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LITHOGRAPHIC APPARATUS

14/500,386 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 29, 2014
Examiner HUNG NGUYEN
Class 355
Art Group 2882
Patent No. 9,329,494
Case Type Utility - 355/053000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 13/188,096 Patented
Parent 12/327,414 Patented
Parent 11/15,766 Patented
Child 14/661,929 Patented
Child 15/216,670 Patented
Child 15/802,429 Patented
Last Updated: 1 year, 11 months ago
Date # Transaction