Download Docs
Export

Projection optical system, exposure apparatus, and exposure method

12/379,415 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location ELECTRONIC
Filed Feb. 20, 2009
Examiner ARNEL C LAVARIAS
Class 359
Art Group 2872
Patent No. 9,086,635
Case Type Utility - 359/365000
Status Patented Case
Parent 11/882,208 Abandoned
Parent 11/266,288 Patented
Parent PCT/JP04/06417 -
Parent 60/721,582 Expired
Child 13/889,780 Patented
Child 14/227,349 Patented
Show All
Last Updated: 2 years, 6 months ago
Date # Transaction