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Inventors

SHIH-CHANG LIANG WEI-CHIEH HUANG CHAO-NAN WEI CUO-YO NI HUI-YUN BOR

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NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHN

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NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

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METHOD AND APPARATUS FOR STABLY EVAPORATION DEPOSITING UNIFORM THIN FILMS

14/716,882 | U.S. Patent Application

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Location ELECTRONIC

Filed May 20, 2015

Examiner BRET P CHEN

Class 427

Art Group 1715

Patent No. 9,574,264

Case Type Utility - 427/248100

Status Patented Case

Child 15/201,620 Abandoned

Child 103134501

Last Updated: 4 years, 10 months ago

Date	#	Transaction
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METHOD AND APPARATUS FOR STABLY EVAPORATION DEPOSITING UNIFORM THIN FILMS

14/716,882 | U.S. Patent Application

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