Lithographic Apparatus and Method

14/762,452 | U.S. Patent Application

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Location ELECTRONIC
Filed July 21, 2015
Examiner CHRISTINA A RIDDLE
Class 355
Art Group 2882
Patent No. 10,001,713
Case Type Utility - 355/030000
Status Patented Case
Parent PCT/EP2014/052204 Published
Parent 61/762,047 Expired
Child 15/984,040 Patented
Last Updated: 3 months ago
Date # Transaction
12/7/2021Payment of Maintenance Fee, 4th Year, Large Entity
5/5/2021Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update In-house documents including Examiner Notes/Search Results
6/19/2018Recordation of Patent Grant Mailed
6/19/2018Patent Issue Date Used in PTA Calculation
6/19/201886.5PTA 36 Months
6/19/201886Patent Issue Date Used in PTA Calculation
5/31/2018Email Notification
5/30/2018Issue Notification
5/30/2018Issue Notification Mailed
5/17/2018Dispatch to FDC
5/17/201884Dispatch to FDC
5/16/2018Application Is Considered Ready for Issue
5/16/201882Application Is Considered Ready for Issue
5/15/2018Issue Fee Payment (PTO-85B) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/15/2018Post Allowance Communication - Incoming Written Arguments, Opinions, Incoming amendments, Papers received from applicants
5/15/2018Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
5/15/2018Electronic Filing System Acknowledgment Receipt Office Actions Communications
5/15/2018

Event:

Allowance
Response to Reasons for Allowance
5/15/2018Issue Fee Payment Verified
5/15/2018Issue Fee Payment Received
5/15/201883Response to Reasons for Allowance
5/15/201881Issue Fee Payment Verified
5/15/201880Issue Fee Payment Received
2/16/2018

Event:

Office Action
Notice of Allowance and Fees Due (PTOL-85) Office Actions Communications
2/16/2018List of references cited by examiner Documents including citations
2/16/2018Search information including classification, databases and other search related notes Documents including classifications
2/16/2018Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
2/16/2018Issue Information including classification, examiner, name, claim, renumbering, etc. Documents including classifications
2/16/2018

Event:

Allowance
Mail Notice of Allowance
2/16/201877Mail Notice of Allowance
2/12/2018

Event:

Allowance
Notice of Allowance Data Verification Completed
2/12/201870Notice of Allowance Data Verification Completed
2/1/2018

Event:

Allowance
Reasons for Allowance
2/1/2018Examiner's Amendment Communication
2/1/201869Reasons for Allowance
2/1/201868Examiner's Amendment Communication
12/14/2017Date Forwarded to Examiner
12/14/201766Date Forwarded to Examiner
11/28/2017Amendment/Request for Reconsideration-After Non-Final Rejection Written Arguments, Opinions, Incoming amendments, Papers received from applicants
11/28/2017Transmittal Letter
11/28/2017Electronic Filing System Acknowledgment Receipt Office Actions Communications
11/28/2017Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
11/28/2017Claims Application Documents
11/28/2017Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
11/28/2017Response after Non-Final Action
11/28/201765Response after Non-Final Action
10/25/2017Applicant Initiated Interview Summary (PTOL-413)
10/25/2017Office Action Appendix
10/25/2017Mail Interview Summary - Applicant Initiated - Telephonic
10/25/201764Mail Interview Summary - Applicant Initiated - Telephonic
10/23/2017Interview Summary - Applicant Initiated - Telephonic
10/23/201762Interview Summary - Applicant Initiated - Telephonic
9/13/2017

Event:

Office Action
Non-Final Rejection Office Actions Communications
9/13/2017List of references cited by examiner Documents including citations
9/13/2017Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
9/13/2017Search information including classification, databases and other search related notes Documents including classifications
9/13/2017

Event:

Office Action
Mail Non-Final Rejection
9/13/201761Mail Non-Final Rejection
9/11/2017

Event:

