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ROBERT B. FINLAY BRIAN CONERNEY

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GLOBALFOUNDRIES INC.

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GAS FLOW PROCESS CONTROL SYSTEM AND METHOD USING CRYSTAL MICROBALANCE(S)

15/272,924 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 22, 2016

Examiner XIAOMING LIU

Class 438

Art Group 2812

Patent No. 10,256,126

Case Type Utility - 438/005000

Status Patented Case

Last Updated: 4 years, 8 months ago

Date	#	Transaction
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GAS FLOW PROCESS CONTROL SYSTEM AND METHOD USING CRYSTAL MICROBALANCE(S)

15/272,924 | U.S. Patent Application

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