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Inventors

SHIH-CHANG LIANG WEI-CHIEH HUANG CHAO-NAN WEI CUO-YO NI HUI-YUN BOR

Applicant

NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHN

Assignee

NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

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APPARATUS FOR STABLY EVAPORATION DEPOSITING UNIFORM THIN FILMS

15/201,620 | U.S. Patent Application

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Location ELECTRONIC

Filed July 5, 2016

Examiner KEATH T CHEN

Class 118

Art Group 1716

Case Type Utility - 118/726000

Status Final Rejection Mailed

Parent 14/716,882 Patented

Child 103134501

Last Updated: 5 years, 3 months ago

Date	#	Transaction
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APPARATUS FOR STABLY EVAPORATION DEPOSITING UNIFORM THIN FILMS

15/201,620 | U.S. Patent Application

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