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CATADIOPTRIC PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

13/275,760 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 18, 2011
Examiner ARNEL C LAVARIAS
Class 359
Art Group 2872
Patent No. 9,081,295
Case Type Utility - 359/365000
Status Patented Case
Parent 11/513,160 Patented
Parent 11/266,288 Patented
Parent PCT/JP2004/006417 -
Parent 60/721,582 Expired
Child 2003-128154
Child 2003-350647
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Last Updated: 1 year, 9 months ago
Date # Transaction