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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

13/889,780 | U.S. Patent Application

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Location ELECTRONIC
Filed May 8, 2013
Examiner COLIN WRIGHT KREUTZER
Class 355
Art Group 2882
Patent No. 9,500,943
Case Type Utility - 355/066000
Status Patented Case
Parent 12/379,415 Patented
Parent 11/882,208 Abandoned
Parent 11/266,288 Patented
Parent PCT/JP04/06417 -
Parent 60/721,582 Expired
Child 2003-128154
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Last Updated: 4 years, 7 months ago
Date # Transaction