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CMP PAD DRESSERS WITH HYBRIDIZED ABRASIVE SURFACE AND RELATED METHODS

12/255,823 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 22, 2008
Examiner MAURINA T RACHUBA
Class 451
Art Group 3727
Patent No. 8,393,934
Case Type Utility - 451/056000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 12/168,110 Patented
Parent 60/976,198 Expired
Parent 11/560,817 Patented
Child 12/726,786 Patented
Child 13/794,164 Patented
Child 13/797,704 Abandoned
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Last Updated: 3 years ago
Date # Transaction