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Inventors

Venkateswara R. Pallem Christian Dussarrat

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AMERICAN AIR LIQUIDE, INC.

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PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS

12/479,175 | U.S. Patent Application

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Location ELECTRONIC

Filed June 5, 2009

Examiner ANTHONY HO

Class 438

Art Group 2815

Patent No. 8,283,201

Case Type Utility - 438/099000

Status Patented Case

Parent 61/59,214 Expired

Child PCT/US09/46443 Published

Child 13/328,586 Abandoned

Child 13/602,717 Patented

Child 13/940,654 Patented

Child 14/39,692 Patented

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Last Updated: 4 years, 5 months ago

Date	#	Transaction
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PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF LANTHANIDE-CONTAINING FILMS

12/479,175 | U.S. Patent Application

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