PTO/SB/44 (09-07)
`Approved for use through 08/31/2013. OMB 0651-0033
`U.S. Patent and Trademark Office; U.S. DEPARTMENT OF COMMERCE
`Under the Paperwork Reduction Act of 1995, no persons are required to respond to a collection of information unless it displays a valid OMB control number.
`{Also Form PTO-1050
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`CERTIFICATE OF CORRECTION
`
`PATENT NO.
`
`: 8,841,778
`
`APPLICATION NO.: 13/963,149
`
`ISSUE DATE
`
`> 9.93.9014
`
`INVENTOR(S) |EEpy
`
`it is certified that an error appears or errors appear in the above-identified patent and that said Letters Patent
`is hereby corrected as shown below:
`
`having a stress of less than 5 x 10° dynes/cm’tensile.
`
`14.
`
`A stacked substrate-circuit layer structure comprising:
`
`a first circuit layer comprising at least one of contacts, interconnects, and circuitry; and
`
`a second circuit layer stacked with the first circuit layer, the second circuit layer
`comprising:
`
`a semiconductor substrate that is of one piece and is monocrystalline;
`
`at least one of contacts, interconnects, and circuitry integrated with the
`semiconductor substrate;
`
`interconnect conductors extending vertically through the semiconductor substrate
`and connected between the at least one of contacts, interconnects, and circuitry of the
`second circuit layer and the at least one of contacts, interconnects, and circuitry of the
`first circuit layer, and
`
`silicon-based dielectric insulators around the interconnect conductors and passing
`vertically through the semiconductor substrate, the silicon-based dielectric insulators
`
`MAILING ADDRESS OF SENDER (Please do not use custorner number below}:
`10518 Phil Place
`Cupertino, CA 951
`
`This collection of information is required by 37 CFR 1.322, 1.323, and 1.524. The information is required to obtain or retain a benefit by the public whichis to file
`(and by the USPTO to process) an application. Confidentiality is governed by 35 U.S.C. 122 and 37 CFR 1.14. This collection is estimated to take 1.0 hour to
`complete, including gathering, preparing, and submitting the completed application form ta the USPTO. Time will vary depending upon the individual case. Any
`comments on the amount of time you require to complete this forrn and/or suggestions for reducing this burden, should be sent to the Chief Information Officer,
`U.S. Patent and Trademark Office, U.5. Department of Commerce, P.O. Box 1450, Alexandria, VA 22313-1450. DO NOT SEND FEES OR COMPLETED
`FORMS TO THIS ADDRESS. SEND To: Attention Certificate of Corrections Branch, Commissioner for Patents, P.O. Box 1450, Alexandria,
`VA 22313-1450,
`
`if you need assistance in completing the form, call 1-800-PTO-9199 and select option 2.
`
`

`

`PTO/SB/44 (09-07)
`Approved for use through 08/31/2013. OMB 0651-0033
`U.S. Patent and Trademark Office; U.S. DEPARTMENT OF COMMERCE
`Under the Paperwork Reduction Act of 1995, no persons are required to respond to a collection of information unless it displays a valid OMB control number.
`{Also Form PTO-1050
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`CERTIFICATE OF CORRECTION
`
`PATENT NO.
`
`: 8,841,778
`
`APPLICATION NO.: 13/963,149
`
`ISSUE DATE
`
`> 9.93.9014
`
`INVENTOR(S) |EEpy
`
`it is certified that an error appears or errors appear in the above-identified patent and that said Letters Patent
`is hereby corrected as shown below:
`
`the second circuit layer is less than 50 micronsthick.
`
`The stacked substrate-circuit layer structure of claim 15, wherein the secondcircuit layer
`16.
`is substantially flexible based on the semiconductor substrate being substantially flexible and the
`stress of the silicon-based dielectric film being less than 5 x 10° dynes/em* tensile.
`
`17.
`
`The stacked substeate-circuit layer structure of claim 15, wherein:
`
`MAILING ADDRESS OF SENDER (Please do not use custorner number below}:
`10518 Phil Place
`Cupertino, CA 951
`
`This collection of information is required by 37 CFR 1.322, 1.323, and 1.524. The information is required to obtain or retain a benefit by the public whichis to file
`(and by the USPTO to process) an application. Confidentiality is governed by 35 U.S.C. 122 and 37 CFR 1.14. This collection is estimated to take 1.0 hour to
`complete, including gathering, preparing, and submitting the completed application form ta the USPTO. Time will vary depending upon the individual case. Any
`comments on the amount of time you require to complete this forrn and/or suggestions for reducing this burden, should be sent to the Chief Information Officer,
`U.S. Patent and Trademark Office, U.5. Department of Commerce, P.O. Box 1450, Alexandria, VA 22313-1450. DO NOT SEND FEES OR COMPLETED
`FORMS TO THIS ADDRESS. SEND To: Attention Certificate of Corrections Branch, Commissioner for Patents, P.O. Box 1450, Alexandria,
`VA 22313-1450,
`
`if you need assistance in completing the form, call 1-800-PTO-9199 and select option 2.
`
`