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Inventors

Shinji Himori Norikazu Yamada Takeshi Ohse

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Tokyo Electron Limited

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TOKYO ELECTRON LIMITED

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CONNECTION CONTROL METHOD

15/391,108 | U.S. Patent Application

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Location ELECTRONIC

Filed Dec. 27, 2016

Examiner LAN VINH

Class 216

Art Group 1713

Patent No. 10,032,611

Case Type Utility - 216/067000

Status Patented Case

Parent 13/434,989 Abandoned

Parent 61/477,634 Expired

Child 2011-079733

Last Updated: 5 years ago

Date	#	Transaction
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15/391,108 | U.S. Patent Application

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