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Inventors

Takashi YOSHII Akira IKEDA Satoshi WATANABE Yoshio KAWAI Yukio INAZUKI Toyohisa SAKURADA Hideo KANEKO

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SHIN-ETSU CHEMICAL CO., LTD.

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PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK BLANK

15/284,098 | U.S. Patent Application

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Location ELECTRONIC

Filed Oct. 3, 2016

Examiner CHRISTOPHER G YOUNG

Class 430

Art Group 1721

Patent No. 9,709,885

Case Type Utility - 430/005000

Status Patented Case

Parent 14/489,019 Patented

Child 2014-164960

Child 2014-159610

Child 2013-198585

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK BLANK

15/284,098 | U.S. Patent Application

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