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TOKYO ELECTRON LIMITED

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Shinji Himori Norikazu Yamada Ohse Takeshi

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SUBSTRATE PROCESSING METHOD

13/434,989 | U.S. Patent Application

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Location ELECTRONIC

Filed March 30, 2012

Examiner AIDEN Y LEE

Class 156

Art Group 1718

Case Type Utility - 156/345440

Status Abandoned -- Failure to Respond to an Office Action

Parent 61/477,634 Expired

Child 15/391,108 Patented

Child 2011-079733

Last Updated: 2 years, 3 months ago

Date	#	Transaction
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SUBSTRATE PROCESSING METHOD

13/434,989 | U.S. Patent Application

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