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Inventors

Shu-Fang Chen Lin-Hung Shiu Hung-Chung Chien Hung-Chang Hsieh

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Taiwan Semiconductor Manufacturing Co., Ltd.

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD

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LITHOGRAPHY METHOD WITH SURFACE MODIFICATION LAYER

15/355,359 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 18, 2016

Examiner KATHLEEN DUDA

Class 430

Art Group 1737

Patent No. 10,101,659

Case Type Utility - 430/322000

Status Patented Case

Parent 62/374,616 Expired

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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LITHOGRAPHY METHOD WITH SURFACE MODIFICATION LAYER

15/355,359 | U.S. Patent Application

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