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Inventors

Venkateswara R. PALLEM Christian Dussarrat Wontae Noh

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American Air Liquide, Inc.

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PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS

15/177,446 | U.S. Patent Application

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Location ELECTRONIC

Filed June 9, 2016

Examiner ANTHONY HO

Class 438

Art Group 2817

Patent No. 9,711,347

Case Type Utility - 438/778000

Status Patented Case

Parent 14/332,720 Patented

Parent 14/39,692 Patented

Parent 13/328,586 Abandoned

Parent 12/479,175 Patented

Parent 61/59,214 Expired

Last Updated: 4 years, 2 months ago

Date	#	Transaction
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PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS

15/177,446 | U.S. Patent Application

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