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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

13/188,096 | U.S. Patent Application

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Location ELECTRONIC
Filed July 21, 2011
Examiner HUNG NGUYEN
Class 355
Art Group 2882
Patent No. 9,116,443
Case Type Utility - 355/030000
Status Patented Case
Parent 12/327,414 Patented
Parent 11/15,766 Patented
Child 13/189,212 Patented
Child 14/500,386 Patented
Child 14/661,929 Patented
Child 15/216,670 Patented
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Last Updated: 2 years ago
Date # Transaction