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CMP PAD THICKNESS AND PROFILE MONITORING SYSTEM

12/437,897 | U.S. Patent Application

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Location ELECTRONIC
Filed May 8, 2009
Examiner WILNER JEAN BAPTISTE
Class 438
Art Group 2823
Patent No. 8,043,870
Case Type Utility - 438/007000
Status Patented Case
Parent 61/51,634 Expired
Last Updated: 2 years, 6 months ago
Date # Transaction