Office Action
Non-Final Rejection
9/11/201757Non-Final Rejection
3/29/2017Date Forwarded to Examiner
3/29/2017Disposal for a RCE / CPA / R129
3/29/201756Date Forwarded to Examiner
3/29/201753Disposal for a RCE / CPA / R129
3/16/2017Request for Continued Examination (RCE) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/16/2017Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/16/2017Electronic Filing System Acknowledgment Receipt Office Actions Communications
3/16/2017Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/16/2017Request for Continued Examination (RCE)
3/16/2017Workflow - Request for RCE - Begin
3/16/201754Request for Continued Examination (RCE)
3/16/201752Workflow - Request for RCE - Begin
3/10/2017Advisory Action (PTOL-303) Office Actions Communications
3/10/2017After Final Consideration Program Decision
3/10/2017Amendment After Final or under 37CFR 1.312, initialed by the examiner. In-house documents including Examiner Notes/Search Results
3/10/2017Mail Advisory Action (PTOL - 303)
3/10/201751Mail Advisory Action (PTOL - 303)
3/8/2017After Final Consideration Program Amendment too Extensive
3/8/2017Advisory Action (PTOL-303)
3/8/201748After Final Consideration Program Amendment too Extensive
3/8/201747Advisory Action (PTOL-303)
3/7/2017Date Forwarded to Examiner
3/7/201745Date Forwarded to Examiner
3/3/2017Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/3/2017After Final Consideration Program Request
3/3/2017Transmittal Letter
3/3/2017Electronic Filing System Acknowledgment Receipt Office Actions Communications
3/3/2017Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
3/3/2017Claims Application Documents
3/3/2017Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
3/3/2017PILOT- Request for After Final Consideration Program
3/3/2017Response after Final Action
3/3/201746PILOT- Request for After Final Consideration Program
3/3/201744Response after Final Action
1/11/2017

Event:

Office Action
Final Rejection Office Actions Communications
1/11/2017List of references cited by examiner Documents including citations
1/11/2017Search information including classification, databases and other search related notes Documents including classifications
1/11/2017Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
1/11/2017

Event:

Office Action
Mail Final Rejection (PTOL - 326)
1/11/201743Mail Final Rejection (PTOL - 326)
1/6/2017

Event:

Office Action
Final Rejection
1/6/201741Final Rejection
11/7/2016Date Forwarded to Examiner
11/7/201639Date Forwarded to Examiner
10/25/2016Amendment/Request for Reconsideration-After Non-Final Rejection Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/25/2016Specification Application Documents
10/25/2016Claims Application Documents
10/25/2016Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/25/2016Drawings-only black and white line drawings Application Documents
10/25/2016Electronic Filing System Acknowledgment Receipt Office Actions Communications
10/25/2016Transmittal Letter
10/25/2016Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
10/25/2016New or Additional Drawing Filed
10/25/2016Response after Non-Final Action
10/25/201640New or Additional Drawing Filed
10/25/201638Response after Non-Final Action
10/13/2016

Event:

Office Action
Non-Final Rejection Office Actions Communications
10/13/2016List of references cited by examiner Documents including citations
10/13/2016Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
10/13/2016Bibliographic Data Sheet Written Arguments, Opinions, Incoming amendments, Papers received from applicants
10/13/2016List of References cited by applicant and considered by examiner Documents including citations
10/13/2016Search information including classification, databases and other search related notes Documents including classifications
10/13/2016

Event:

Office Action
Mail Non-Final Rejection
10/13/201637Mail Non-Final Rejection
10/11/2016

Event:

