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PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS

13/940,654 | U.S. Patent Application

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Location ELECTRONIC
Filed July 12, 2013
Examiner ANTHONY HO
Class 257
Art Group 2817
Patent No. 9,076,648
Case Type Utility - 257/040000
Status Patented Case
Parent 13/602,717 Patented
Parent 12/479,175 Patented
Parent 61/59,214 Expired
Last Updated: 5 years ago
Date # Transaction