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Inventors

JAMES MATTHEW HOLDEN SONG-MOON SUH TODD EGAN KALYANJIT GHOSH LEON VOLFOVSKI MICHAEL R. RICE RICHARD GILJUM

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APPLIED MATERIALS, INC.

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APPLIED MATERIALS, INC.

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METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

15/264,082 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 13, 2016

Examiner BIBI SHARIDAN CARRILLO

Class 134

Art Group 1711

Patent No. 10,217,650

Case Type Utility - 134/033000

Status Patented Case

Parent 13/785,903 Patented

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

15/264,082 | U.S. Patent Application

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