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Inventors

JAMES MATTHEW HOLDEN SONG-MOON SUH TODD EGAN Kalyanjit Ghosh Leon Volfovski Michael R. Rice Richard Giljum

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APPLIED MATERIALS, INC.

Assignee

APPLIED MATERIALS, INC.

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METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

13/785,903 | U.S. Patent Application

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Location ELECTRONIC

Filed March 5, 2013

Examiner JASON Y KO

Class 134

Art Group 1711

Patent No. 9,443,714

Case Type Utility - 134/148000

Status Patented Case

Child PCT/US14/18182 Published

Child 15/264,082 Patented

Last Updated: 5 years, 2 months ago

Date	#	Transaction
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METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

13/785,903 | U.S. Patent Application

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