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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

12/884,332 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 17, 2010
Examiner LEE A FINEMAN
Class 359
Art Group 2872
Case Type Utility - 359/365000
Status Abandoned -- Failure to Respond to an Office Action
Parent 11/513,160 Patented
Parent 11/266,288 Patented
Parent PCT/JP2004/006417 -
Parent 60/721,582 Expired
Child 2003-128154
Child 2003-350647
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Last Updated: 2 years, 5 months ago
Date # Transaction