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PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS

13/602,717 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 4, 2012
Examiner ANTHONY HO
Class 438
Art Group 2815
Patent No. 8,507,905
Case Type Utility - 438/040000
Status Patented Case
Parent 12/479,175 Patented
Parent 61/59,214 Expired
Child 13/940,654 Patented
Last Updated: 4 years, 2 months ago
Date # Transaction