
`
`IGEIflDCNFSL/TZEJZWD
`
`Moss]
`
`fivfl7lU7803®¥2$fi803bM\fifi$éfifif69Uflygfi826®
`:fibcfiafi’émfcfilfi‘fififiaosafDfiZESZZUJfififéfiafSEOJTZSQ'CaEgiwo
`
`m084]
`
`Egafifigbm\$Efifim;&siNtEmey?va:ybfixb@m%m
`
`Efiéhkfigfifiwf—fiéfiiéfivv7?—N&flmLk%%?—N900a,9
`
`OObQWfiE%E?H%EEfiLWHgaflfifif—fi®$lfifi9003%fiL\H
`
`9bcifififi?—J€®%2fiifi900b&fiio
`
`[008M
`
`fififi&flfi¢éaamik\mfiyU3yE%%§af%cafi<\¢4y$v7x
`
`:ykazb%fi%(siNfiE):®A?uV—:72w%%énk111—vfi77
`
`$47®fi®EEWtfifiEfibk?—N&Wfimfi5cChfl\flgtfiéhéi5m
`
`\ 2W~‘/ffifflwaccisb‘%fiE7§fi®~7~—Ifi7&fijfifi‘7§c:tiC$ofififié¢i§o
`
`m086]
`
`$1fifim;%fifl%—N900afi\T?%47:U?901&3fiv971U79
`
`oséfii'éo 7&“7’47’107’90152L n—InPfiEb‘BfiéEfiiéth%3E910
`
`QLEEMEEHK§EE¥#FE&E®$2E9lswifitmfiéhkp—InPfi
`Efi*6fi3fii$h&%ll§912%Ebfémklflo b4’fi4fiafifizh lsicfiabfiizfiéfihi‘c
`
`77?¥7%fi301®$fi£fimbf%iwo
`
`MOS?)
`
`?—fim\InP(#F—7)t5b6$fiéh%%3%924a®ifi®mfifivv
`
`7Ekbffifi3h5$2§922aoifi®1np(#F—7)fi8bgfifiéh%%
`1E920aEfiUNvV7IU7903fififléh%aChB®E®EEM\E3EE
`
`bfifléhkfivvjfifi31lwfififififibf£$mo300E920a,922
`
`a,924au\SiN\SiON\Ta2052d310t8b6%fléh%$4y?
`
`v§22y%9xb§fifigzsimmfiénéo
`Moss]
`
`fiZfifim$%fifi?FN900bfl\7&f47lU7901k3Nv97IU79
`
`03%fi3%07fi?¥71U?901H\n—InPt8#B%&$h%%3EQIO
`
`m:fimfi%éhk§$§¥#fi%fi£m%2%9lamtfiwmfiéhtp—Inpfi
`Efa‘BfiifiiéméEIEQ 1 2%Ebffickwo wrvwafim IBECEEL/Tifljéhf:
`
`7b?»{7‘fififii30loiffibafimbf=aimo
`
`10
`
`20
`
`30
`
`40
`
`50
`
`
`
`(16)
`
`JP 2016742575 A 2016. 3.31
`
`m089]
`
`?—Nm\fiZEQ22btfiUWEflgfifiéhf%$W%4E922c®ifi®fi
`
`1E920btfibWEbBfifiéhf§iw$3E92ocmifimmfiflvviga
`
`LT%&3&%%2E922b®LH®InP(#FHfJfiEbafifiéh6%1E9
`
`20béfibféimfivvflUTQ03E$fiéh%o4D®E920b\922b
`‘920c\922cfl\SiN\SiON\Ta205RMSiCEE#B%fiEhé
`
`¢4y?v¢2:y%51%§fi%92aimmfiéhfégwc
`[009m
`
`@9afifiéhéfifif—NBUUamfilfififlEfiflH?—NUV§T%éfi\g
`9bmiéh%%fl?—Ngoob®$2fifim$fififi%—fluyfi\fitbfix&%
`
`10
`
`Wfi%én
`
`mogll
`
`Egafifigbu\¢JV?V&X:Vb5xh§fifim«?my—:7xmfifiéh
`
`klII*V%E$U%T&?47&6NvV7§fifi%¢fliékbfifl§%flfii%
`
`:tfi\3D?—R%fifi8®%%fi?—NUy5b£6574fiflfiéhéctémfi
`
`E?%oChfl\CD;5&?—NEEEEWTHMQWEfififiVfiVVflfififiwfi
`bxfivvjllI—Vfi%m%«®7btxtbmflfifififlwofififimflflflfim
`
`\fififi6wmfikfitmt&\mxy?va:y%ixbfifi%«®%fiwtf—fi
`
`Uyfimkbmfifi®?mfivV5§%E$Ok£fiw?afl%%fifiéc5%flfimfi
`
`$0
`
`wo92]
`
`EIOaKGIObfl‘ififlufifiéfifififit$§77?¢7f—fi(Elea)
`
`Efifivv7?—N(E10b)@flhb%flmbtf—fi$fl(EA%91b—9bg
`
`yu:v)mflfi&fi¢fl%fl%fifio
`
`[009M
`
`E10a@\7§?47§fi%1004fi?—fi%filOOl®EéWE£é#flE®
`
`#—X%fiL\HIObm\fivvfgfifilooafif—Nfifiloolw7af47
`
`Efifil004®Tfiw£5fifiEQ&—X&fiioflfim?—N%%mowr\?—N
`
`$fi1001m31§fi§1002®TfiEE%0va7%fi%1006mwEsmfi
`
`Lfifléhtfivvjfifi31lmfifiwfioffifiéhf%gmo7b?47§fifi
`
`10 0 40L l30:B§LTLifi€Sflf:7&-‘r‘47‘fii§23 O IODEELCR‘éoTfiEZEhTfi
`
`xwoElobMfiEh5?HNfififl\E5a~5gwfibfifléhkfifiugbfl
`fiéflf£$wo
`
`Mo94]
`
`H10a£$éfifi§%flmbtwf—N%%M\Ellfifilztfibffi