Office Action
Non-Final Rejection
10/11/201635Non-Final Rejection
10/4/2016Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
10/4/2016Examiner's search strategy and results In-house documents including Examiner Notes/Search Results
10/4/2016Information Disclosure Statement considered
10/4/201632Information Disclosure Statement considered
9/26/2016Date Forwarded to Examiner
9/26/201631Date Forwarded to Examiner
9/22/2016Response to Election / Restriction Filed Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/22/2016Electronic Filing System Acknowledgment Receipt Office Actions Communications
9/22/2016Transmittal Letter
9/22/2016Response to Election / Restriction Filed
9/22/201630Response to Election / Restriction Filed
8/10/2016Requirement for Restriction/Election Office Actions Communications
8/10/2016Mail Restriction Requirement
8/10/201628Mail Restriction Requirement
8/5/2016Restriction/Election Requirement
8/5/201626Restriction/Election Requirement
5/3/2016Case Docketed to Examiner in GAU
5/3/201625Case Docketed to Examiner in GAU
2/12/2016Case Docketed to Examiner in GAU
2/12/201624Case Docketed to Examiner in GAU
12/28/2015Notice of Publication
12/28/2015PG-Pub Issue Notification
12/28/201520PG-Pub Issue Notification
12/24/2015Application ready for PDX access by participating foreign offices
12/24/201521Application ready for PDX access by participating foreign offices
10/27/2015Information Disclosure Statement (IDS) Form (SB08) Information Disclosure
10/27/2015Foreign Reference Documents including citations
10/27/2015Foreign Reference Documents including citations
10/27/2015Foreign Reference Documents including citations
10/27/2015Foreign Reference Documents including citations
10/27/2015Foreign Reference Documents including citations
10/27/2015Other reference-Patent/Application/Search Documents
10/27/2015Other reference-Patent/Application/Search Documents
10/27/2015Electronic Filing System Acknowledgment Receipt Office Actions Communications
10/27/2015Transmittal Letter
10/27/2015Transmittal Letter
10/27/2015Reference capture on IDS
10/27/2015Information Disclosure Statement (IDS) Filed
10/27/2015Information Disclosure Statement (IDS) Filed
10/27/201518Reference capture on IDS
10/27/201517Information Disclosure Statement (IDS) Filed
10/27/201514Information Disclosure Statement (IDS) Filed
10/1/2015Filing Receipt
10/1/2015Filing Receipt - Corrected
10/1/201513Filing Receipt - Corrected
9/28/2015Request for Corrected Filing Receipt Written Arguments, Opinions, Incoming amendments, Papers received from applicants
9/28/2015Electronic Filing System Acknowledgment Receipt Office Actions Communications
9/28/2015Transmittal Letter
9/28/2015Miscellaneous Incoming Letter
9/28/201522Miscellaneous Incoming Letter
9/22/2015Application Is Now Complete
9/22/2015Application Dispatched from OIPE
9/22/201512Application Is Now Complete
9/22/201511Application Dispatched from OIPE
9/17/2015Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed Office Actions Communications
9/17/2015Filing Receipt
9/17/2015Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
9/17/2015Claims Worksheet (PTO-2022) In-house documents including Examiner Notes/Search Results
9/17/2015Sent to Classification Contractor
9/17/2015FITF set to NO - revise initial setting
9/17/2015Filing Receipt
9/17/2015Notice of DO/EO Acceptance Mailed
9/17/20159Sent to Classification Contractor
9/17/20158FITF set to NO - revise initial setting
9/17/20156Filing Receipt
9/17/20155Notice of DO/EO Acceptance Mailed
7/21/2015Transmittal of New Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/21/2015Authorization for Extension of Time all replies Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/21/2015Preliminary Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/21/2015Claims Application Documents
7/21/2015Applicant Arguments/Remarks Made in an Amendment Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/21/2015Power of Attorney Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/21/2015Documents submitted with 371 (National Stage) Applications Application Documents
7/21/2015Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/21/2015Electronic Filing System Acknowledgment Receipt Office Actions Communications
7/21/2015Certified Copy of Foreign Priority Application Written Arguments, Opinions, Incoming amendments, Papers received from applicants
7/21/2015PCT/RO/101 - Request form for new International Application - Conventional Application Documents
7/21/2015Specification Application Documents
7/21/2015Claims Application Documents
7/21/2015Abstract Application Documents
7/21/2015Abstract Application Documents
7/21/2015Drawings-only black and white line drawings Application Documents
7/21/2015Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/21/2015Fee Worksheet (SB06) In-house documents including Examiner Notes/Search Results
7/21/2015Oath or Declaration Filed (Including Supplemental)
7/21/2015Request for Foreign Priority (Priority Papers May Be Included)
7/21/2015Preliminary Amendment
7/21/2015371 Completion Date
7/21/2015Patent Term Adjustment - Ready for Examination
7/21/2015Applicants have given acceptable permission for participating foreign
7/21/2015Cleared by OIPE CSR
7/21/2015Entity Status Set To Undiscounted (Initial Default Setting or Status Change)
7/21/2015Initial Exam Team nn
7/21/201586.4Commencement Date
7/21/201523Oath or Declaration Filed (Including Supplemental)
7/21/201516Request for Foreign Priority (Priority Papers May Be Included)
7/21/201515Preliminary Amendment
7/21/201510371 Completion Date
7/21/20157Patent Term Adjustment - Ready for Examination
7/21/20154Applicants have given acceptable permission for participating foreign
7/21/20153Cleared by OIPE CSR
7/21/20152Entity Status Set To Undiscounted (Initial Default Setting or Status Change)
7/21/20151Initial Exam Team nn
2/5/20140.5International Filing date