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METHODS OF MANUFACTURING LARGE-AREA SPUTTERING TARGETS USING INTERLOCKING JOINTS

13/628,090 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 27, 2012
Examiner BRIAN W JENNISON
Class 219
Art Group 3742
Patent No. 9,108,273
Case Type Utility - 219/117100
Status Patented Case
Parent 61/540,644 Expired
Parent 61/648,333 Expired
Child 14/793,931 Patented
Child 15/42,987 Patented
Last Updated: 2 years, 2 months ago
Date # Transaction