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METHODS OF MANUFACTURING LARGE-AREA SPUTTERING TARGETS USING INTERLOCKING JOINTS

15/42,987 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 12, 2016
Examiner BRIAN W JENNISON
Class 219
Art Group 3742
Patent No. 9,564,299
Case Type Utility - 219/073210
Status Patented Case
Parent 14/793,931 Patented
Parent 13/628,090 Patented
Parent 61/540,644 Expired
Parent 61/648,333 Expired
Last Updated: 4 years, 9 months ago
Date # Transaction