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Inventors

Takashi YOSHII Akira IKEDA Satoshi WATANABE Yukio INAZUKI Toyohisa SAKURADA Hideo KANEKO Yoshio KAWAI

Applicant

SHIN-ETSU CHEMICAL CO., LTD.

Assignee

SHIN-ETSU CHEMICAL CO., LTD.

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PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK BLANK

14/489,019 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 17, 2014

Examiner CHRISTOPHER G YOUNG

Class 430

Art Group 1721

Patent No. 9,488,906

Case Type Utility - 430/005000

Status Patented Case

Child 15/284,098 Patented

Child 2014-164960

Child 2014-159610

Child 2013-198585

Last Updated: 5 years ago

Date	#	Transaction
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PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK BLANK

14/489,019 | U.S. Patent Application

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