DERWENT-
`ACC-NO:
`
`DERWENT-
`WEEK:
`
`1995-189164
`
`l99525
`
`Copyright @2017 Thomson Reuters
`
`TITLE:
`
`
`
`38F type solar battery mfr. by forming poly:silicon@ layer on
`
`
`
`W=type silicon substrate by CVD and using silicon fluoride as
`etching gas
`
`INVENTOR:OKAYASU Y;
`
`SAGAWA Y
`
`
`PATENT-ASSIGNEEzTONEN CORP[TOFU]
`
`PRIORITY—DATA:l993JP—24304O (September 29,
`
`l993)
`
`PATENT-FAMILY:
`
`PUB-NO
`
`PUB-DATE
`
`LANGUAGE
`
`
`J? 07106611 AApril 21, 1995 JA
`
`APPLICATION-DATA:
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`PUB-NO
`
`APPL—DESCRIPTORAPPL—NO
`
`APPL—DATE
`
`
`J? 07106611AN/A
`
`
`l993J?—24304OSeptember 29, 1993
`
`INT—CL—
`
`CURRENT:
`
`TYPE
`
`
`CIPP
`
`IPC DATE
`
`
`5g; 1 31/gg20060101
`
`ABSTRACTED-PUB-N02JP 07106611 A
`
`BASIC-ABSTRACT:
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`1/31/2017,EASTVerflon:33.12
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`

`

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`
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`qu method involves forming a ? type polysilicon 'ayer (9) on the
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`
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`light incident side of a N type single crystal si'icon subsuraue (l).
`
`is set up
`a ?N junction is formed. A N+ polysilicon layer
`
`
`at tie opposite side of the silicon substrate and forms a Ha
`
`jJnCtion. The N+ polysi'icon layer is ‘ormed by CV3 method which
`
`
`applies Q9H6 or SiF4 or Sii4 gas onto the heated silicon subStrate.
`
`a halogen radical emitted near
`qun Sif4 is used as an etching agent,
`
`tie heated silicon substrate.
`
`
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`(5)
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`Tqus,
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`ADVANTAGE — The method prevents generation 0'
`'loating 'oreign
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`
`
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`in a room; reduces sabstrate temp. 0' QSF type solar
`material
`
`
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`ba ,ery; and enables m'r. o” QSF type solar bauuery with high
`
`
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`phOtoelectric conversion e"iciency and high Stability.
`
`
`3wg.1/10
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`CHOSEN—
`DRAWING:
`
`TITLE-TERMS:
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`TYP? SO.A? QATTVQY MANUFAClJRfi EOQMiVG POLY S L CON@ LAYER
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`V=lYBfi S
`. CON SJQSTRAT? CV3 ELUO? Dfi
`filCH GAS
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`
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`ADDL-INDEXING- 3AC< SUQEACfi E fi.3
`TERMS:
`
`DERWENT-CLASSznO3 U12 X15
`
`L
`
`CPI—CODESzLO3—305; L04—c02; LO4—C103;
`
`
`
`EPI-CODESiUlZ—A02A3;
`
`SECONDARY-ACC-NO:
`
`CPI Secondary Accession Numbers:
`
`Non-CPI Secondary Accession Numbers:;995—l48457
`
`;995—087785
`
`
`
`1/31/2017,EASTVerflon:33.lZ
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`

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