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Inventors

Venkateswara R. PALLEM Christian Dussarrat Wontae Noh

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American Air Liquide, Inc.

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PREPARATION OF CERIUM-CONTAINING PRECURSOR AND DEPOSITION OF CERIUM-CONTAINING FILMS

14/332,720 | U.S. Patent Application

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Location ELECTRONIC

Filed July 16, 2014

Examiner ANTHONY HO

Class 257

Art Group 2817

Patent No. 9,384,963

Case Type Utility - 257/040000

Status Patented Case

Parent 14/39,692 Patented

Parent 13/328,586 Abandoned

Parent 12/479,175 Patented

Parent 61/59,214 Expired

Child 15/177,446 Patented

Last Updated: 4 years, 4 months ago

Date	#	Transaction
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PREPARATION OF CERIUM-CONTAINING PRECURSOR AND DEPOSITION OF CERIUM-CONTAINING FILMS

14/332,720 | U.S. Patent Application

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