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`You can retrieve a variety of patent and utility model gazettes by their numbers.
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`fl
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`JP,07-106611,A
`
`PM E Image
`
`(11)Publication number
`
`(43)Date of publication of application
`(51)Int.Cl.
`
`07-106611
`21.04.1995
`
`H91L 31/94
`
`(21)Application number
`(22)Date of filing
`(71)Applicant
`(72)Inventor
`
`05-243040
`29.09. 1993
`TONEN CORP
`SAGAWA YASUNORI
`OKAYASU YOSHINORI
`
`(54)FABRICATION 0F BSF SOLAR CELL
`
`(57)Abstract
`PURPOSE: To realize a a BSF type solar cell having high photoelectric conversion efficiency by
`forming an n+ poly—Si layer by thermal CVD using BZH6/SiH4/SiF4 as a material gas thereby
`improving the quality of n+ poly-Si layer.
`CONSTITUTION: A material gas of B2H6/SiH4/SiF4=0.1/10/500 is introduced into a filming
`chamber evacuated to 1x10—5 Torr by a thermal CVD system thus depositing a p type
`polysilicon layer 2 on one side of an n single crystal silicon substrate at 700°C and an n+
`polysilicon layer 5 of PH3/SiH4/ SiF4=O.1/10/330 on the opposite side thereof. An ITO is
`further deposited on the p type polysilicon layer 2 to form an antireflection layer 3 and an
`interdigital electrode 4 is formed of a silver paste on the surface thereof whereas a rear-
`electrode 6 is formed on the rear side of the n+ polysilicon layer 5. Since a high quality n+or
`p+ silicon layer can be formed on an n-type or a p type silicon substrate under low film
`deposition temperature, a BSF solar cell having high photoelectric conversion efficiency can be
`realized.
`
`flair; an Usage
`
`thacy PGHL? Suesflonnauc
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