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Inventors

Merritt Funk Megan Doppel Kazuki Moyama Chelsea DuBose Justin Moses

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Tokyo Electron Limited

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TOKYO ELECTRON LIMITED

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METHODS AND SYSTEMS FOR CONTROLLING PLASMA PERFORMANCE

15/880,435 | U.S. Patent Application

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Location ELECTRONIC

Filed Jan. 25, 2018

Examiner SRINIVAS SATHIRAJU

Class 315

Art Group 2844

Patent No. 10,510,512

Case Type Utility - 315/111210

Status Patented Case

Child PCT/US19/14396 Published

Last Updated: 3 years, 10 months ago

Date	#	Transaction
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METHODS AND SYSTEMS FOR CONTROLLING PLASMA PERFORMANCE

15/880,435 | U.S. Patent Application

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