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METHODS OF MANUFACTUING LARGE-AREA SPUTTERING TARGETS

13/628,088 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 27, 2012
Examiner JOHN JOSEPH BRAYTON
Class 204
Art Group 1756
Patent No. 9,120,183
Case Type Utility - 204/298130
Status Patented Case
Parent 61/540,644 Expired
Parent 61/648,333 Expired
Last Updated: 4 years, 1 month ago
Date # Transaction