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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

13/189,212 | U.S. Patent Application

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Location ELECTRONIC
Filed July 22, 2011
Examiner HUNG NGUYEN
Class 355
Art Group 2882
Patent No. 8,462,312
Case Type Utility - 355/030000
Status Patented Case
Parent 13/188,096 Patented
Parent 12/327,414 Patented
Parent 11/15,766 Patented
Last Updated: 5 years, 7 months ago
Date # Transaction